公开(公告)号：US20130087704A1

公开(公告)日：2013-04-11

申请号：US13624607

申请日：2012-09-21

Applicant: Hitachi High-Technologies Corporation

Inventor： Tohru ISHITANI ,  Yoichi OSE ,  Hiroyasu SHICHI ,  Shinichi MATSUBARA ,  Tomihiro HASHIZUME ,  Muneyuki FUKUDA

IPC: H01J37/285 ,  H01J27/26

CPC classification number: H01J37/285 ,  B82Y15/00 ,  H01J27/024 ,  H01J27/26 ,  H01J37/08 ,  H01J37/09 ,  H01J37/18 ,  H01J37/28 ,  H01J2237/002 ,  H01J2237/0216 ,  H01J2237/024 ,  H01J2237/032 ,  H01J2237/0458 ,  H01J2237/061 ,  H01J2237/0807 ,  H01J2237/0835 ,  H01J2237/1501 ,  H01J2237/188 ,  H01J2237/24514

Abstract: A gas field ionization ion source (GFIS) is characterized in that the aperture diameter of the extraction electrode can be set to any of at least two different values or the distance from the apex of the emitter to the extraction electrode can be set to any of at least two different values. In addition, solid nitrogen is used for cooling. It may be possible to not only let divergently emitted ions go through the aperture of the extraction electrode but also, in behalf of differential pumping, reduce the diameter of the aperture. In addition, it may be possible to reduce the physical vibration of the cooling means. Consequently, it may be possible to provide a highly stable GFIS and a scanning charged particle microscope equipped with such a GFIS.

Abstract translation: 气体电离离子源（GFIS）的特征在于，提取电极的孔径可以被设置为至少两个不同的值中的任何一个，或者从发射极的顶点到引出电极的距离可以被设置为 至少两个不同的值。 此外，固体氮用于冷却。 可能不仅使发散的离子通过提取电极的孔径，而且代表差分泵浦，减小孔径的直径。 此外，可以减小冷却装置的物理振动。 因此，可以提供高度稳定的GFIS和装备有这种GFIS的扫描带电粒子显微镜。

公开(公告)号：US07652269B2

公开(公告)日：2010-01-26

申请号：US11597080

申请日：2004-08-19

Applicant: Joseph Hale Bunton ,  Jesse D. Olson

Inventor： Joseph Hale Bunton ,  Jesse D. Olson

IPC: G01B5/28 ,  H01J37/285 ,  H01J49/00

CPC classification number: H01J37/3045 ,  G01N23/22

Abstract: A laser atom probe (100) situates a counter electrode between a specimen mount and a detector (106), and provides a laser (116) having its beam (122) aligned to illuminate the specimen (104) through the aperture (110) of the counter electrode (108). The detector, specimen mount (102), and/or the counter electrode may be charged to some boost voltage and then be pulsed to bring the specimen to ionization. The timing of the laser pulses may be used to determine ion departure and arrival times allowing determination of the mass-to-charge ratios of the ions, thus their identities. Automated alignment methods are described wherein the laser is automatically directed to areas of interest.

Abstract translation: 激光原子探针（100）将对电极置于样品座和检测器（106）之间，并且提供其对准的光束（122）的激光器（116），以通过孔（110）的孔（110）照射样品 对电极（108）。 检测器，样品座（102）和/或对电极可以被充电到一些升压电压，然后被脉冲以使样本电离。 激光脉冲的定时可用于确定离子离开和到达时间，从而确定离子的质荷比，因此确定它们的身份。 描述了自动对准方法，其中激光被自动导向到感兴趣的区域。

公开(公告)号：US07034295B2

公开(公告)日：2006-04-25

申请号：US10937337

申请日：2004-09-10

Applicant: Takanori Koshikawa ,  Takashi Ikuta ,  Tsuneo Yasue ,  Masami Taguchi ,  Ibuki Tanaka

Inventor： Takanori Koshikawa ,  Takashi Ikuta ,  Tsuneo Yasue ,  Masami Taguchi ,  Ibuki Tanaka

