公开(公告)号：US10520445B2

公开(公告)日：2019-12-31

申请号：US16075775

申请日：2016-03-31

Applicant: Foss Analytical A/S

Inventor： Thomas Nikolajsen ,  Allan Kjaergaard Jensen

IPC: G01J3/30 ,  G01N21/71 ,  G01J3/443 ,  G01N1/04 ,  G01N1/28 ,  G01N21/03

Abstract: A Laser Induced Breakdown Spectrocopy (LIBS) system for the analysis of a sample pellet of a consolidated granular material retained in a tubular container may include a laser source configured to emit a pulsed laser beam towards an exposed surface of the sample pellet; and a sample station configured to hold the cylindrical tubular container in one or more orientations to present an exposed surface of the sample pellet towards the pulsed laser beam. The sample station may induce linear movement of the sample pellet along an axis and to expose a portion of the outer side surface of the sample pellet previously constrained through contact with an inner surface of the cylindrical tubular container. The sample station may induce rotational motion of the outer side surface of the sample pellet around the movement axis to present the portion of the outer side surface as the exposed surface.

公开(公告)号：US20190339123A1

公开(公告)日：2019-11-07

申请号：US16100587

申请日：2018-08-10

Applicant: PerkinElmer Heath Sciences, Inc.

Inventor： Mahsa Farsad ,  David Aiken

IPC: G01J3/02 ,  G01J3/443 ,  G01J3/18 ,  G01N21/73

Abstract: Certain configurations are described herein of an optical spectrometer and instruments including an optical spectrometer. In some instances, the optical spectrometer is configured to spatially separate provided wavelengths of light to permit detection or imaging of each provided wavelength of light. Improved sensitivities and detection limits may be achieved using the optical spectrometers described herein.

公开(公告)号：US10444156B2

公开(公告)日：2019-10-15

申请号：US16072505

申请日：2017-01-25

Applicant: FORSCHUNGSZENTRUM JUELICH GMBH

Inventor： Oleksandr Marchuk ,  Christian Brandt ,  Albrecht Pospieszczyk

IPC: G01N21/73 ,  G01J3/443 ,  G01N21/71 ,  H01J37/32 ,  G01N21/66

Abstract: A method for in situ determination of surface characteristics of conductive targets includes generating a low-pressure plasma in front of a surface of a target, applying a voltage to the surface of the target, orientating at least one light-sensitive detector at an angle θ relative to a perpendicular to the surface of the target, and measuring an intensity of light emitted by electrically neutral atoms generated by conversion from ions which are accelerated out of the low-pressure plasma by the applied voltage toward the surface of the target and subsequently reflected thereon, and which thus exchange suitable charges with the surface to reach electrical neutrality. The method additionally includes determining a value curve comprising wavelengths and an intensity associated with each wavelength, of the light which, as a result of Doppler shifts, has a red-shifted wavelength range and a blue-shifted range.

公开(公告)号：US20190310201A1

公开(公告)日：2019-10-10

申请号：US16421888

申请日：2019-05-24

Applicant: THERMO SCIENTIFIC PORTABLE ANALYTICAL INSTRUMENTS INC.

Inventor： Peidong WANG ,  Rong SUN ,  Brendan FALVEY ,  Haowen LI ,  Yu SHEN ,  Michael E. DUGAS

IPC: G01N21/71 ,  G01J3/02 ,  G01J3/10 ,  G01J3/443

Abstract: An embodiment of a laser induced breakdown system is described that comprises a portable device that includes: a laser configured to produce a beam comprising a plurality of repeating pulses; a processor configured to open a data acquisition window after a delay period, wherein the delay period begins upon production of one of the pulses; one or more optical elements configured to direct the beam at a sample and collect emitted light from a plasma continuum; and an optical detector configured to produce a plurality of signal values from the emitted light from the plasma continuum collected during the data acquisition window, wherein the processor is configured to identify an element from the signal values.

公开(公告)号：US10408680B2

公开(公告)日：2019-09-10

申请号：US15008856

申请日：2016-01-28

Applicant: Industry-Academic Cooperation Foundation, Yonsei University

Inventor： Ilgu Yun ,  Sang Myung Lee

IPC: C23C16/50 ,  G01J3/443 ,  G01J3/02 ,  H01J37/32

Abstract: Provided is an apparatus for optical emission spectroscopy. The apparatus for the optical emission spectroscopy includes a light collection unit configured to collect light within a plasma process chamber in which plasma is generated to process a substrate, a light transmission unit configured to transmit the collected light, and an analysis unit configured to analyze the light provided through the light transmission unit, thereby analyzing a plasma state. The light collection unit includes a light collection part configured to concentrate the light generated in the plasma process chamber and provide the concentrated light to the light transmission unit.

