公开(公告)号：US08096165B2

公开(公告)日：2012-01-17

申请号：US12629692

申请日：2009-12-02

Applicant: Robert A. Crane

Inventor： Robert A. Crane

IPC: G01J3/433

CPC classification number: G01N29/42 ,  G01N29/036 ,  G01N29/222 ,  G01N29/348 ,  G01N2291/0215

Abstract: A spectrophone assembly comprises a single detector chamber, a plurality of lasers, a gas inlet for supplying a gas sample to the single detector chamber, and at least one microphone. The detector chamber has an internal geometry arranged to be simultaneously acoustically resonant at a plurality of different resonant frequencies. Each laser operates at a different wavelength and is positioned to emit radiation into the single detector chamber, and is operable to emit radiation that is amplitude modulated at a frequency rate corresponding to a particular resonant frequency different from the resonant frequency of each other laser, simultaneously with each other laser. The microphone(s) are positioned in the single detector chamber so that each microphone is located at or near a maximum of a corresponding acoustic resonance defined by the internal geometry of the detector chamber.

Abstract translation: 分光投影仪组件包括单个检测器室，多个激光器，用于将气体样品供应到单个检测器室的气体入口和至少一个麦克风。 检测器室具有布置成在多个不同谐振频率处同时声学谐振的内部几何形状。 每个激光器以不同的波长工作，并且被定位成将辐射发射到单个检测器室中，并且可操作地发射以与每个其它激光器的谐振频率不同的特定谐振频率的频率速率进行幅度调制的辐射 与其他激光。 麦克风位于单个检测器室中，使得每个麦克风位于由检测器室的内部几何形状限定的对应声共振的最大值处或接近最大值。

公开(公告)号：US20050140979A1

公开(公告)日：2005-06-30

申请号：US11011691

申请日：2004-12-14

Applicant: Pawel Kluczynski ,  Jack Margolis ,  Jan Nygren

Inventor： Pawel Kluczynski ,  Jack Margolis ,  Jan Nygren

IPC: G01J3/433 ,  G01N21/39 ,  G01J3/46

CPC classification number: G01J3/4338 ,  G01N21/39 ,  G01N2021/399 ,  G01N2201/0691

Abstract: In a wavelength modulation spectroscopy method for measuring the concentration of a gas component in a gas sample a portion of the light of a tunable light source is passed through a reference gas comprising the gas component in a constant concentration. Afterwards the light is detected by a reference detector. Another portion of the light is passed through the gas sample and thereafter to a measuring detector. The light emitted by the light source is modulated with a frequency fm, while the wavelength is swept over a molecular absorption line of the gas component. Demodulation of the detector outputs is made at a higher harmonic Nfm. In order to compensate for variations of the modulation parameters of the light source (2) in real time, a mathematical description of the demodulated reference detector output (S(υ)N,Ref) based on Fourier analysis of the modulated light (1) and on a mathematical expression for the absorption line is provided, said mathematical description comprising unknown modulation parameters with respect to the modulation of the light (1). Said modulation parameters are determined from the demodulated reference detector output (S(υ)N,Ref) and its mathematical description. In a further step the concentration (cMeas) is determined from the demodulated measuring detector output (S(υ)N,Meas), a corresponding mathematical description of it and the modulation parameters.

Abstract translation: 在用于测量气体样品中的气体成分浓度的波长调制光谱法中，可调光源的一部分光以恒定浓度通过包含气体成分的参考气体。 之后，由参考检测器检测到光。 光的另一部分通过气体样品，然后通过测量检测器。 当波长被扫过气体成分的分子吸收线时，由光源发射的光被调制成频率f m m。 检测器输出的解调是在高次谐波Nf 下进行的。 为了实时地补偿光源（2）的调制参数的变化，基于傅里叶分析的解调参考检测器输出（S（上）N，Ref）的数学描述 提供调制光（1）和吸收线的数学表达式，所述数学描述包括关于光（1）的调制的未知调制参数。 所述调制参数是根据解调参考检测器输出（N）和其数学描述确定的。 在另一步骤中，从解调的测量检测器输出（S）中确定浓度（测量值），其对应的数学描述和 调制参数。

公开(公告)号：US20050094149A1

公开(公告)日：2005-05-05

申请号：US10700161

申请日：2003-11-03

Applicant: Bret Cannon

Inventor： Bret Cannon

IPC: G01J3/433 ,  G01N21/31 ,  G01N21/61

CPC classification number: G01N21/31 ,  G01J3/4338

Abstract: One system of the present invention includes a modulated light source subsystem to provide a first light signal with a first modulation index, and a second light signal with a second modulation index. The system also includes a region to receive an analyte for evaluation and direct the first light signal thereto, and a detector responsive to the second light signal and a third light signal from the region to provide an output representative of spectroscopic information. The third light signal further includes noise induced by residual amplitude modulation that is reduced at the detector by the second light signal in accordance with a difference between the first modulation index and the second modulation index.

