公开(公告)号：US09310318B2

公开(公告)日：2016-04-12

申请号：US14638305

申请日：2015-03-04

Applicant: Hitachi High-Technologies Corporation

Inventor： Yuta Urano ,  Toshifumi Honda ,  Yukihiro Shibata

IPC: G01J4/00 ,  G01N21/956 ,  G01N21/95 ,  G01N21/88

CPC classification number: G01N21/956 ,  G01N21/9501 ,  G01N21/95607 ,  G01N2021/8848 ,  G01N2021/9513 ,  G01N2021/95638

Abstract: To detect a bridge defect between lines of a line pattern formed on a sample at pitches narrower than the wavelength of inspection light, a defect inspection device is configured to comprise: a light source which emits laser; a vertical illumination unit which applies the laser to the sample from a vertical direction via an objective lens by converting the laser into linearly polarized light by using a polarization conversion unit in a state polarized in a direction orthogonal to the longitudinal direction of the line pattern; an oblique illumination unit which applies the laser to the sample from an oblique direction; a detection optical unit including an optical filter which selectively transmits a scattered light component from the defect by converting the polarization state of the reflected/scattered light; and a signal processing unit which detects the defect on the sample by processing a detection signal.

Abstract translation: 为了以窄于检查光的波长的间距检测在样品上形成的线图案的线之间的桥缺陷，缺陷检查装置被配置为包括：发射激光的光源; 垂直照明单元，其通过使用偏振转换单元在与线图案的纵向方向正交的方向上偏振的状态下将激光转换成线偏振光，通过物镜将垂直方向的激光施加到样本; 倾斜照明单元，其从倾斜方向向样品施加激光; 检测光学单元，包括：滤光器，其通过转换所述反射/散射光的偏振状态来选择性地透射来自所述缺陷的散射光分量; 以及信号处理单元，其通过处理检测信号来检测样本上的缺陷。

公开(公告)号：US09291505B2

公开(公告)日：2016-03-22

申请号：US13707979

申请日：2012-12-07

Applicant: Brooks A. Childers ,  Roger Glen Duncan ,  Ajit Balagopal ,  Dan R. Provenzano

Inventor： Brooks A. Childers ,  Roger Glen Duncan ,  Ajit Balagopal ,  Dan R. Provenzano

IPC: G01B9/02 ,  G01J4/00 ,  G01N21/954 ,  G01D5/353

CPC classification number: G01J4/00 ,  G01D5/35316 ,  G01D5/35393 ,  G01N21/954

Abstract: A system and method to obtain and process interferometer output scans is described. The interferometer-based sensor system includes a tunable laser to transmit a transmit signal and a polarization scrambler to produce a polarization state change on the transmit signal. The system also includes an interferometer to provide an output scan based on the transmit signal with the polarization state change and a processor to process the output scan.

Abstract translation: 描述了获得和处理干涉仪输出扫描的系统和方法。 基于干涉仪的传感器系统包括用于传输发射信号的可调谐激光器和偏振加扰器，以在发射信号上产生极化状态变化。 该系统还包括干涉仪，用于基于具有偏振态变化的发射信号和处理器来处理输出扫描来提供输出扫描。

公开(公告)号：US09214035B2

公开(公告)日：2015-12-15

申请号：US14571480

申请日：2014-12-16

Applicant: Sony Corporation

Inventor： Yusuke Nakamura ,  Shinichiro Gomi ,  Masaru Suzuki

IPC: G06K9/00 ,  G06T11/60 ,  G06T5/00 ,  G06T7/00 ,  G06T7/40 ,  G01J4/00

CPC classification number: G06T11/60 ,  G06K9/00362 ,  G06T5/005 ,  G06T7/11 ,  G06T7/40 ,  G06T7/90 ,  G06T2207/30196

Abstract: There is provided an image processing device including a body hair detection unit that detects a body hair region corresponding to body hair from a process target image that includes skin, a texture structure estimation unit that estimates a structure of skin texture in the process target image, and an interpolation unit that interpolates the body hair region detected by the body hair detection unit based on the structure of the skin texture estimated by the texture structure estimation unit.

公开(公告)号：US09170093B2

公开(公告)日：2015-10-27

申请号：US14014667

申请日：2013-08-30

Applicant: SICK STEGMANN GmbH

Inventor： David Hopp

IPC: G01B11/14 ,  G01J4/00 ,  G01D5/34

CPC classification number: G01B11/14 ,  G01D5/345 ,  G01J4/00

Abstract: The invention relates to a device for measuring the relative position of two objects moving relative to each other along an axis or around a rotating axis (D), with a transmitter (12) which emits unpolarized light, and with a polarizer (20), and with at least one receiver (16) which measures the luminosity of the light passing through the polarizer (20) in order to create a position-dependent signal, such that a polarizing filter is positioned in front of the receiver (16), and the receiver (16) and the polarizer (20) move relative to each other as a function of the relative position of the two objects, and such that the polarizer (20) has at least two different polarizing directions.

