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公开(公告)号：US20060138960A1
公开(公告)日：2006-06-29
申请号：US10536918
申请日：2003-11-28
Applicant: Guenther Derra , Joseph Pankert , Willi Neff , Klaus Bergmann , Jeroen Jonkers
Inventor： Guenther Derra , Joseph Pankert , Willi Neff , Klaus Bergmann , Jeroen Jonkers
Abstract: The invention relates to a gas discharge lamp for EUV radiation with an anode (1) and a hollow cathode (2), wherein the hollow cathode (2) has at least two openings (3, 3′) and the anode (1) has a through hole (4), which is characterized in that the longitudinal axes (5, 5′) of the hollow cathode openings (3) have a common point of intersection S lying on the axis of symmetry (6) of the anode opening (4).
Abstract translation: 本发明涉及一种用于具有阳极（1）和中空阴极（2）的EUV辐射的气体放电灯，其中中空阴极（2）具有至少两个开口（3,3'），阳极（1）具有 一个通孔（4），其特征在于，中空阴极开口（3）的纵向轴线（5,5'）具有位于阳极开口（6）的对称轴线（6）上的公共交点S 4）。
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公开(公告)号：US07025646B2
公开(公告)日：2006-04-11
申请号：US11150350
申请日：2005-06-13
Applicant: Joseph E. Geusic
Inventor： Joseph E. Geusic
CPC classification number: H05G2/003 , B82Y10/00 , G03F7/70016 , G03F7/70033 , H01J9/18 , H01J61/09 , H01J61/30
Abstract: A microcavity discharge device generates radiation with wavelengths in the range of from 11 to 14 nanometers. The device has a semiconductor plug, a dielectric layer, and an anode layer. A microcavity extends completely through the anode and dielectric layers and partially into the semiconductor plug. According to one aspect of the invention, a substrate layer has an aperture aligned with the microcavity. The microcavity is filled with a discharge gas under pressure which is excited by a combination of constant DC current and a pulsed current to produce radiation of the desired wavelength. The radiation is emitted through the base of the microcavity. A second embodiment has a metal layer which transmits radiation with wavelengths in the range of from 11 to 12 nanometers, and which excludes longer wavelengths from the emitted beam.
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53.发明授权Discharge lamps using hollow cathodes with integrated getters and methods for manufacturing same 失效放电灯采用中空阴极集成吸气剂及其制造方法公开(公告)号：US06916223B2
公开(公告)日：2005-07-12
申请号：US10292214
申请日：2002-11-12
Applicant: Alessandro Gallitognotta , Claudio Boffito , Alessio Corazza
Inventor： Alessandro Gallitognotta , Claudio Boffito , Alessio Corazza
Abstract: A hollow cathode having at least a portion of the inner, outer or both surfaces coated with a layer of a getter material is described. Some methods for the production of the hollow cathode of the invention are also described, which include cathodic and electrophoretic deposition of the getter layer onto the hollow cathode.
Abstract translation: 描述了具有涂覆有吸气剂材料层的内部，外部或两个表面的至少一部分的空心阴极。 还描述了用于制造本发明的中空阴极的一些方法，其包括将吸气剂层阴极和电泳沉积到中空阴极上。
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公开(公告)号：US20040160162A1
公开(公告)日：2004-08-19
申请号：US10782164
申请日：2004-02-19
Inventor： J. Gary Eden , Sung-Jin Park , Clark J. Wagner
IPC: H01J001/62 , H01J063/04
CPC classification number: H01J17/49 , H01J1/025 , H01J9/00 , H01J9/02 , H01J25/50 , H01J61/09 , H01J61/305 , H01J61/62 , H01J63/04 , H01J65/046
Abstract: A discharge device is described that contains an anode, a cathode, and an insulating layer disposed between the anode and the cathode. A cavity is extends entirely through at least one of the anode or cathode and penetrates the dielectric layer. At least one of the anode or cathode may include a screen or the dielectric layer may have a plurality of films with at least two different dielectric constants. The voltage differences between the anode and cathode in each of multiple devices electrically connected together may be limited.