Abstract translation: 本发明的一个系统包括调制光源子系统，以提供具有第一调制指数的第一光信号和具有第二调制指数的第二光信号。 该系统还包括接收用于评估的分析物并将第一光信号引导到其上的区域，以及响应于第二光信号的检测器和来自该区域的第三光信号，以提供代表光谱信息的输出。 第三光信号还包括根据第一调制指数和第二调制指数之间的差异，通过第二光信号在检测器处减小的残余幅度调制引起的噪声。

公开(公告)号：US06872947B1

公开(公告)日：2005-03-29

申请号：US10667937

申请日：2003-09-22

Applicant: Dennis S. Greywall

Inventor： Dennis S. Greywall

IPC: G01J3/433 ,  G01N21/35 ,  G01J5/02

CPC classification number: G01J3/02 ,  G01J3/0202 ,  G01J3/0229 ,  G01J3/433 ,  G01N21/3504

Abstract: A portable spectrophotometric system for detecting one or more target substances. In a representative embodiment, a system of the invention has an optical grating, an array of photo-detectors, and a MEMS device having a movable plate positioned between the grating and the array. Light transmitted through a gaseous sample is dispersed by the grating and is imaged onto the movable plate, which has a plurality of openings corresponding to selected infrared absorption lines of the target substance. A small-amplitude oscillation is imparted onto the plate such that the openings periodically move in and out of alignment with the corresponding intensity features in the image, which modulates electrical signals generated by the corresponding photo-detectors. A lock-in signal processor analyzes the modulation pattern by comparing it to the pattern expected in the presence of the target substance. When a positive correlation between the patterns is established, the system warns the user about the presence of the target substance.

Abstract translation: 一种用于检测一种或多种目标物质的便携式分光光度测定系统。 在代表性实施例中，本发明的系统具有光栅，光电检测器阵列和具有位于光栅与阵列之间的可动板的MEMS器件。 通过气体样品透过的光被光栅分散，并被成像到具有对应于目标物质的所选红外吸收线的多个开口的可动板上。 小板振荡被施加到板上，使得开口周期性地移动到与图像中对应的强度特征对齐的位置上，该特征调制由相应光电检测器产生的电信号。 锁定信号处理器通过将调制模式与目标物质存在期望的模式进行比较来分析调制模式。 当建立模式之间的正相关性时，系统向用户警告目标物质的存在。

公开(公告)号：US20050061969A1

公开(公告)日：2005-03-24

申请号：US10667937

申请日：2003-09-22

Applicant: Dennis Greywall

Inventor： Dennis Greywall

IPC: G01J3/433 ,  G01N21/35 ,  G02B26/00 ,  B01D59/44 ,  H01J49/00

CPC classification number: G01J3/02 ,  G01J3/0202 ,  G01J3/0229 ,  G01J3/433 ,  G01N21/3504

Abstract: A portable spectrophotometric system for detecting one or more target substances. In a representative embodiment, a system of the invention has an optical grating, an array of photo-detectors, and a MEMS device having a movable plate positioned between the grating and the array. Light transmitted through a gaseous sample is dispersed by the grating and is imaged onto the movable plate, which has a plurality of openings corresponding to selected infrared absorption lines of the target substance. A small-amplitude oscillation is imparted onto the plate such that the openings periodically move in and out of alignment with the corresponding intensity features in the image, which modulates electrical signals generated by the corresponding photo-detectors. A lock-in signal processor analyzes the modulation pattern by comparing it to the pattern expected in the presence of the target substance. When a positive correlation between the patterns is established, the system warns the user about the presence of the target substance.

