Method and system for spectral imaging

    公开(公告)号:US09915565B2

    公开(公告)日:2018-03-13

    申请号:US14438641

    申请日:2013-10-24

    Inventor: Nir Katzir

    Abstract: A method of calibrating a spectral imaging system is disclosed. The spectral imaging system comprises an interferometer having a beam splitter and at least a first reflector and a second reflector. The method comprises: obtaining data pertaining to an interference pattern model, operating the spectral imaging system to provide an interference pattern of a received light beam, and varying a relative orientation between at least two of: the beam splitter, the first reflector and the second reflector, until the interference pattern of the input light beam substantially matches the interference pattern model.

    WAVEGUIDE-BASED INTEGRATED SPECTROMETER
    64.
    发明申请

    公开(公告)号:US20170138789A1

    公开(公告)日:2017-05-18

    申请号:US15352175

    申请日:2016-11-15

    Inventor: Evgueni Ivanov

    Abstract: Embodiments of the present disclosure provide systems and methods for providing integrated waveguide-based spectrometer systems. In one aspect, the system includes an optical spectrometer comprising one or more waveguides configured to support propagation of optical radiation (i.e. light) through the waveguides to a photodetector. The spectrometer further includes an input coupler for each waveguide, the input coupler configured to couple the radiation from free space into the waveguide in absence of fiber-optic coupling of the radiation into the waveguide. Because at least a portion of the light propagated through the waveguides has interacted with a sample to be spectroscopically evaluated, the light detected by the photodetector allows to carry out the spectroscopic evaluation of the sample. At least some components of the spectrometer are provided on a single die using conventional CMOS techniques, yielding a compact and low cost device.

    Method for manufacturing optical interferometer

    公开(公告)号:US09618323B2

    公开(公告)日:2017-04-11

    申请号:US14911583

    申请日:2014-07-31

    CPC classification number: G01B9/02051 G01J3/0256 G01J3/4532 G01J3/4535

    Abstract: A method of manufacturing an optical interferometer includes a first step of forming a first semiconductor portion for a beam splitter and a second semiconductor portion for a movable mirror on a main surface of a support substrate and a first insulating layer formed on the main surface, a second step of disposing a first wall portion between a first side surface of the first semiconductor portion and a second side surface in the second semiconductor portion, and a third step of forming a mirror surface in the second semiconductor portion by forming a first metal film on the second side surface using a shadow mask. In the third step, the first side surface is masked by the mask portion and the first wall portion and the first metal film is formed in a state in which the second side portion is exposed from an opening portion.

    Spectroscopic measurement device having diffraction grating at conjugate plane of relay lens
    66.
    发明授权
    Spectroscopic measurement device having diffraction grating at conjugate plane of relay lens 有权
    在中继透镜的共轭平面处具有衍射光栅的光谱测量装置

    公开(公告)号:US09488524B2

    公开(公告)日:2016-11-08

    申请号:US14430658

    申请日:2013-10-02

    Inventor: Ichiro Ishimaru

    Abstract: A spectroscopic measurement device includes: a dividing optical system for dividing a measurement beam emitted from each of a plurality of measurement points located within a measurement area of an object to be measured, into a first measurement beam and a second measurement beam; an imaging optical system; an optical path length difference providing means; a detector including a plurality of pixels; a processor for acquiring an interferogram of a measurement point of the object to be measured; a conjugate plane imaging optical system located between the object to be measured and the dividing optical system; and a periodicity providing means located on the conjugate plane.

    Abstract translation: 光谱测量装置包括:分割光学系统,用于将位于待测物体的测量区域内的多个测量点中的每一个发射的测量光束分成第一测量光束和第二测量光束; 成像光学系统; 光路长度差提供装置; 检测器,包括多个像素; 用于获取待测量对象的测量点的干涉图的处理器; 位于待测物体与分光光学系统之间的共轭平面成像光学系统; 以及位于共轭平面上的周期性提供装置。

    HIGH PERFORMANCE PARALLEL SPECTROMETER DEVICE
    67.
    发明申请
    HIGH PERFORMANCE PARALLEL SPECTROMETER DEVICE 有权
    高性能并行光谱仪器件

    公开(公告)号:US20160282184A1

    公开(公告)日:2016-09-29

    申请号:US15009755

    申请日:2016-01-28

    Abstract: A spectrometer with increased optical throughput and/or spectral resolution includes a plurality of interferometers coupled in parallel. An optical splitter divides a source light beam into a plurality of input beams and directs each of the input beams to a respective one of the plurality of interferometers. One or more detectors are optically coupled to receive a respective output from each of the plurality of interferometers and is configured to detect an interferogram produced as a result of the outputs.