Abstract translation: 描述了包括阳极，阴极和设置在阳极和阴极之间的绝缘层的放电装置。 空腔完全延伸通过阳极或阴极中的至少一个并且穿透电介质层。 阳极或阴极中的至少一个可以包括屏幕，或者介电层可以具有多个具有至少两个不同介电常数的膜。 电连接在一起的多个装置中的每一个中的阳极和阴极之间的电压差可能受到限制。
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公开(公告)号：US20040046503A1
公开(公告)日：2004-03-11
申请号：US10647462
申请日：2003-08-26
Inventor： Joseph E. Geusic
IPC: H01J017/20
CPC classification number: H05G2/003 , B82Y10/00 , G03F7/70016 , G03F7/70033 , H01J9/18 , H01J61/09 , H01J61/30
Abstract: A microcavity discharge device generates radiation with wavelengths in the range of from 11 to 14 nanometers. The device has a semiconductor plug, a dielectric layer, and an anode layer. A microcavity extends completely through the anode and dielectric layers and partially into the semiconductor plug. According to one aspect of the invention, a substrate layer has an aperture aligned with the microcavity. The microcavity is filled with a discharge gas under pressure which is excited by a combination of constant DC current and a pulsed current to produce radiation of the desired wavelength. The radiation is emitted through the base of the microcavity. A second embodiment has a metal layer which transmits radiation with wavelengths in the range of from 11 to 12 nanometers, and which excludes longer wavelengths from the emitted beam.
Abstract translation: 微腔放电装置产生波长在11至14纳米范围内的辐射。 该器件具有半导体插头，电介质层和阳极层。 微腔完全延伸穿过阳极和电介质层，并部分地延伸到半导体插头中。 根据本发明的一个方面，基底层具有与微腔对准的孔。 微腔内填充有压力下的放电气体，该放电气体通过恒定直流电流和脉冲电流的组合激发，以产生所需波长的辐射。 辐射通过微腔的底部发射。 第二实施例具有传输波长在11至12纳米范围内的辐射的金属层，并且其不包括来自发射光束的较长波长。
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Patent Agency Ranking
公开(公告)号：US06657370B1
公开(公告)日：2003-12-02
申请号：US09641521
申请日：2000-08-21
Applicant: Joseph E. Geusic
Inventor： Joseph E. Geusic
IPC: H01J116
CPC classification number: H05G2/003 , B82Y10/00 , G03F7/70016 , G03F7/70033 , H01J9/18 , H01J61/09 , H01J61/30
Abstract: A microcavity discharge device generates radiation with wavelengths in the range of from 11 to 14 nanometers. The device has a semiconductor plug, a dielectric layer, and an anode layer. A microcavity extends completely through the anode and dielectric layers and partially into the semiconductor plug. According to one aspect of the invention, a substrate layer has an aperture aligned with the microcavity. The microcavity is filled with a discharge gas under pressure which is excited by a combination of constant DC current and a pulsed current to produce radiation of the desired wavelength. The radiation is emitted through the base of the microcavity. A second embodiment has a metal layer which transmits radiation with wavelengths in the range of from 11 to 12 nanometers, and which excludes longer wavelengths from the emitted beam.
Abstract translation: 微腔放电装置产生波长在11至14纳米范围内的辐射。 该器件具有半导体插头，电介质层和阳极层。 微腔完全延伸穿过阳极和电介质层，并部分地延伸到半导体插头中。 根据本发明的一个方面，基底层具有与微腔对准的孔。 微腔内填充有压力下的放电气体，该放电气体通过恒定直流电流和脉冲电流的组合激发，以产生所需波长的辐射。 辐射通过微腔的底部发射。 第二实施例具有传输波长在11至12纳米范围内的辐射的金属层，并且其不包括来自发射光束的较长波长。
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公开(公告)号：US20030132693A1
公开(公告)日：2003-07-17
申请号：US10047469
申请日：2002-01-15
Inventor： J. Gary Eden , Sung-Jin Park , Jack Chen , Chang Liu
IPC: H01J017/04
Abstract: A microdischarge device has a semiconductor layer, an intermediate layer, and a conductive layer. A tapered cavity is disposed in at least the semiconductor layer.
