公开(公告)号：US06906787B2

公开(公告)日：2005-06-14

申请号：US10716938

申请日：2003-11-20

Applicant: Marcus Adrianus Van De Kerhof ,  Wilhelmus Petrus De Boeij ,  Marcel Maurice Hemerik

Inventor： Marcus Adrianus Van De Kerhof ,  Wilhelmus Petrus De Boeij ,  Marcel Maurice Hemerik

IPC: G21K5/00 ,  G01J1/42 ,  G01J1/58 ,  G01T1/20 ,  G02B5/26 ,  G03F7/20 ,  G21K5/02 ,  H01L21/027 ,  G03B27/54 ,  G03B27/72

CPC classification number: G03F7/70558 ,  G01J1/429 ,  G01J1/58 ,  G03F7/7085

Abstract: A lithographic projection apparatus includes a radiation system for providing a projection beam of primary radiation, a support structure for supporting patterning structure, the patterning structure serving to pattern the projection beam according to a desired pattern, a substrate table for holding a substrate, a projection system for projecting the patterned beam onto a target portion of the substrate, a radiation sensor which is moveable in a path traversed by the projection beam, for receiving primary radiation out of the projection beam, the sensor including a radiation-sensitive material which converts incident primary radiation into secondary radiation, a radiation detector capable of detecting said secondary radiation emerging from said material, and a filter material for preventing secondary radiation from traveling in a direction away from the radiation detector.

Abstract translation: 光刻投影装置包括用于提供初级辐射的投影光束的辐射系统，用于支撑图案形成结构的支撑结构，用于根据期望图案对投影光束进行图案化的图案形成结构，用于保持基板的基板台， 系统，用于将图案化的光束投影到基板的目标部分上，辐射传感器，其可在由投影光束穿过的路径中移动，用于将一次辐射从投影光束接收，该传感器包括转换入射的辐射敏感材料 初级辐射进入次级辐射，能够检测从所述材料出射的所述次级辐射的辐射检测器和用于防止二次辐射沿远离辐射检测器的方向行进的过滤材料。

公开(公告)号：US20050111007A1

公开(公告)日：2005-05-26

申请号：US10948959

申请日：2004-09-24

Applicant: Henry Hill ,  Steven Hamann ,  David Fischer

Inventor： Henry Hill ,  Steven Hamann ,  David Fischer

IPC: G01B9/02 ,  G01J1/58 ,  G02B20060101 ,  G02B17/08 ,  G02B26/06

CPC classification number: G02B17/086 ,  G01B9/02007 ,  G01B9/02014 ,  G01B9/02022 ,  G01B9/02056 ,  G01B9/02068 ,  G01B9/02079 ,  G01B2290/70 ,  G01J1/58 ,  G01N21/8806 ,  G01N21/9501 ,  G02B17/0808 ,  G02B26/06 ,  G03F1/84 ,  G03F7/7085 ,  G03F9/7088

Abstract: An interferometric system including: an interferometer that directs a measurement beam at an object point to produce a return measurement beam, focuses the return measurement beam to an image point in an image plane, and mixes the return measurement beam with a reference beam at the image point to form a mixed beam; a beam combining layer located at the image plane which is responsive to the mixed beam and produces an optical beam therefrom, wherein the layer comprises a thin film with an array of transmissive openings formed therein and further comprises a fluorescent material associated with each of the openings of the array of openings; a detector that is responsive to the optical beam from the beam combining layer; and an imaging system that directs the optical beam from the beam combining layer onto the detector.

Abstract translation: 一种干涉测量系统，包括：干涉仪，其将物体点处的测量光束引导以产生返回测量光束，将返回测量光束聚焦到图像平面中的图像点，并将返回测量光束与图像上的参考光束混合 指向形成混合梁; 位于图像平面处的光束组合层，其响应于混合光束并从其产生光束，其中该层包括其中形成有透射开口阵列的薄膜，并且还包括与每个开口相关联的荧光材料 的开口阵列; 响应于来自光束组合层的光束的检测器; 以及将来自光束组合层的光束引导到检测器上的成像系统。

