Multi-step process for forming high-aspect-ratio holes for MEMS devices
    75.
    发明授权
    Multi-step process for forming high-aspect-ratio holes for MEMS devices 有权
    用于形成MEMS器件的高纵横比孔的多步法

    公开(公告)号:US07923379B2

    公开(公告)日:2011-04-12

    申请号:US12347250

    申请日:2008-12-31

    Abstract: A method of forming an integrated circuit structure includes forming an opening in a substrate, with the opening extending from a top surface of the substrate into the substrate. The opening is filled with a filling material until a top surface of the filling material is substantially level with the top surface of the substrate. A device is formed over the top surface of the substrate, wherein the device includes a storage opening adjoining the filling material. A backside of the substrate is grinded until the filling material is exposed. The filling material is removed from the channel until the storage opening of the device is exposed.

    Abstract translation: 形成集成电路结构的方法包括在衬底中形成开口,其中开口从衬底的顶表面延伸到衬底中。 开口填充有填充材料,直到填充材料的顶表面基本上与基板的顶表面平齐。 在衬底的顶表面上形成器件,其中该器件包括与填充材料相邻的存储开口。 研磨衬底的背面,直到填充材料暴露。 将填充材料从通道中取出直到设备的存储开口露出。

    Three-Dimensional Microfabricated Bioreactors with Embedded Capillary Network
    77.
    发明申请
    Three-Dimensional Microfabricated Bioreactors with Embedded Capillary Network 审中-公开
    具有嵌入式毛细管网络的三维微型生物反应器

    公开(公告)号:US20110033887A1

    公开(公告)日:2011-02-10

    申请号:US12679497

    申请日:2008-09-24

    Abstract: In an aspect, the present invention uses projection micro stereolithography to generate three-dimensional microvessel networks that are capable of supporting and fostering growth of a cell population. For example, provided is a method of making a microvascularized bioreactor via layer-by-layer polymerization of a photocurable liquid composition with repeated patterns of illumination, wherein each layer corresponds to a layer of the desired microvessel network. The plurality of layers are assembled to make a microvascular network. Support structures having different etch rates than the structures that make up the network provides access to manufacturing arbitrary geometries that cannot be made by conventional methods. A cell population is introduced to the external wall of the network to obtain a microvascularized bioreactor. Provided are various methods and related bioreactors, wherein the network wall has a permeability to a biological material that varies within and along the network.

    Abstract translation: 在一方面,本发明使用投影微立体光刻术来产生能够支持和促进细胞群体生长的三维微血管网络。 例如,提供了通过具有重复照明模式的光固化液体组合物的逐层聚合制备微血管化生物反应器的方法,其中每层对应于所需微血管网络的层。 组合多个层以形成微血管网络。 具有与组成网络的结构不同的蚀刻速率的支撑结构提供了对通过常规方法不能制造的任意几何形状的访问。 将细胞群引入网络的外壁以获得微血管生物反应器。 提供了各种方法和相关的生物反应器,其中网络壁具有在网络内和沿网络变化的生物材料的渗透性。

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