IPC: H01J37/285

CPC classification number: H01J37/285 ,  H01J2237/2482

Abstract: A photoemission electron microscopy having a light source system for carrying out a high-resolution measurement such as work function distribution measurement or magnetic domain distribution with reliability, and a high-sensitivity measurement method using the photoemission electron microscopy. A photoemission electron microscopy having an excitation light source system in which a specimen is irradiated with irradiation light from a light source uses a vacuum chamber in which the specimen is placed and an objective lens which collects the irradiation light on a specimen surface. The objective lens is accommodated in the vacuum chamber. The light source may be placed outside the vacuum chamber. A condenser lens which makes the irradiation light from the light source generally parallel may be placed between the light source and the vacuum chamber. A transmission window which transmits the irradiation light while the vacuum chamber is sealed may be placed between the condenser lens and the objective lens. If a diffraction grating for selecting the wavelength of the irradiation light or a polarizing filter for selecting the direction of circularly polarized light in the irradiation light is used between the condenser lens and the transmission window, a high-resolution measurement of a work function distribution or a magnetic domain distribution on the specimen surface can be carried out.

Abstract translation: 具有用于进行诸如功函数分布测量或功能磁场分布的高分辨率测量的光源系统的光电子显微镜以及使用该光电子显微镜的高灵敏度测量方法。 具有激发光源系统的照射电子显微镜，其中用来自光源的照射光照射样本的激发光源系统使用其中放置有样本的真空室和将样品表面上的照射光聚集的物镜。 物镜容纳在真空室中。 光源可以放置在真空室外。 使来自光源的照射光大致平行的聚光透镜可以设置在光源和真空室之间。 在真空室被密封的同时透射照射光的透射窗可以放置在聚光透镜和物镜之间。 如果在聚光透镜和透射窗之间使用用于选择照射光的波长的衍射光栅或用于选择照射光中的圆偏振光的方向的偏振滤光器，则可以进行功函数分布的高分辨率测量或 可以在样品表面上进行磁畴分布。

公开(公告)号：US5885354A

公开(公告)日：1999-03-23

申请号：US762423

申请日：1996-12-09

Applicant: Jurgen Frosien ,  Dieter Winkler ,  Hans Zimmermann

Inventor： Jurgen Frosien ,  Dieter Winkler ,  Hans Zimmermann

IPC: H01L21/66 ,  C23C16/04 ,  H01J37/305 ,  H01J37/317 ,  H01L21/00 ,  H01L21/768 ,  H01J37/285

CPC classification number: H01L21/76892 ,  C23C16/047 ,  H01J37/3056 ,  H01L21/67069 ,  H01J2237/049 ,  H01J2237/31732 ,  H01J2237/31744

Abstract: The invention relates to a method and to apparatus for processing a specimen, particularly an integrated circuit, in which an area of the specimen to be processed is scanned with a corpuscular beam and at least one gas is supplied above the area to be processed so that with the aid of the corpuscular beam a chemical reaction takes place on the area to be processed. The processing speed can be markedly increased by the use of a magnetic field in the region of the probe.

Abstract translation: 本发明涉及一种用于处理样品，特别是集成电路的方法和装置，其中待处理样品的区域用红细胞束扫描，并且至少一种气体供应到待处理区域上方，使得 借助于红细胞束，待处理的区域发生化学反应。 通过在探头区域使用磁场可以显着提高处理速度。

公开(公告)号：US5872358A

公开(公告)日：1999-02-16

申请号：US733857

申请日：1996-10-18

Applicant: Hideo Todokoro ,  Makoto Ezumi

Inventor： Hideo Todokoro ,  Makoto Ezumi

IPC: H01J37/244 ,  H01J37/256 ,  H01J37/28 ,  H01J37/285

CPC classification number: H01J37/244 ,  H01J37/145 ,  H01J37/268 ,  H01J37/28 ,  H01J2237/04 ,  H01J2237/04756 ,  H01J2237/2449

Abstract: A scanning microscope is provided for producing a scan image at high spatial resolution and in a low acceleration voltage area. An acceleration tube is located in an electron beam path of an objective lens for applying a post-acceleration voltage of the primary electron beam. The application of an overlapping voltage onto a sample allows a retarding electric field against the primary electron beam to be formed between the acceleration tube and the sample. The secondary electrons generated from the sample and the secondary signals such as reflected electrons are extracted into the acceleration tube through the effect of an electric field (retarding electric field) immediately before the sample. The signals are detected by secondary signal detectors located upwardly than the acceleration tube.