Abstract translation: 本发明涉及一种用于测量沿着轴线或围绕旋转轴线（D）相对于彼此移动的两个物体与发射非偏振光的发射器（12）以及偏振器（20）的相对位置的装置， 以及至少一个测量通过偏振器（20）的光的亮度的接收器（16），以便产生位置相关的信号，使得偏振滤光器位于接收器（16）的前面，以及 接收器（16）和偏振器（20）作为两个物体的相对位置的函数相对于彼此移动，并且使得偏振器（20）具有至少两个不同的偏振方向。

公开(公告)号：US09041935B2

公开(公告)日：2015-05-26

申请号：US13482813

申请日：2012-05-29

Applicant: Xiaotian Steve Yao ,  Xiaojun Chen

Inventor： Xiaotian Steve Yao ,  Xiaojun Chen

IPC: G01B9/02 ,  G01N21/00 ,  G01J4/00 ,  G01J4/02 ,  G01N21/23

CPC classification number: G01J4/02 ,  G01N21/23

Abstract: Techniques and devices for measuring polarization crosstalk in birefringence optical media including polarization maintaining fiber.

Abstract translation: 用于测量双折射光学介质包括偏振保持光纤的偏振串扰的技术和装置。

公开(公告)号：US08994943B2

公开(公告)日：2015-03-31

申请号：US13690025

申请日：2012-11-30

Applicant: Infineon Technologies AG

Inventor： Franz Darrer

IPC: G01J4/00 ,  G01J4/04

CPC classification number: G01J4/04 ,  G01S7/499 ,  G01S17/89 ,  G01S17/936

Abstract: Representative implementations of devices and techniques provide selectivity for imaging devices and systems. Polarization may be applied to emitted light radiation and/or received light radiation to select a desired imaging result. Using polarization, an imaging device or system can pass desired light radiation having desired information and reject unwanted or stray light radiation.

Abstract translation: 设备和技术的代表性实现为成像设备和系统提供了选择性。 极化可以应用于发射的光辐射和/或接收的光辐射以选择期望的成像结果。 使用偏振，成像装置或系统可以传递具有期望信息的期望的光辐射并且拒绝不需要的或杂散的光辐射。

公开(公告)号：US08947663B2

公开(公告)日：2015-02-03

申请号：US14215739

申请日：2014-03-17

Applicant: Yin Wang ,  Gerard Wysocki

Inventor： Yin Wang ,  Gerard Wysocki

IPC: G01J4/00 ,  G01J4/04 ,  G01N21/21

CPC classification number: G01N21/21 ,  G01J3/447 ,  G01N21/1717 ,  G01N2021/1727

Abstract: A dual-modulation Faraday rotation spectroscopic (FRS) system is disclosed. The FRS system uses an FRS sample cell configured to subject a sample to a low frequency modulated magnetic field. The system includes a polarized laser light source configured to generate a high frequency wavelength-modulated light beam incident on the sample, the high frequency wavelength-modulated light beam being modulated at a higher frequency than the low frequency modulated magnetic field. A polarizer is configured to receive from the sample a transmitted light beam having a modulated polarization having a polarization rotation and translate the modulated polarization of the transmitted light beam into an intensity modulated beam. A photodetector is configured to detect the intensity modulated beam and generate a photodetector signal. A dual demodulator is coupled to the photodetector and is configured to demodulate the photodetector signal.

Abstract translation: 公开了一种双调制法拉第旋转光谱（FRS）系统。 FRS系统使用被配置为使样本进入低频调制磁场的FRS采样单元。 该系统包括被配置为产生入射在样品上的高频波长调制光束的偏振激光光源，高频波长调制光束以比低频调制磁场更高的频率进行调制。 偏振器被配置为从样本接收具有具有偏振旋转的调制偏振的透射光束，并将透射光束的调制偏振转换成强度调制光束。 光电检测器被配置为检测强度调制光束并产生光电检测器信号。 双重解调器耦合到光电检测器并且被配置为解调光电检测器信号。

公开(公告)号：US08908180B2

公开(公告)日：2014-12-09

申请号：US13810791

申请日：2011-07-18

Applicant: Olivier Acher

Inventor： Olivier Acher

IPC: G01J4/04 ,  G01J4/00 ,  G02B21/00

CPC classification number: G01J4/04 ,  G01J4/00 ,  G02B21/0092

Abstract: A polarimetric measurement device and method with microscopic resolution include a polarization conversion device to modify the polarization of a beam so as to switch from a spatially uniform distribution to a distribution that is cylindrically symmetric about the optical axis, and vice versa. The conversion device is positioned on the axis of a focusing objective for focusing the cylindrically symmetric polarized beam onto the surface of a sample to be measured. The device may be incorporated into a microellipsometer, or an interference contrast microscope, or used as a polarimetric accessory for a microscope.

