Abstract:
A photodetection device comprises: an image sensor that includes first pixels, second pixels, third pixels, and fourth pixels; an interference element that includes first incident regions and second incident regions; and an optical system that causes light in a first wavelength band to be incident on the first incident regions and causes light in a second wavelength band different from the first wavelength band to be incident on the second incident regions. The interference element causes first interference of part of the light in the first wavelength band incident on two first incident regions that are included in the first incident regions. The interference element also causes second interference of part of the light in the second wavelength band incident on two second incident regions.
Abstract:
Aspects of the disclosure relate to an integrated spectral unit including a micro-electro-mechanical systems (MEMS) interferometer fabricated within a first substrate and a light redirecting structure integrated on a second substrate, where the second substrate is coupled to the first substrate. The light redirecting structure includes at least one mirror for receiving an input light beam propagating in an out-of-plane direction with respect to the first substrate and redirecting the input light beam to an in-plane direction with respect to the first substrate towards the MEMS interferometer.
Abstract:
A method of calibrating a spectral imaging system is disclosed. The spectral imaging system comprises an interferometer having a beam splitter and at least a first reflector and a second reflector. The method comprises: obtaining data pertaining to an interference pattern model, operating the spectral imaging system to provide an interference pattern of a received light beam, and varying a relative orientation between at least two of: the beam splitter, the first reflector and the second reflector, until the interference pattern of the input light beam substantially matches the interference pattern model.
Abstract:
Embodiments of the present disclosure provide systems and methods for providing integrated waveguide-based spectrometer systems. In one aspect, the system includes an optical spectrometer comprising one or more waveguides configured to support propagation of optical radiation (i.e. light) through the waveguides to a photodetector. The spectrometer further includes an input coupler for each waveguide, the input coupler configured to couple the radiation from free space into the waveguide in absence of fiber-optic coupling of the radiation into the waveguide. Because at least a portion of the light propagated through the waveguides has interacted with a sample to be spectroscopically evaluated, the light detected by the photodetector allows to carry out the spectroscopic evaluation of the sample. At least some components of the spectrometer are provided on a single die using conventional CMOS techniques, yielding a compact and low cost device.
Abstract:
A method of manufacturing an optical interferometer includes a first step of forming a first semiconductor portion for a beam splitter and a second semiconductor portion for a movable mirror on a main surface of a support substrate and a first insulating layer formed on the main surface, a second step of disposing a first wall portion between a first side surface of the first semiconductor portion and a second side surface in the second semiconductor portion, and a third step of forming a mirror surface in the second semiconductor portion by forming a first metal film on the second side surface using a shadow mask. In the third step, the first side surface is masked by the mask portion and the first wall portion and the first metal film is formed in a state in which the second side portion is exposed from an opening portion.
Abstract:
A spectroscopic measurement device includes: a dividing optical system for dividing a measurement beam emitted from each of a plurality of measurement points located within a measurement area of an object to be measured, into a first measurement beam and a second measurement beam; an imaging optical system; an optical path length difference providing means; a detector including a plurality of pixels; a processor for acquiring an interferogram of a measurement point of the object to be measured; a conjugate plane imaging optical system located between the object to be measured and the dividing optical system; and a periodicity providing means located on the conjugate plane.
Abstract:
A spectrometer with increased optical throughput and/or spectral resolution includes a plurality of interferometers coupled in parallel. An optical splitter divides a source light beam into a plurality of input beams and directs each of the input beams to a respective one of the plurality of interferometers. One or more detectors are optically coupled to receive a respective output from each of the plurality of interferometers and is configured to detect an interferogram produced as a result of the outputs.
Abstract:
A method of manufacturing an optical interferometer includes a first step of forming a first semiconductor portion for a beam splitter and a second semiconductor portion for a movable mirror on a main surface of a support substrate and a first insulating layer formed on the main surface, a second step of disposing a first wall portion between a first side surface of the first semiconductor portion and a second side surface in the second semiconductor portion, and a third step of forming a mirror surface in the second semiconductor portion by forming a first metal film on the second side surface using a shadow mask. In the third step, the first side surface is masked by the mask portion and the first wall portion and the first metal film is formed in a state in which the second side portion is exposed from an opening portion.
Abstract:
A spectrometer for measuring a spectral signature of an object comprises fringe generating optics for use with a camera and a processor. The fringe generating optics are formed of front optics and birefringent optics. The front optics comprises a diffuser adapted to receive light from the object. The birefringent optics is adapted to receive light from the diffuser and to generate interference fringes. The camera is adapted to receive the interference fringes and the processor generates the spectral signature of the object. This spectrometer is an improved Fourier transform spectrometer suitable for use with digital cameras, such as cameras found in mobile devices.
Abstract:
A method of calibrating a spectral imaging system is disclosed. The spectral imaging system comprises an interferometer having a beam splitter and at least a first reflector and a second reflector. The method comprises: obtaining data pertaining to an interference pattern model, operating the spectral imaging system to provide an interference pattern of a received light beam, and varying a relative orientation between at least two of: the beam splitter, the first reflector and the second reflector, until the interference pattern of the input light beam substantially matches the interference pattern model.