公开(公告)号：US20220381713A1

公开(公告)日：2022-12-01

申请号：US17770495

申请日：2020-11-09

Applicant: VG System Limited ,  FEI Company

Inventor： Bryan Barnard ,  Pavel Stejskal

IPC: G01N23/2273

Abstract: A method and apparatus for detection of charged particles in spectroscopy. Charged particles, received from an energy dispersive spectroscopic analyser as a charged particle beam, are accelerated towards a detector. The accelerated charged particles are received at an array of detecting pixels, the array of detecting pixels forming the detector. The charged particles arriving at the detector have a spread in the energy dispersive direction.

公开(公告)号：US20220328284A1

公开(公告)日：2022-10-13

申请号：US17694549

申请日：2022-03-14

Applicant: FEI Company

Inventor： Jan Stopka ,  Bohuslav Sed'a

IPC: H01J37/28 ,  H01J37/153 ,  H01J37/10

Abstract: An example multi-beam scanning electron microscope (MB-SEM) for correcting both astigmatism and linear distortion at least includes an electron source coupled to provide an electron beam, an aperture plate comprising an array of apertures, the aperture plate arranged to form an array of electron beamlets from the electron beam, and an electron column including a plurality of lenses and first and second stigmators, the electron column coupled to direct the array of electron beamlets toward a sample, wherein the first and second stigmators are arranged and excited to correct both astigmatism and linear distortion.

公开(公告)号：US20220319801A1

公开(公告)日：2022-10-06

申请号：US17709391

申请日：2022-03-30

Applicant: FEI Company

Inventor： Frantisek VASKE ,  Jakub KUBA

IPC: H01J37/20 ,  H01J37/28

Abstract: The disclosure relates to a method of preparing a sample in a charged particle microscope. The method comprises the steps of providing a sample carrier having a mechanical support contour and a grid member connected thereto. The method comprises the step of connecting said sample carrier to a mechanical stage device of the charged particle microscope. Additionally, the method comprises the step of providing a sample, for example a chunk-shaped or lamella-shaped sample and connecting said sample to the grid member of the sample carrier. The method allows, in an embodiment, easy and reliable transfer of a sample between a bulk sample and a sample carrier.

公开(公告)号：US20220317066A1

公开(公告)日：2022-10-06

申请号：US17217103

申请日：2021-03-30

Applicant: FEI Company

Inventor： Bart BUIJSSE ,  Jaydeep Sanjay BELAPURE ,  Alexander HENSTRA ,  Michael Patrick JANUS ,  Stefano VESPUCCI

IPC: G01N23/2055 ,  G01N23/20025 ,  G01N23/20058 ,  H01J37/147 ,  H01J37/22 ,  H01J37/28

Abstract: Crystallographic information of crystalline sample can be determined from one or more three-dimensional diffraction pattern datasets generated based on diffraction patterns collected from multiple crystals. The crystals for diffraction pattern acquisition may be selected based on a sample image. At a location of each selected crystal, multiple diffraction patterns of the crystal are acquired at different angles of incidence by tilting the electron beam, wherein the sample is not rotated while the electron beam is directed at the selected crystal.

公开(公告)号：US20220316784A1

公开(公告)日：2022-10-06

申请号：US17709398

申请日：2022-03-30

Applicant: FEI Company

Inventor： Maarten KUIJPER ,  Hervé REMIGY ,  Mathijs Petrus Wilhelmus VAN DEN BOOGAARD ,  Adrian KOH ,  Ivanka SPEE ,  John HAZENBERG ,  Marius VAN DER DOES

IPC: F25D3/10 ,  F25D29/00

Abstract: The invention relates to a method and an apparatus for preparing a cryogenic sample, whereby the sample is subjected to rapid cooling using a cryogen. A pair of conduits for transporting cryogenic fluid are provided, each of which conduits opens out into a mouthpiece, which mouthpieces are arranged to face each other across an intervening gap, wherein in said gap a sample that is provided on a substantially planar sample carrier can be received. Cryogenic fluid can be pumped through said conduits so as to concurrently flush from said mouthpieces and suddenly immerse the sample in cryogenic fluid from two opposite sides. As defined herein, at least one of said mouthpieces comprises at least two nozzle openings for evenly cooling said substantially planar sample carrier during said flushing.