公开(公告)号：US20040227950A1

公开(公告)日：2004-11-18

申请号：US10816172

申请日：2004-04-01

Applicant: Zetetic Institute

Inventor： Henry Allen Hill

IPC: G01B009/02

CPC classification number: G02B21/0056 ,  G01B9/02007 ,  G01B9/02019 ,  G01B9/02029 ,  G01B9/0203 ,  G01B9/02042 ,  G01B9/02069 ,  G01B9/02079 ,  G01J1/58 ,  G01N21/211 ,  G02B17/0808 ,  G03F7/70625

Abstract: An interferometry system for making interferometric measurements of an object, the system including a source assembly that generates an input beam; a detector assembly that includes a detector element; and an interferometer that includes a source imaging system that images the input beam onto a spot on or in the object and an object imaging system that images the spot onto the detector element as an interference beam, the object imaging system combining light coming from the spot with a reference beam to produce the interference beam, wherein the source imaging system is characterized by a first aperture stop that defines a first aperture and includes a first phase shifter that introduces a first phase shift in light passing through a first region of the first aperture relative to light passing through a second region of the first aperture, and wherein the object imaging system is characterized by a second aperture stop that defines a second aperture and includes a second phase shifter that introduces a second phase shift in light passing through a first region of the second aperture relative to light passing through a second region of the second aperture.

Abstract translation: 一种用于对物体进行干涉测量的干涉测量系统，所述系统包括产生输入光束的光源组件; 检测器组件，其包括检测器元件; 以及干涉仪，其包括将输入光束成像到物体上或物体上的点上的源成像系统和将斑点作为干涉光束成像到检测器元件上的物体成像系统，该物体成像系统将来自该点的光 具有参考光束以产生所述干涉光束，其中所述源成像系统的特征在于限定第一孔径的第一孔径光阑，并且包括第一移相器，所述第一移相器在通过所述第一孔径的第一区域的光中引入第一相移 相对于穿过所述第一孔的第二区域的光，并且其中所述物体成像系统的特征在于限定第二孔的第二孔径光阑，并且包括第二移相器，所述第二移相器在通过第一区域的光中引入第二相移 的第二孔相对于穿过第二孔的第二区域的光。

公开(公告)号：US06765220B2

公开(公告)日：2004-07-20

申请号：US09756660

申请日：2001-01-10

Applicant: Albert W. Kongable ,  Mark T. Myers

Inventor： Albert W. Kongable ,  Mark T. Myers

IPC: G01J100

CPC classification number: G01J5/522 ,  G01J1/58

Abstract: A compact infrared (IR) scene generator capable of generating multiple-color mid-IR scenes through the use of readily available commercial near-IR lasers and a fluorescent conversion material (FCM). Such a scene generator would be useful to test IR imaging sensors in a controlled laboratory environment. In operation, each laser emits energy at an initial wavelength outside the operating band of an IR imaging sensor. This energy of a first set of wavelengths is written onto the FCM in patterns, which collectively form an IR scene. The FCM absorbs the energy and radiates it at wavelengths longer than the initial wavelengths, i.e., a second set of wavelengths. As these longer wavelengths are within the operating waveband of the IR imaging sensor, the patterns written onto the FCM are detectable by it.

Abstract translation: 通过使用易于获得的商用近红外激光器和荧光转换材料（FCM），能够产生多色中红外场景的小型红外（IR）场景发生器。 这样的场景发生器将有助于在受控的实验室环境中测试IR成像传感器。 在操作中，每个激光器以IR成像传感器的工作频带外的初始波长发射能量。 将第一组波长的能量以共同形成IR场景的图案写入FCM。 FCM吸收能量并以比初始波长长的波长辐射它，即第二组波长。 由于这些较长的波长在IR成像传感器的工作波段内，写入FCM的图案可以被它检测到。

公开(公告)号：US06750438B2

公开(公告)日：2004-06-15

申请号：US10097702

申请日：2002-03-13

Applicant: Jeffrey D. Jordan

Inventor： Jeffrey D. Jordan

IPC: H01L3100

CPC classification number: B82Y15/00 ,  B82Y20/00 ,  G01J1/58 ,  H01L27/146 ,  H01L31/0264 ,  H01L31/0352 ,  H01L31/09 ,  Y10S977/954

Abstract: An optical detector system includes an electrically resistive screen that is substantially transparent to radiation energy having a wavelength of interest. An electron transfer element (e.g., a low work function photoactive material or a carbon nanotube (CNT)-based element) has a first end and a second end with its first end spaced apart from the screen by an evacuated gap. When radiation energy passes through the screen with a bias voltage being applied thereto, transfer of electrons through the electron transfer element is induced from its first to its second end such that a quantity indicative of the electrons transferred can be detected.