公开(公告)号：US20190265104A1

公开(公告)日：2019-08-29

申请号：US16284292

申请日：2019-02-25

Applicant: TDW Delaware, Inc.

Inventor： Kenneth James Greene ,  Chris Caraway ,  Gregory Donikowski ,  Joel Troyer

IPC: G01J3/443 ,  G01N3/42 ,  G01N33/20 ,  G01M3/02 ,  G01M3/38 ,  G01J3/02 ,  G01M3/04

Abstract: A system and method for non-destructive, in situ, positive material identification of a pipe selects a plurality of test areas that are separated axially and circumferentially from one another and then polishes a portion of each test area. Within each polished area, a non-destructive test device is used to collect mechanical property data and another non-destructive test device is used to collect chemical property data. An overall mean for the mechanical property data, and for the chemical property data, is calculated using at least two data collection runs. The means are compared to a known material standard to determine, at a high level of confidence, ultimate yield strength and ultimate tensile strength within +/−10%, a carbon percentage within +/−25%, and a manganese percentage within +/−20% of a known material standard.

公开(公告)号：US10324040B2

公开(公告)日：2019-06-18

申请号：US15110476

申请日：2014-01-08

Applicant: UNIVERSIDAD PUBLICA DE NAVARRA

Inventor： Jose Antonio Aguilera Andoaga ,  Carlos Aragon Garbizu

IPC: G01N21/71 ,  G01J3/443

Abstract: The quantitative analysis method for analyzing the composition of materials of the invention is based on a functional relationship (curve Cσ) between line intensity and the concentration of the element in the material. The method comprises: obtaining characteristic parameters, selecting the spectral lines of neutral atoms and ions of the elements of interest, obtaining their atomic data; calculating, for the selected lines, a line crosssection; measuring line intensities; determining the concentrations of the elements of interest by means of fitting two graphs Cσ, one for neutral atoms and another for ions with a unit charge, the fitting being performed by means of an iterative algorithm which compares the experimental graphs with the curves Cσ calculated with a plasma model; calculating, for the data of the graphs Cσ, the product of line optical depth by Lorentzian width; evaluating, for the data of the graphs Cσ, a condition on the validity limit of the model, the datum for which the mentioned product is greater being eliminated if the condition is not complied with; repeating the three preceding steps until all data comply with the mentioned condition. The invention has the advantage of not requiring prior calibrations.

公开(公告)号：US10249485B2

公开(公告)日：2019-04-02

申请号：US15727198

申请日：2017-10-06

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Vladimir Volynets ,  Protopopov Vladimir ,  Young Do Kim ,  Yuri Barsukov ,  Sang Heon Lee ,  Sung Ho Jang

IPC: G01J3/30 ,  H01J49/40 ,  C23C16/455 ,  G01J3/443 ,  H01J37/32 ,  H01J49/00 ,  H01J49/10 ,  H01J49/12 ,  H01L21/02 ,  H01L29/786 ,  G01J3/28

Abstract: A pulsed plasma analyzer includes a pulse modulator that controls an off-time of a pulsed plasma that includes a target radical, an optical spectrometer that measures optical emissions of the pulsed plasma after the off-time to determine optical emission data, and a concentration estimating module that estimates a concentration of the target radical during the off-time based on an initial optical emission value of the optical emission data that changes as a function of the off-time, and outputs an estimated concentration.

公开(公告)号：US20190078935A1

公开(公告)日：2019-03-14

申请号：US16189141

申请日：2018-11-13

Applicant: Hitachi High-Tech Analytical Science Limited

Inventor： Jukka Hassi

IPC: G01J3/443 ,  G01N21/71 ,  G01J3/02 ,  G01N21/65 ,  G01N21/359

Abstract: According to an example embodiment, a detector assembly for use in analysis of elemental composition of a sample by using optical emission spectroscopy is provided, the detector assembly comprising a rotatable element that is rotatable about an axis and that has attached thereto a laser source for generating laser pulses for invoking optical emission on a surface of the sample, which laser source is arranged to generate laser pulses focused at a predefined distance from said axis at a predefined distance from a front end of the detector assembly, and an optical receiver for capturing optical emission invoked by said laser pulses.

公开(公告)号：US20190051502A1

公开(公告)日：2019-02-14

申请号：US15892041

申请日：2018-02-08

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Ryoji ASAKURA ,  Shota UMEDA ,  Daisuke SHIRAISHI ,  Akira KAGOSHIMA ,  Satomi INOUE

IPC: H01J37/32 ,  H01L21/67 ,  G01J3/443

Abstract: The plasma processing apparatus includes a plasma processing unit that performs plasma processing of a sample and a control unit that controls the plasma processing. The control unit selects one of a plurality of the prediction models for predicting a result of the plasma processing based on a state of the plasma processing unit, and predicts the result of the plasma processing by using a selected prediction model.