Abstract translation: 一种用于检测一种或多种目标物质的便携式分光光度测定系统。 在代表性实施例中，本发明的系统具有光栅，光电检测器阵列和具有位于光栅与阵列之间的可动板的MEMS器件。 通过气体样品透过的光被光栅分散，并被成像到具有对应于目标物质的所选红外吸收线的多个开口的可动板上。 小板振荡被施加到板上，使得开口周期性地移动到与图像中对应的强度特征对齐的位置上，该特征调制由相应光电检测器产生的电信号。 锁定信号处理器通过将调制模式与目标物质存在期望的模式进行比较来分析调制模式。 当建立模式之间的正相关性时，系统向用户警告目标物质的存在。

公开(公告)号：US06862535B2

公开(公告)日：2005-03-01

申请号：US10218551

申请日：2002-08-14

Applicant: Robin L. Binder

Inventor： Robin L. Binder

IPC: G01J3/433 ,  G01J3/453 ,  G01N21/27 ,  G01N21/35 ,  G01N31/00

CPC classification number: G01J3/453 ,  G01N21/274 ,  G01N21/3504 ,  G01N2021/3595

Abstract: An FT-IR toxic gas monitoring system and method for detection of one or more toxic gas species in a fluid environment containing or susceptible to presence of toxic gases. Such gas monitoring system includes: (1) a spectroscopic monitoring assembly for transmitting modulated infrared radiation through a spectroscopic cell that contains a gas sample from such fluid environment and generating a corresponding digitized spectrum characteristics of such gas sample for analysis; (2) a gas sampling and delivery subsystem for sampling the fluid environment and delivering the gas sample to the spectroscopic cell; and (3) a computational assembly (i) including a stored signal-to-noise ratio reference, and a stored background spectrum for the fluid environment when the toxic gas species is not present, and (ii) arranged to analyze the digitized spectrum and responsively produce an output indicative of quantitative presence of the toxic gas species in the fluid environment.

Abstract translation: 用于检测含有或易于存在有毒气体的流体环境中的一种或多种有毒气体物质的FT-IR有毒气体监测系统和方法。 这种气体监测系统包括：（1）光谱监测组件，用于通过含有来自这种流体环境的气体样品的分光单元传输调制的红外辐射并产生用于分析的这种气体样品的相应的数字化光谱特征; （2）气体采样和传送子系统，用于对流体环境进行取样并将气体样品输送到分光单元; 和（3）包含存储的信噪比参考的计算组合（i）和当不存在有毒气体物质时用于流体环境的储存背景光谱，以及（ii）安排分析数字化光谱和 响应地产生指示在流体环境中定量存在有毒气体物质的输出。

公开(公告)号：US20050035288A1

公开(公告)日：2005-02-17

申请号：US10496571

申请日：2002-11-25

Applicant: Hidemi Shigekawa ,  Osamu Takeuchi ,  Mikio Yamashita ,  Ryuji Morita

Inventor： Hidemi Shigekawa ,  Osamu Takeuchi ,  Mikio Yamashita ,  Ryuji Morita

IPC: G01J1/42 ,  G01J3/28 ,  G01J3/433 ,  G01N21/64 ,  G01Q30/00 ,  G01Q30/02 ,  G01Q60/10 ,  G01Q60/24 ,  G01N13/12 ,  G01N13/16

CPC classification number: G01J3/433 ,  G01J3/2889 ,  G01J2001/4242 ,  G01N21/6408 ,  G01N21/6458 ,  G01N2021/6415 ,  G01Q30/02 ,  G01Q60/12 ,  Y10S977/85

Abstract: Disclosed is a measuring apparatus for a physical phenomenon by photoexcitation, in particular a delay time modulated and time-resolved, scanning probe microscope apparatus providing an ultimate resolution both temporal and spatial. The apparatus comprises an ultrashort laser pulse generator (2); a delay time modulating circuit (6) which splits an ultrashort laser pulse (3) produced by the ultrashort laser pulse generator (2) into two and which also modulates a delay time td between the two ultrashort laser pulses (4 and 5) with a frequency (ω); a scanning probe microscope (17); and a lock-in detection unit (8) which performs lock-in detection with the delay time modulation frequency (ω) of a probe signal (11) from the scanning probe microscope (17). It can detect the delay time dependency of the probe signal (11) as its differential coefficient to the delay time, with no substantial influence from fluctuations in the intensity of ultrashort laser pulses (3) while preventing the probe apex (19) from thermal expansion and shrinkage by repeated irradiation with ultrashort laser pulses (3). A photoexcited physical phenomenon dependent on a delay time between ultrashort laser pulses can thus be measured at a temporal resolution in the order of femtoseconds and at a spatial resolution in the order of angstroms.