Abstract translation: 具有微观分辨率的偏振测量装置和方法包括：偏振转换装置，用于改变光束的偏振度，以便从空间均匀分布转换成围绕光轴圆柱对称的分布，反之亦然。 转换装置位于聚焦对象的轴上，用于将圆柱对称的偏振光束聚焦到待测样品的表面上。 该装置可以结合到微计算机或干涉对比显微镜中，或用作显微镜的极化附件。

公开(公告)号：US20140332077A1

公开(公告)日：2014-11-13

申请号：US14446766

申请日：2014-07-30

Applicant: RESEARCH FOUNDATION OF THE CITY UNIVERSITY OF NEW YORK

Inventor： David Thomas Crouse ,  Pavan Kumar Reddy Keshavareddy

IPC: G02B5/30 ,  H01L31/052 ,  G01J4/00

CPC classification number: G02B5/3058 ,  B82Y20/00 ,  G01J4/00 ,  G01J2004/001 ,  G02B5/008 ,  G02B5/1809 ,  H01L31/054

Abstract: A device for enhancing transmission of incident electromagnetic radiation at a predetermined wavelength is presented that includes an aperture array structure in a thin film. The structure includes a repealing unit cell having more than one aperture including a first aperture and a second aperture, wherein a parameter of the first aperture differs from that of the second aperture. The unit cell repeats with a periodicity on the order of or less than said predetermined wavelength, The structure parameters are configured to preferentially support cavity modes for coupling to and enhancing transmission of a predetermined polarization state at the predetermined wavelength. By structuring the unit cell with apertures that differ by appropriate degrees in at least one of dimension, height, dielectric constant of material filling the apertures, shape, and orientation, the devices can be adapted for polarization and/or wavelength filtering- and/or light circulating, weaving, or channeling.

Abstract translation: 提出了一种用于增强预定波长的入射电磁辐射的传输的装置，其包括薄膜中的孔阵列结构。 该结构包括具有多于一个孔径的包括第一孔和第二孔的废弃单元，其中第一孔的参数不同于第二孔的参数。 单位单元重复具有小于或等于所述预定波长的周期。结构参数被配置为优先地支持用于耦合到预定波长的预定极化状态和增强传输预定偏振状态的腔模。 通过将孔的结构化成孔径，该孔的尺寸，高度，填充孔，材料和取向的材料的介电常数至少有一个适当的程度，该装置可适用于偏振和/或波长过滤，和/或 光循环，编织或沟渠。

公开(公告)号：US08860939B2

公开(公告)日：2014-10-14

申请号：US13916813

申请日：2013-06-13

Applicant: The Royal Institution for the Advancement of Learning / McGill University

Inventor： Patanjali Kambhampati ,  Jonathan Saari ,  Pooja Tyagi

IPC: G01J4/00 ,  G01J3/10 ,  G01J3/12

CPC classification number: G01J3/10 ,  G01J3/0224 ,  G01J3/08 ,  G01J3/1256 ,  G01J3/433 ,  G01J3/453 ,  G01J9/02

Abstract: Two dimensional (2D) optical spectroscopy, wherein the spectrum has an excitation and an emission axis, reveals information formerly hidden in one-dimensional (1D) optical spectroscopy. However, current two dimensional optical spectroscopy systems are complex laboratory arrangements and accordingly limited in deployment. According to embodiments of the invention a monolithic platform providing significantly reduced complexity and increased robustness is provided allowing for “black-box” modules allowing commercial deployment of 2D optical spectroscopy instruments. Additionally, the invention supports high pulse repetition rates as well as one quantum and two quantum measurements under electronic control.

Abstract translation: 二维（2D）光谱，其中光谱具有激发和发射轴，揭示了先前隐藏在一维（1D）光谱中的信息。 然而，目前的二维光谱系统是复杂的实验室布置，因此在部署方面受到限制。 根据本发明的实施例，提供了提供显着降低的复杂性和增强的鲁棒性的单片平台，允许允许商业部署2D光谱仪器的“黑箱”模块。 此外，本发明支持高脉冲重复率以及电子控制下的一个量子和两个量子测量。