Abstract translation: 光学检测器系统包括对具有感兴趣波长的辐射能基本上透明的电阻屏蔽。 电子转移元件（例如，低功函光敏材料或基于碳纳米管（CNT）的元件）具有第一端和第二端，其第一端通过抽空的间隙与屏幕间隔开。 当辐射能量以施加偏压的方式通过屏幕时，电子从电子转移元件的转移从其第一端到第二端被引发，从而可以检测到指示电子转移的量。

公开(公告)号：US20030206573A1

公开(公告)日：2003-11-06

申请号：US10452551

申请日：2003-05-30

Inventor： John P. Gotthold ,  Anh N. Hoang ,  Surinder S. Sandhu ,  John Leonard Shaver ,  Terry M. Stapleton

IPC: G01J005/00

CPC classification number: G01J5/02 ,  G01J1/28 ,  G01J1/58 ,  G01J5/0003 ,  G01J5/0007 ,  G01J5/0205 ,  G01J5/025 ,  G01J5/046 ,  G01J5/08 ,  G01J5/0821 ,  G01J5/084 ,  G01J5/0887 ,  G01K1/14 ,  G01K11/3213

Abstract: A temperature sensor utilizing optical temperature measuring techniques is constructed to make firm contact with a surface whose temperature is being measured, an example application being the monitoring of semiconductor wafers or flat panel displays while being processed. A cap is mounted near but spaced apart from an end of a lightwave guide, with a resilient element that applies force of the cap against a surface whose temperature is being measured as the cap is urged toward the optical fiber end. An optical temperature sensing element, such as luminescent material or a surface of known emissivity, is carried within the cap. A bellows with a closed end conveniently serves as both the cap and the resilient element. An alternative temperature measuring device installs an optical temperature sensing material within a test substrate behind an optical window, and then views the sensing material through the window.

公开(公告)号：US20030030067A1

公开(公告)日：2003-02-13

申请号：US10166313

申请日：2002-06-06

Inventor： Wei Chen

IPC: H01L033/00 ,  H01L031/0256 ,  H01L031/0296 ,  H01L031/0336 ,  H01L031/0312 ,  H01L029/12 ,  H01L029/22

CPC classification number: H01S3/16 ,  C09K11/574 ,  C09K11/7701 ,  C09K11/7702 ,  C09K11/7703 ,  C09K11/886 ,  G01J1/58 ,  G01J5/28 ,  G01K11/20 ,  G02F2/02 ,  H01L33/50 ,  H01S3/094092 ,  H01S3/1628

Abstract: The present relates in general to upconversion luminescence (nullUCLnull) materials and methods of making and using same and more particularly, but not meant to be limiting, to Mn2null doped semiconductor nanoparticles for use as UCL materials. The present invention also relates in general to upconversion luminescence including two-photon absorption upconversion, and potential applications using UCL materials, including light emitting diodes, upconversion lasers, infrared detectors, chemical sensors, temperature sensors and biological labels, all of which incorporate a UCL material.