Abstract translation: 微放电器件具有半导体层，中间层和导电层。 至少半导体层设置锥形空腔。
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公开(公告)号：US20030080688A1
公开(公告)日：2003-05-01
申请号：US10040300
申请日：2001-10-26
Inventor： J. Gary Eden , Sung-Jin Park , Clark J. Wagner
IPC: G09G003/10
CPC classification number: H01J17/49 , H01J1/025 , H01J9/00 , H01J9/02 , H01J25/50 , H01J61/09 , H01J61/305 , H01J61/62 , H01J63/04 , H01J65/046
Abstract: A discharge device is described that contains an anode, a cathode, and an insulating layer disposed between the anode and the cathode. A cavity is extends entirely through at least one of the anode or cathode and penetrates the dielectric layer. At least one of the anode or cathode may include a screen or the dielectric layer may have a plurality of films with at least two different dielectric constants. The voltage differences between the anode and cathode in each of multiple devices electrically connected together may be limited.
Abstract translation: 描述了包括阳极，阴极和设置在阳极和阴极之间的绝缘层的放电装置。 空腔完全延伸通过阳极或阴极中的至少一个并且穿透电介质层。 阳极或阴极中的至少一个可以包括屏幕，或者介电层可以具有多个具有至少两个不同介电常数的膜。 电连接在一起的多个装置中的每一个中的阳极和阴极之间的电压差可能受到限制。
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公开(公告)号：US06518692B2
公开(公告)日：2003-02-11
申请号：US09999109
申请日：2001-10-31
Applicant: Karl H. Schoenbach , Wojciech W. Byszewski , Frank E. Peterkin , Amin N. Dharami
Inventor： Karl H. Schoenbach , Wojciech W. Byszewski , Frank E. Peterkin , Amin N. Dharami
IPC: H01J6106
CPC classification number: H01J3/025 , H01J1/025 , H01J3/04 , H01J17/04 , H01J17/06 , H01J27/08 , H01J61/067 , H01J61/09 , H01J61/12 , H01J61/305 , H01J61/66 , H01J61/72 , H01J61/78 , H01S3/03 , H01S3/0382 , H01S3/0385 , H01S3/2383
Abstract: A discharge device for operation in a gas at a prescribed pressure includes a cathode having a plurality of micro hollows therein, and an anode spaced from the cathode. Each of the micro hollows has dimensions selected to produce a micro hollow discharge at the prescribed pressure. Preferably, each of the micro hollows has a cross-sectional dimension that is on the order of the mean free path of electrons in the gas. Electrical energy is coupled to the cathode and the anode at a voltage and current for producing micro hollow discharges in each of the micro hollows in the cathode. The discharge device may include a discharge chamber for maintaining the prescribed pressure. A dielectric layer may be disposed on the cathode when the spacing between the cathode and the anode is greater than about the mean free path of electrons in the gas. Applications of the discharge device include fluorescent lamps, excimer lamps, flat fluorescent light sources, miniature gas lasers, electron sources and ion sources.
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公开(公告)号：US06417607B1
公开(公告)日：2002-07-09
申请号：US09180339
申请日：1998-11-05
Applicant: Marcus Thielen
Inventor： Marcus Thielen
IPC: H01J1914
CPC classification number: H01J9/022 , H01J1/025 , H01J61/0672 , H01J61/0677 , H01J61/09
Abstract: Cold electrodes for gas discharges have an electrically conductive carrier material on which an emission coating is disposed. The photoelectric output work of the material of the emission coating is less than that of the carrier material or less than 5.6*10-19 joule/electron. The emission coating can, in particular, contain yttrium. The electrode preferably has the form of a hollow body and can be embedded in a glass body.
Abstract translation: 用于气体放电的冷电极具有导电载体材料，在其上设置发射涂层。 发射涂层材料的光电输出功率小于载体材料的光电输出功率或小于5.6 * 10-19焦耳/电子。 排放涂层尤其可以含有钇。 电极优选具有中空体的形式，并且可以嵌入玻璃体中。
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