公开(公告)号：US11239045B1

公开(公告)日：2022-02-01

申请号：US17039478

申请日：2020-09-30

Applicant: FEI Company

Inventor： Alexander Henstra ,  Marcel Niestadt

IPC: H01J37/153 ,  H01J37/28 ,  H01J37/145

Abstract: Correctors for correcting two-fold, fifth-order parasitic aberrations in charged particle systems according to the present disclosure include a first corrective component that generates a first quadrupole field when a first excitation is applied to the first corrective component, and a second corrective component that generates a second quadrupole field when a second excitation is applied to the second corrective component. Correctors according to the present disclosure also include a quadrupole positioned between the second corrective component and the sample when used in the charged particle microscope system that generates a third quadrupole field. The third quadrupole field, in combination with at least the first quadrupole field and the second quadrupole field, corrects the fifth-order, two-fold aberrations when the charged particle microscope is in use.

公开(公告)号：US20220026373A1

公开(公告)日：2022-01-27

申请号：US17496605

申请日：2021-10-07

Applicant: FEI Company

Inventor： Jean-Marc Bohlen ,  Cornelis van Beek

IPC: G01N21/892 ,  G01N21/67 ,  G01N23/2252

Abstract: Various methods and systems are provided for analyzing sample inclusions. As one example, a correction factor may be generated based on inclusion properties of a first sample determined using both an optical emission spectrometry (OES) system and a charged-particle microscopy with energy dispersive X-ray spectroscopy (CPM/EDX) system. The OES system may be calibrated with the correction factor. The inclusion properties of a second, different, sample may be determined using the calibrated OES system.

公开(公告)号：US11211223B1

公开(公告)日：2021-12-28

申请号：US17002499

申请日：2020-08-25

Applicant: FEI Company

Inventor： Ivan Lazić ,  Stefano Vespucci ,  Eric Gerardus Bosch ,  Bert Henning Freitag

IPC: H01J37/244 ,  H01J37/28 ,  H01J37/145 ,  H01J37/20

Abstract: A method for imaging a sample with charged particles comprises directing charged particles towards the sample along a primary axis, and simultaneously detecting a first portion and a second portion of the charged particles transmitted through the sample with a first detector and a second detector, respectively. The second detector is positioned downstream of the first detector. Each of the transmitted charged particles exits the sample at an exit angle between a direction of the transmitted charged particle and the primary axis. The exit angles of the first portion of the transmitted charged particles overlap with the exit angles of the second portion of the transmitted charged particles. In this way, complimentary information, such as the structural and compositional information, may be obtained simultaneously.

公开(公告)号：US11195693B1

公开(公告)日：2021-12-07

申请号：US16888216

申请日：2020-05-29

Applicant: FEI Company

Inventor： Tomá{hacek over (s)} Vystav{hacek over (e)}l ,  Pavel Stejskal

IPC: H01J37/28 ,  H01J37/244 ,  H01J37/26 ,  H01J37/22

Abstract: Dynamic band contrast image (DBCI) is constructed with scattering patterns acquired at multiple scanning locations of a sample using a charged particle beam. Each pixel of the DBCI is generated by integrating the corresponding scattering pattern along a diffraction band. The DBCI includes charged particle channeling condition and can be used for detecting sample defects.

公开(公告)号：US11152189B2

公开(公告)日：2021-10-19

申请号：US16823140

申请日：2020-03-18

Applicant: FEI Company

Inventor： James Bishop ,  Daniel Totonjian ,  Chris Elbadawi ,  Charlene Lobo ,  Milos Toth

IPC: H01J37/244 ,  H01J37/28

Abstract: Various methods and systems are provided for imaging a sample under low vacuum with a charged particle beam. A magnetic field is provided in a detection area of the detector. Gas and plasma are provided in the detection area while detecting charged particles emitted from the sample. Sample image is formed based on the detected charged particles.