Abstract translation: 本发明一般涉及上转换发光（“UCL”）材料及其制造和使用方法，更具体地但并不意味着限于用作UCL材料的Mn 2+掺杂半导体纳米粒子。 本发明通常还涉及上转换发光，包括双光子吸收向上转换，以及使用UCL材料的潜在应用，包括发光二极管，上变频激光器，红外探测器，化学传感器，温度传感器和生物标签，所有这些都包含UCL 材料。

公开(公告)号：US06411451B1

公开(公告)日：2002-06-25

申请号：US07503555

申请日：1990-03-28

Applicant: Gerald Fliss ,  Robert E. Lee ,  George P. Mueller ,  Tim D. Andreadis ,  Paul Wyman

Inventor： Gerald Fliss ,  Robert E. Lee ,  George P. Mueller ,  Tim D. Andreadis ,  Paul Wyman

IPC: G01J120

CPC classification number: G01J1/04 ,  G01J1/0418 ,  G01J1/0433 ,  G01J1/0466 ,  G01J1/0488 ,  G01J1/42 ,  G01J1/58 ,  G01J2001/0285 ,  G02B5/20 ,  G02B23/125

Abstract: The present invention pretains to a device for protecting the human eye by means of a narrow bandwith interference filter which filters out one or more specific wavelengths of light emitted in the form of a coherent, concentrated beam that is laser radiation and in coherent light, an image intensifier for amplifying an image passing through the narrow bandwidth filter to an observable light level, and a neutral density filter which reduces image reflected illuminance to avoid detection.

Abstract translation: 本发明涉及一种用于通过窄带干涉滤光器来保护人眼的装置，其过滤出以相干的聚光束的形式发射的一种或多种特定波长的光，其是激光辐射和相干光， 图像增强器，用于将通过窄带宽滤波器的图像放大到可观察的光级;以及中性浓度滤波器，其降低图像反射照度以避免检测。

公开(公告)号：US06396062B1

公开(公告)日：2002-05-28

申请号：US09454693

申请日：1999-12-03

Applicant: Jesse D. Buck ,  Robert G. Ozarski

Inventor： Jesse D. Buck ,  Robert G. Ozarski

IPC: G01J142

CPC classification number: G03F7/70483 ,  G01J1/4257 ,  G01J1/58

Abstract: A portable laser beam monitor utilizes a plurality of optical trains to monitor ultraviolet laser beam profiles at a plurality of positions along a laser beam path. A preferred embodiment useful for monitoring beam profiles of lithography lasers measures the beam profile at the front aperture, the rear aperture, the shutter plane and at infinity (the divergence plane). The beam profiles are imaged on a fluorescent screen which is monitored by a visible light camera. Images of the profiles may be discharged on the screen of a lap top computer.

Abstract translation: 便携式激光束监视器利用多个光学列车来监视沿着激光束路径的多个位置处的紫外激光束轮廓。 用于监测光刻激光器的光束轮廓的优选实施例测量前孔，后孔，快门平面和无限远（发散平面）处的光束轮廓。 光束轮廓在由可见光相机监测的荧光屏上成像。 配置文件的图像可能会在笔记本电脑的屏幕上放电。

公开(公告)号：US06335529B1

公开(公告)日：2002-01-01

申请号：US09509362

申请日：2000-03-27

Applicant: Hiroshi Sekii ,  Akihisa Matsuyama

Inventor： Hiroshi Sekii ,  Akihisa Matsuyama

IPC: G01J142

CPC classification number: G01J1/58

Abstract: An ultraviolet detector has a wavelength conversion element 1 of a length in an incident direction of UV light 2 set longer than the direction orthogonal to the incident angle, and a light receiving element 3 arranged at a side plane 1a of wavelength conversion element 1. Unconverted ultraviolet does not exit wavelength conversion element 1, and is propagated downwards to be attenuated. Visible light having the wavelength converted in wavelength conversion element 1 is propagated in all directions and received at light receiving element 3. Light receiving element 3 detects the quantity of light according to the incident amount of ultraviolet. As a result, the detection sensitivity is ensured and degradation of the light receiving element caused by ultraviolet radiation does not occur.

Abstract translation: 紫外线检测器具有波长转换元件1，该波长转换元件1的紫外线2的入射方向的长度大于与入射角正交的方向的长度;以及光接收元件3，其布置在波长转换元件1的侧面1a处。未转换 紫外线不会离开波长转换元件1，并且向下传播以被衰减。 在波长转换元件1中具有波长转换的可见光在所有方向上传播并被接收在光接收元件3处。光接收元件3根据入射的紫外线量来检测光量。 结果，确保了检测灵敏度，并且不会发生由紫外线辐射引起的光接收元件的劣化。