    Abstract translation: 具有增加的光学吞吐量和/或光谱分辨率的光谱仪包括并联耦合的多个干涉仪。 光分路器将源光束分成多个输入光束,并将每个输入光束引导到多个干涉仪中的相应一个。 一个或多个检测器被光学耦合以从多个干涉仪中的每一个接收相应的输出,并且被配置为检测作为输出结果产生的干涉图。

    METHOD FOR MANUFACTURING OPTICAL INTERFEROMETER
    68.
    发明申请
    METHOD FOR MANUFACTURING OPTICAL INTERFEROMETER 有权
    制造光学干涉仪的方法

    公开(公告)号:US20160202037A1

    公开(公告)日:2016-07-14

    申请号:US14911583

    申请日:2014-07-31

    CPC classification number: G01B9/02051 G01J3/0256 G01J3/4532 G01J3/4535

    Abstract: A method of manufacturing an optical interferometer includes a first step of forming a first semiconductor portion for a beam splitter and a second semiconductor portion for a movable mirror on a main surface of a support substrate and a first insulating layer formed on the main surface, a second step of disposing a first wall portion between a first side surface of the first semiconductor portion and a second side surface in the second semiconductor portion, and a third step of forming a mirror surface in the second semiconductor portion by forming a first metal film on the second side surface using a shadow mask. In the third step, the first side surface is masked by the mask portion and the first wall portion and the first metal film is formed in a state in which the second side portion is exposed from an opening portion.

    Abstract translation: 一种制造光干涉仪的方法包括:形成用于分束器的第一半导体部分和在支撑基板的主表面上形成的可移动反射镜的第二半导体部分和形成在主表面上的第一绝缘层的第一步骤, 在第一半导体部分的第一侧表面和第二半导体部分中的第二侧表面之间布置第一壁部分的第二步骤,以及通过在第二半导体部分中形成第一金属膜来形成第二半导体部分中的镜面的第三步骤 第二侧面使用荫罩。 在第三步骤中,第一侧表面被掩模部分掩蔽,并且第一壁部分和第一金属膜形成在第二侧部分从开口部分露出的状态。

    Compact spectrometer
    69.
    发明授权

    公开(公告)号:US09316540B1

    公开(公告)日:2016-04-19

    申请号:US14642827

    申请日:2015-03-10

    Inventor: Poh Boon Phua

    Abstract: A spectrometer for measuring a spectral signature of an object comprises fringe generating optics for use with a camera and a processor. The fringe generating optics are formed of front optics and birefringent optics. The front optics comprises a diffuser adapted to receive light from the object. The birefringent optics is adapted to receive light from the diffuser and to generate interference fringes. The camera is adapted to receive the interference fringes and the processor generates the spectral signature of the object. This spectrometer is an improved Fourier transform spectrometer suitable for use with digital cameras, such as cameras found in mobile devices.

    METHOD AND SYSTEM FOR SPECTRAL IMAGING
    70.
    发明申请
    METHOD AND SYSTEM FOR SPECTRAL IMAGING 有权
    用于光谱成像的方法和系统

    公开(公告)号:US20150285686A1

    公开(公告)日:2015-10-08

    申请号:US14438641

    申请日:2013-10-24

    Inventor: Nir Katzir

    Abstract: A method of calibrating a spectral imaging system is disclosed. The spectral imaging system comprises an interferometer having a beam splitter and at least a first reflector and a second reflector. The method comprises: obtaining data pertaining to an interference pattern model, operating the spectral imaging system to provide an interference pattern of a received light beam, and varying a relative orientation between at least two of: the beam splitter, the first reflector and the second reflector, until the interference pattern of the input light beam substantially matches the interference pattern model.

    Abstract translation: 公开了一种校准光谱成像系统的方法。 光谱成像系统包括具有分束器和至少第一反射器和第二反射器的干涉仪。 该方法包括:获得与干涉图案模型相关的数据,操作光谱成像系统以提供接收光束的干涉图案,以及改变以下中的至少两个之间的相对取向:分束器,第一反射器和第二反射器 反射器,直到输入光束的干涉图案基本上与干涉图案模型相匹配。

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