公开(公告)号：US20210299665A1

公开(公告)日：2021-09-30

申请号：US16834973

申请日：2020-03-30

Applicant: FEI Company

Inventor： Jakub Drahotsky

IPC: B01L7/00 ,  G01N1/42 ,  H01J37/26 ,  G01N1/28

Abstract: Temperatures of cryo-electron microscopy samples are assessed based on images portions associated with high temperature superconductor (HTSC) areas or other thermal sensor materials that are thermally coupled to or thermally proximate the samples. Such thermal areas can be provided on sample mounts such as metallic grids, carbon films, or on sample stages. In examples using HTSCs, HTSCs having critical temperatures between −175° C. and −135° C. are typically used.

公开(公告)号：US11127560B2

公开(公告)日：2021-09-21

申请号：US16542053

申请日：2019-08-15

Applicant: FEI Company

Inventor： Johannes A. H. W. G. Persoon ,  Andreas Theodorus Engelen ,  Ruud Schampers

IPC: H01J37/252 ,  H01J37/244 ,  G02B21/34 ,  H01J37/20

Abstract: The invention relates to a charged particle microscope (CPM) that at least includes a sample holder, for holding a sample, and a manipulator device arranged for transferring a lamella created in said sample out of said sample, wherein said manipulator device comprises a first elongated manipulator member with a first outer end, and a second elongated manipulator member with a second outer end. The outer ends are movable for mechanically gripping and releasing said lamella. In embodiments, the elongated manipulator members comprise off-set parts that increase manoeuvrability, accessibility, and monitorability of the manipulator device during use.

公开(公告)号：US11120542B2

公开(公告)日：2021-09-14

申请号：US15974640

申请日：2018-05-08

Applicant: FEI Company

Inventor： Stale Havsgaard Fjeldstad

IPC: G06T7/00 ,  G06F30/28 ,  G01N13/02 ,  G06F111/10 ,  E21B47/002

Abstract: Contact angles of multi-phase mixtures in a porous medium are determined by comparing images generated by flow simulations with a measured image of a fluid flow in the porous medium. A measured image can be compared image element by image element with corresponding locations in the flow simulations. A plurality of flow simulations associated with a corresponding plurality of contact angles is used for the comparison, and a contact angle associated with the greatest number of matches between the measured image and the flow simulation is selected.

公开(公告)号：US20210272767A1

公开(公告)日：2021-09-02

申请号：US17253097

申请日：2018-12-20

Applicant: FEI Company

Inventor： Maarten BISCHOFF ,  Peter Christiaan TIEMEIJER ,  Tjerk Gerrit SPANJER ,  Stan Johan Pieter KONINGS

IPC: H01J37/153 ,  H01J37/20 ,  H01J37/22 ,  H01J37/147 ,  H01J37/28

Abstract: The invention relates to a method for electron microscopy. The method comprises providing an electron microscope, generating an electron beam and an image beam, adjusting one of the beam and of the beam and the image beam to reduce off-axial aberrations and correcting a diffraction pattern of the resulting modified beam. The invention also relates to a method for reducing throughput time in a sample image acquisition session in transmission electron microscopy. The method comprises providing an electron microscope, generating a beam and an image beam, adjusting one of the two to reduce off-axial aberrations and filtering the resulting modified image beam. The invention further relates to an electron microscope and to a non-transient computer-readable medium with a computer program for carrying out the methods.

公开(公告)号：US11100612B2

公开(公告)日：2021-08-24

申请号：US16405536

申请日：2019-05-07

Applicant: FEI Company

Inventor： Maurice Peemen ,  Pavel Poto{hacek over (c)}ek ,  Remco Schoenmakers

IPC: G06T5/00 ,  G06N3/08

Abstract: Methods and systems for neural network based image restoration are disclosed herein. An example method at least includes acquiring a plurality of training image pairs of a sample, where each training image of each of the plurality of training image pairs are images of a same location of a sample, and where each image of the plurality of training image pairs are acquired using same acquisition parameters, updating an artificial neural network based on the plurality of training image pairs, and denoising a plurality of sample images using the updated artificial neural network, where the plurality of sample images are acquired using the same acquisition parameters as used to acquire the plurality of training image pairs.