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    Automatic probe replacement in a scanning probe microscope
    41.
    发明授权
    Automatic probe replacement in a scanning probe microscope 失效
    在扫描探针显微镜中自动探针更换

    公开(公告)号：US6093930A

    公开(公告)日：2000-07-25

    申请号：US54013

    申请日：1998-04-02

    Applicant: James Edward Boyette, Jr. ,  James Michael Hammond ,  Salvatore R. Riggio, Jr. ,  Michael Servedio

    Inventor： James Edward Boyette, Jr. ,  James Michael Hammond ,  Salvatore R. Riggio, Jr. ,  Michael Servedio

    IPC: G01Q70/02 ,  G01Q70/14 ,  H01J37/067

    CPC classification number: G01Q70/02 ,  B82Y35/00 ,  Y10S977/86

    Abstract: A scanning probe microscope having a probe attachment fixture, to which a probe assembly is removably attached during measurements, driven in an engagement direction, and a sample stage driven in scanning directions perpendicular to the engagement direction includes a buffer with a number of buffer stations within the sample stage. When the stage is driven so that one of the buffer stations is in alignment with the attachment fixture, and when the attachment fixture is driven in the engagement direction to be in proximity to the buffer station, the probe assembly is selectively transferred in either direction between the attachment fixture and the buffer station. In a preferred embodiment, probe assemblies are transferred on transfer pallets, and a stationary magazine is provided for storing these pallets, which are transferred in either direction between the magazine and the buffer.

    Abstract translation: 一种扫描探针显微镜，其具有探针附接固定装置，探测器组件在测量期间以接合方向被驱动而可移除地附接到该探针附件，并且沿垂直于接合方向的扫描方向驱动的样本台包括具有多个缓冲站的缓冲器， 样品阶段。 当舞台被驱动使得缓冲站中的一个与附接夹具对准时，并且当附接夹具沿接合方向被驱动以接近缓冲站时，探针组件选择性地在 附件夹具和缓冲站。 在优选实施例中，探针组件被转移到转移托盘上，并且提供固定盒以存储这些托盘，这些托盘在盒和缓冲器之间沿任一方向传送。

    Device for the generation of electron beams
    42.
    发明授权
    Device for the generation of electron beams 失效
    用于产生电子束的装置

    公开(公告)号：US5623148A

    公开(公告)日：1997-04-22

    申请号：US570185

    申请日：1995-12-11

    Applicant: Bernd-Dieter Wenzel ,  Wolfgang Erbkamm ,  Olaf Gawer

    Inventor： Bernd-Dieter Wenzel ,  Wolfgang Erbkamm ,  Olaf Gawer

    IPC: H01J37/067 ,  H01J37/075 ,  H01J37/065

    CPC classification number: H01J37/067 ,  H01J37/075

    Abstract: The invention which relates to a device for the generating of electron beams with a vacuum chamber, in which a massive cathode (10) is arranged with a wire cathode (14) arranged above and a aperture anode (17) below the massive cathode (10) and whom below the aperture anode (17) focusing and/or deflecting magnet arrangements are provided which direct an electron beam (23) emitted by the massive cathode (10) and accelerated by the aperture anode (17) to a processing location (22), has the basic task to make the power of such devices variable over a large range using simple mechanical means. According to the invention the task is solved by arranging the aperture anode (17) rigidly and the massive cathode (10) and the wire cathode (14) axially movable within the vacuum chamber (1). For the movements of the massive cathode (10) and the wire cathode (14) contact means are provided which follow their movements and lead to the outside of the vacuum chamber (1). In addition for the axial movement of the massive cathode (10) a motion means is provided connected with the cathode (Figure).

    Abstract translation: 本发明涉及一种用于产生具有真空室的电子束的装置，其中大块阴极（10）布置有布置在其上的线阴极（14）和在大量阴极（10）下方的孔径阳极（17） ），并且在孔径阳极（17）下面聚焦和/或偏转磁体布置被提供，其引导由大量阴极（10）发射的电子束（23）并且被孔径阳极（17）加速到处理位置（22） ）的基本任务是使用简单的机械手段使这种装置的功率在大范围内变化。 根据本发明，通过刚性布置孔径阳极17和大量阴极10以及线阴极14在真空室1内可轴向移动来解决该任务。 对于大规模阴极（10）和线阴极（14）的移动，提供接触装置，其接触其运动并导致真空室（1）的外部。 另外，为了大量阴极（10）的轴向运动，还提供了一个与阴极连接的运动装置（图）。

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