Abstract:
A method and system of coating a polymer solution on a substrate such as a semiconductor wafer. The method includes providing a substrate. Dispensing a polymer solution onto the surface of the substrate using a pump. The pump is connected in-line with a buffer tank and a polymer solution source such that the pump draws the polymer solution from the polymer solution source and the buffer tank in a continuous fluid path to dispense the polymer solution. The polymer solution source is connected to a pressure source capable of causing a transfer of the polymer solution from the polymer solution source into the buffer tank. The buffer tank to maintain a relatively constant level of polymer solution.
Abstract:
A method and apparatus of coating a polymer solution on a substrate such as a semiconductor wafer. The apparatus includes a coating chamber having a rotatable chuck to support a substrate to be coated with a polymer solution. A dispenser to dispense the polymer solution over the substrate extends into the coating chamber. A vapor distributor having a solvent vapor generator communicable with the coating chamber is included to cause a solvent to be transformed into a solvent vapor. A carrier gas is mixed with the solvent vapor to form a carrier-solvent vapor mixture. The carrier-solvent vapor mixture is flown into the coating chamber to saturate the coating chamber. A solvent remover communicable with the coating chamber is included to remove excess solvent that does not get transformed into the solvent vapor to prevent the excess solvent from dropping on the substrate.
Abstract:
A plasma reactor for processing a workpiece includes a vacuum enclosure, including a wall, defining a vacuum chamber, the vacuum chamber having a main chamber portion on one side of the wall and a plenum on another side of the wall, the plenum communicating with the chamber portion through at least one opening in the wall, a workpiece support within the main chamber portion and facing the wall. A gas distribution plate is adjacent the wall and faces the workpiece support and is coupled to a reactive process gas supply for injecting reactive process gases directly into a process region adjacent the workpiece support. A gas injection port at the plenum is coupled to a diluent gas supply for injecting diluent gases into the plenum. A coil antenna adapted to accept RF power is inductively coupled to the interior of said plenum, and is capable of maintaining a plasma in a reentrant path through the plenum and across the process region.
Abstract:
A plasma chamber defining an evacuated interior environment for processing a substrate includes a substrate support, an apertured gas distribution plate in spaced facing relationship to the substrate support, and adapted to flow process gases into the chamber interior environment adjacent the substrate support, the gas distribution plate and substrate support defining a substrate processing region therebetween, a hollow reentrant conduit having respective ends opening into the substrate processing region on opposite sides of the gas distribution plate, with the interior of said conduit sharing the interior environment. The conduit is adapted to accept irradiation of processing gases within the conduit to sustain a plasma in a path extending around the conduit interior and across the substrate processing region within the chamber interior environment.
Abstract:
A method of processing a workpiece in a plasma reactor includes establishing a torroidal path for a plasma current to flow that passes near and transverse to the surface of said workpiece, maintaining a plasma current in the torroidal path by applying RF power to a portion of the torroidal path away from the surface of the workpiece, and increasing the ion density of the plasma current in the vicinity of the workpiece by constricting the area of a portion of the torroidal path overlying the workpiece.
Abstract:
We disclose a drug tracking system and method of use which may be used to screen a subject's bodily waste in order to assess whether the subject has consumed a drug. The system includes a drug composition which is tagged with at least one artificial sweetener that may be detected in the subject's bodily waste. The subject may consume the tagged drug and a user may obtain a sample of the subject's bodily waste. The bodily waste sample may be analyzed to detect the artificial sweetener or its metabolite. In some embodiments, the result of the analysis of bodily waste may be entered into a database, compared to standards that comprises analyses of a plurality of drug tags, and the identity of the drug tag, and consequently the drug composition, determined.
Abstract:
We disclose a method of using taggants to assess how and to what extent a drug in a drug composition has decayed in response to environmental conditions and time. The taggants may decay in response to environmental conditions which cause drugs to lose their efficacy. The decay may occur due to improper storage or excursions into certain environmental conditions. These environmental conditions may include light, temperature, moisture, oxidation, and age. By including taggants that have different decay characteristics, the environmental condition that caused the decay may be determined. The amount of time the drug composition was exposed to the environmental condition and the amount of effective drug remaining may also be determined. The disclosed method may reduce the need for a unique assay for each drug to assess decay and determine shelf life. The disclosed method may also be used as a quality control technique for pharmaceutical products.
Abstract:
We disclose a toilet system which analyzes solid waste to detect tags which were associated with pharmaceutical or nutritional products and excreted in the solid waste of a user. The toilet system may include a receptacle for receiving solid waste, a liquid dispenser for providing a liquid to assist in dispersing the solid waste, a solid waste dispersing system which may mix the solid waste with the liquid thereby homogenizing the solid waste, and an electromagnetic signature detector which may analyze the tags in the solid waste. The electromagnetic signature detector may include a selective binding surface which may bind tags present in the solid waste and which may be connected to a transducer which senses the presence of bound tags.
Abstract:
Aspects of the present disclosure describe an attachment device for mounting a module to a substrate comprises a module leg with two ends and a module foot. One end of the module leg is configured to be attached to a bottom surface of the module and the other end of the module leg is configured to be attached to the module foot. At least a portion of the module foot is configured to be attached to the substrate. Also a portion of a surface area of the module foot is configured to be exposed outside of an area covered by the module. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.
Abstract:
This invention provides center locking means that are manufactured from harder materials for detachably coupling two swim fins for use by a swimmer practicing the dolphin kick. Also, the invention explains how to strengthen the center locking means to preserve longevity of use.