公开(公告)号：US20220310354A1

公开(公告)日：2022-09-29

申请号：US17210223

申请日：2021-03-23

Applicant: FEI Company

Inventor： Ondrej L. Shánel ,  Trond Karsten Varslot ,  Ondrej R. Baco ,  Martin Schneider

IPC: H01J37/20 ,  H01J37/22

Abstract: Methods include holding a sample with a movement stage configured to rotate the sample about a rotation axis, directing an imaging beam to a first sample location with the sample at a first rotational position about the rotation axis and detecting a first transmitted imaging beam image, rotating the sample using the movement stage about the rotation axis to a second rotational position, and directing the imaging beam to a second sample location by deflecting the imaging beam in relation to an optical axis of the imaging beam and detecting a second transmitted imaging beam image, wherein the second sample location is spaced apart from the first sample location at least at least in relation to the optical axis. Related systems and apparatus are also disclosed.

公开(公告)号：US20220305584A1

公开(公告)日：2022-09-29

申请号：US17211657

申请日：2021-03-24

Applicant: FEI Company

Inventor： Tomas Gancarcik ,  Ivan Dekan ,  David Krobot ,  Tomas Trnkocy ,  Steven J. Randolph ,  Remco Geurts

IPC: B23K26/12 ,  B23K26/36 ,  B23K26/346 ,  B23K17/00

Abstract: Deposition of debris produced in laser ablation of a workpiece situated in a vacuum chamber is reduced by introduction a background gas into the vacuum chamber prior to or during laser ablation. The background gas can be introduced diffusely into the vacuum chamber and can reduce contamination of surfaces such as a surface of an optical window that faces the workpiece during processing. Directed introduction of a background gas can be used as well and in some cases the same or a different background gas is directed to a workpiece surface at the same or different pressure than that associated with diffuse introduction of the background gas to reduce contamination of the workpiece surface with laser ablation debris.

公开(公告)号：US20220283197A1

公开(公告)日：2022-09-08

申请号：US17193593

申请日：2021-03-05

Applicant: FEI Company

Inventor： Remco SCHOENMAKERS ,  Engelbertus van WILLIGEN ,  Reinier PERQUIN ,  Pepijn KRAMER ,  Egbert ALGRA ,  James MCCORMACK ,  Trond K. VARSLOT ,  Faruk CAGLAR

IPC: G01N35/00 ,  B01L3/00

Abstract: Systems and methods for using smart sample containers to manage complex sample evaluation workflows, are disclosed. An example method for using a smart sample container configured to manage a sample evaluation workflow according to the present invention comprises, obtaining a sample evaluation workflow for the one or more samples, receiving interactions with external devices, and based on the sample evaluation workflow, and causing the external devices to perform actions to advance the sample evaluation workflow. The smart sample container may further modify the sample evaluation workflow based on results of actions performed by the sample evaluation workflow and/or store information relating to the results of such actions. In this way, the smart sample containers are able to dynamically drive the evaluation of a sample through its sample evaluation workflow.

公开(公告)号：US11437216B2

公开(公告)日：2022-09-06

申请号：US17139859

申请日：2020-12-31

Applicant: FEI Company

Inventor： Alexander Henstra ,  Pleun Dona

IPC: H01J37/153 ,  H01J37/28

Abstract: Systems for reducing the generation of thermal magnetic field noise in optical elements of microscope systems, are disclosed. Example microscopy optical elements having reduced Johnson noise generation according to the present disclosure comprises an inner core composed of an electrically isolating material, and an outer coating composed of an electrically conductive material. The product of the thickness of the outer coating and the electrical conductivity is less than 0.01Ω−1. The outer coating causes a reduction in Johnson noise generated by the optical element of greater than 2×, 3×, or an order of magnitude or greater. In a specific example embodiment, the optical element is a corrector system having reduced Johnson noise generation. Such a corrector system comprises an outer magnetic multipole, and an inner electrostatic multipole. The inner electrostatic multipole comprises an inner core composed of an electrically isolating material and an outer coating composed of an electrically conductive material.

公开(公告)号：US11430632B2

公开(公告)日：2022-08-30

申请号：US17116210

申请日：2020-12-09

Applicant: FEI Company

Inventor： Andrew Barnum ,  Mark J. Williamson

IPC: H01J37/28 ,  H01J37/31 ,  H01J37/30 ,  G06T7/11 ,  G06V10/25 ,  H01J37/317

Abstract: Reciprocal space map of specific sample locations is generated based on the sample images acquired by irradiating the sample with a charged particle beam at multiple incident angles. The incident angles are obtained by tilting the charged particle beam and/or the sample around two perpendicular axes within the sample plane. The reciprocal space map of a selected sample location is generated based on intensity of pixels corresponding to the location in the sample images.