公开(公告)号：US5767516A

公开(公告)日：1998-06-16

申请号：US651868

申请日：1996-05-21

Applicant: Yoshimi Kawanami ,  Shigeyuki Hosoki

Inventor： Yoshimi Kawanami ,  Shigeyuki Hosoki

IPC: G01B15/00 ,  G01N37/00 ,  H01J37/26 ,  H01J37/285 ,  H01L21/66

CPC classification number: H01J37/285 ,  H01J2237/2817

Abstract: A method of observing an electric defect inside a solid sample directly by observing the situation in which conduction electrons are scattered inside the solid sample and means for realizing the method are described. A thin film electrode 2 is arranged opposite to the surface of the solid sample 1 with a minute gap, potential difference is applied between the solid sample 1 and the thin film electrode 2 by a gap voltage supply 7, conduction electrons inside he solid sample 1 are extracted outside the sample 1 by tunnel effect, and an electronic image by these extracted electrons is formed and displayed using an electronic optical system 5. By observing said electronic image, the situation of scattering of conduction electrons inside the solid sample 1 can be known and further, the information of an electric defect inside the solid sample 1 can be obtained.

Abstract translation: 描述了通过观察固体样品内传导电子散射的情况和实现该方法的手段直接观察固体样品内的电缺陷的方法。 薄膜电极2以微小间隙与固体样品1的表面相对地布置，通过间隙电压源7在固体样品1和薄膜电极2之间施加电位差，固体样品1内的传导电子 通过隧道效应在样品1外部提取，并且使用电子光学系统5形成并显示通过这些提取的电子的电子图像。通过观察所述电子图像，可以知道固体样品1内的传导电子散射的情况 此外，可以获得固体样品1内的电缺陷的信息。

公开(公告)号：US5444242A

公开(公告)日：1995-08-22

申请号：US201912

申请日：1994-02-25

Applicant: Paul E. Larson ,  Paul W. Palmberg

Inventor： Paul E. Larson ,  Paul W. Palmberg

IPC: G01N23/225 ,  G01N23/227 ,  G01Q30/02 ,  G01Q30/06 ,  G21K1/06 ,  H01J37/06 ,  H01J37/256 ,  H01J37/285 ,  H01J49/44 ,  H01J49/48

CPC classification number: G01N23/2273 ,  G01N23/227 ,  H01J37/256 ,  H01J37/285 ,  H01J49/48 ,  H01J2237/2522

Abstract: An instrument for surface analysis includes rastering an electron beam across an anode to generate x-rays. A concave Bragg monochromator focuses an energy peak of the x-rays to a specimen surface, the x-rays rastering the surface to emit photoelectrons. An analyzer provides information on the photoelectrons and thereby chemical species in the surface. A second detector of low energy photoelectrons is cooperative with the rastering to produce a scanning photoelectron image of the surface for imaging of the specimen. Alternatively a lens formed of two concave grids transits the photoelectrons to the analyzer with selectively modified energy so that the analyzer detects either higher energy electrons characteristic of chemical species or lower electrons for the image. The monochromator is formed of platelets cut from an array of platelets in a single crystal member. For imaging of insulating specimens, the surface is flooded periodically with electrons, and the signals are omitted from the image during the flooding. For chemometric information summed over the surface of insulators, data from the edges is omitted from the summing.

Abstract translation: 用于表面分析的仪器包括在阳极上扫描电子束以产生x射线。 凹入的布拉格单色仪将x射线的能量峰值聚焦到样品表面，X射线掠过表面以发射光电子。 分析仪提供关于光电子的信息，从而提供表面上的化学物质的信息。 低能量光电子的第二检测器与扫描相配合以产生用于成像试样的表面的扫描光电子图像。 或者，由两个凹形栅格形成的透镜可以选择性地改变能量将光电子转移到分析器，使得分析仪检测化学物质的特征的较高能量电子或图像的较低电子。 单色仪由在单晶构件中的血小板阵列切割的血小板形成。 对于绝缘试样的成像，表面用电子周期性地淹没，并且在淹没期间从图像中省略信号。 对于绝缘子表面的化学计量信息，从求和中省略边缘数据。