Abstract translation: 公开了一种通过光激发的物理现象的测量装置，特别是延迟时间调制和时间分辨的扫描探针显微镜装置，其提供了时间和空间上的最终分辨率。 该装置包括超短激光脉冲发生器（2）; 延迟时间调制电路（6），其将由超短激光脉冲发生器（2）产生的超短激光脉冲（3）分成两部分，并且还用一个第二超短激光脉冲（4和5）调制两个超短激光脉冲（4和5）之间的延迟时间td 频率（ω）; 扫描探针显微镜（17）; 以及锁定检测单元（8），其利用来自扫描探针显微镜（17）的探测信号（11）的延迟时间调制频率（ω）执行锁定检测。 探测信号（11）的延迟时间依赖性可以作为其延迟时间的微分系数，而不会因为超短激光脉冲（3）的强度的波动带来实质的影响，同时防止探头顶点（19）的热膨胀 以及通过用超短激光脉冲（3）重复照射来收缩。 因此，依赖于超短激光脉冲之间的延迟时间的光激发物理现象可以以飞秒级的时间分辨率和以埃的空间分辨率测量。

公开(公告)号：US6154708A

公开(公告)日：2000-11-28

申请号：US82116

申请日：1998-05-20

Applicant: Katsue Koashi

Inventor： Katsue Koashi

IPC: G01J3/28 ,  G01J3/433 ,  G01J3/00

CPC classification number: G01J3/433

Abstract: The present method of processing spectral data calculates the first to fourth derivative spectra of an original spectrum with respect to the wavenumber and creates a two-dimensional representation by plotting coordinates consisting of the derivative values of some order as their abscissas and the original spectral values or derivative values of another order different from that order as their ordinates. In this two-dimensional plotting, maximal points, minimal points, maximal slope points (inflection points) and the like are clearly represented, so that a great amount of accurate feature information about the analyzed object can be easily obtained.

Abstract translation: 本发明的光谱数据处理方法计算出相对于波数的原始光谱的第一到第四导数光谱，并且通过绘制由某些次序的导数值组成的坐标作为横坐标和原始光谱值，创建二维表示，或 另一个不同于该顺序的顺序的导数值作为其纵坐标。 在该二维绘图中，清楚地表示最大点，最小点，最大倾斜点（拐点）等，从而可以容易地获得关于分析对象的大量准确的特征信息。

公开(公告)号：US6154284A

公开(公告)日：2000-11-28

申请号：US280989

申请日：1999-03-30

Applicant: James McAndrew ,  Hwa-Chi Wang ,  Benjamin J. Jurcik, Jr.

Inventor： James McAndrew ,  Hwa-Chi Wang ,  Benjamin J. Jurcik, Jr.

IPC: C23C16/44 ,  G01J3/433 ,  G01N21/03 ,  G01N21/35 ,  G01N21/39 ,  H01L21/02 ,  G01N21/00 ,  G01R31/00 ,  G01R31/26

CPC classification number: G01N21/031 ,  C23C16/4412 ,  G01J3/433 ,  G01N21/3504 ,  G01N21/3554 ,  G01N21/39

Abstract: Provided is a novel chamber effluent monitoring system. The system comprises a chamber having an exhaust line connected thereto. The exhaust line includes a sample region, wherein substantially all of a chamber effluent also passes through the sample region. The system further comprises an absorption spectroscopy measurement system for detecting a gas phase molecular species. The measurement system comprises a light source and a main detector in optical communication with the sample region through one or more light transmissive window. The light source directs a light beam into the sample region through one of the one or more light transmissive window. The light beam passes through the sample region and exits the sample region through one of the one or more light transmissive window. The main detector responds to the light beam exiting the sample region. The system allows for in situ measurement of molecular gas impurities in a chamber effluent, and in particular, in the effluent from a semiconductor processing chamber. Particular applicability is found in semiconductor manufacturing process control and hazardous gas leak detection.

公开(公告)号：US5748309A

公开(公告)日：1998-05-05

申请号：US545136

申请日：1995-10-19

Applicant: D. W. van der Weide ,  Fritz Keilmann

Inventor： D. W. van der Weide ,  Fritz Keilmann

IPC: G01J3/433 ,  G01J3/28

CPC classification number: G01J3/4338

Abstract: A spectroscopy method is defined in which a first source of radiation (51) emits a periodically pulsed beam (A) having a repetition frequency .omega. and in that a second source of radiation (52) emits a periodically pulsed beam (B) having a repetition frequency .omega.+.DELTA., the beams are united with each other and directed at a material specimen (6) to be analyzed and a detector means determines the amplitudes of the frequency components n.DELTA. of the beam emanating from the material specimen.

Abstract translation: 定义了一种光谱方法，其中第一辐射源（51）发射具有重复频率ω的周期性脉冲光束（A），并且第二辐射源（52）发射具有重复的周期性脉冲光束（B） 频率ω+ DELTA，光束彼此结合并且指向待分析的材料样本（6），并且检测器装置确定从材料样本发出的光束的频率分量nTATA的振幅。