公开(公告)号：US5315113A

公开(公告)日：1994-05-24

申请号：US953429

申请日：1992-09-29

Applicant: Paul E. Larson ,  Paul W. Palmberg

Inventor： Paul E. Larson ,  Paul W. Palmberg

IPC: G01N23/227 ,  G01Q30/02 ,  G01Q30/06 ,  G21K1/06 ,  H01J37/06 ,  H01J37/256 ,  H01J37/285 ,  H01J49/44 ,  H01J49/48

CPC classification number: H01J49/48 ,  G01N23/227 ,  G01N23/2273 ,  H01J37/256 ,  H01J37/285 ,  H01J2237/2522

Abstract: An instrument for surface analysis includes a gun for selectively focusing an electron beam on an anode spot, or rastering the beam across an array of such spots, to generate x-rays. A concave monochromator focuses an energy peak of the x-rays to a specimen surface, in a spot on a selected pixel area or across an array of pixel areas on the surface to emit photoelectrons. An analyzer with a detector provides information on the photoelectrons and thereby chemical species in the surface. A second detector of low energy photoelectrons is cooperative with the rastering to produce a scanning photoelectron image of the surface, for viewing of a specimen to be positioned, or for imaging an insulator surface. The monochromator is formed of platelets produced by cutting an array of platelets from a single crystal member, and bonding the platelets to a concave face of a base plate juxtaposed in crystalline alignment in a positioned array identical to that of the initial array.

Abstract translation: 用于表面分析的仪器包括用于选择性地将电子束聚焦在阳极点上的枪，或者跨过这样的点的阵列来扫描光束，以产生x射线。 凹形单色仪将X射线的能量峰值聚焦到样品表面，在选定的像素区域上的一个点或者表面上的像素区域阵列上以发射光电子。 具有检测器的分析仪提供关于光电子的信息，从而提供表面上的化学物质的信息。 低能量光电子的第二检测器与扫描相协调以产生表面的扫描光电子图像，用于观察待定位的样品或用于对绝缘体表面进行成像。 单色仪由通过从单晶构件切割血小板阵列而产生的血小板形成，并且将血小板粘合到以与初始阵列相同的定位阵列中以结晶对准并列的基板的凹面。

公开(公告)号：US5151594A

公开(公告)日：1992-09-29

申请号：US780655

申请日：1991-10-18

Applicant: Gary M. McClelland

Inventor： Gary M. McClelland

IPC: G01Q30/02 ,  G01Q30/04 ,  H01J37/285

CPC classification number: H01J37/285 ,  H01J2237/2852 ,  Y10S977/881 ,  Y10S977/949 ,  Y10S977/954

Abstract: A time-dependent record depicting the motion of one or more selected atoms with a time resolution equal to or shorter than 10.sup.-12 second is generated by applying an electric field to a field emission tip. Electrons emitted from the selected atoms are focused into a beam which is swept over a spatially resolved electron detector for sensing the intensity of the beam as a function of time for creating the record. One- or two-dimensional records can be generated without signal averaging. The electrons can be directed onto a spot on a surface where dynamics are to be probed, and the electrons scattered or emitted from said surface are then focused into the electron beam. This method can also be used for transmitting information to a remote location at high frequency.

公开(公告)号：US5045696A

公开(公告)日：1991-09-03

申请号：US494443

申请日：1990-03-16

Applicant: Hideo Hirose

Inventor： Hideo Hirose

IPC: G01Q30/02 ,  G01Q30/18 ,  G01Q30/20 ,  G21K7/00 ,  H01J31/50 ,  H01J37/285

CPC classification number: H01J37/285 ,  G21K7/00 ,  H01J31/50 ,  H01J2231/50036 ,  H01J2231/50089 ,  H01J2231/5016 ,  H01J2231/5056

Abstract: A photoelectron microscope wherein a normal conductive coil is used to produce a divergent magnetic field to form an enlarged photoelectron image of a specimen to be examined. The coil is only momentarily energized by pulse current, and in synchronism with the energization of the coil and while the change of the resultant magnetic field with time is small, the radiation source is actuated to produce a radiation pulse so that the photoelectrons produced upon irradiation of a specimen with the pulse flies through the magnetic field so as to be received by an image forming device. The image forming device is operated in synchronism with and a predetermined variable period of time after the actuation of the radiation source thereby to obtain photoelectron images of the specimen of different energy levels. By skimming only those photoelectrons of low energy which are emitted close to the axis of the magnetic field, it is possible to obtain images of high resolution.