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    BLANK OF TITANIUM-DOPED GLASS WITH A HIGH SILICA CONTENT FOR A MIRROR SUBSTRATE FOR USE IN EUV LITHOGRAPHY AND METHOD FOR THE PRODUCTION THEREOF
    82.
    发明申请
    BLANK OF TITANIUM-DOPED GLASS WITH A HIGH SILICA CONTENT FOR A MIRROR SUBSTRATE FOR USE IN EUV LITHOGRAPHY AND METHOD FOR THE PRODUCTION THEREOF 有权
    具有高二氧化硅含量的钛白粉玻璃用于在EUV光刻中使用的镜面基板及其生产方法

    公开(公告)号：US20120183719A1

    公开(公告)日：2012-07-19

    申请号：US13499352

    申请日：2010-09-28

    Applicant: Bodo Kuehn

    Inventor： Bodo Kuehn

    IPC: B32B17/00 ,  C03B23/13

    CPC classification number: C03B23/20 ,  C03B19/1453 ,  C03B32/00 ,  C03B2201/42 ,  C03C3/06 ,  C03C2201/42 ,  G02B5/10 ,  G03F7/708 ,  Y10T428/22 ,  Y10T428/24612

    Abstract: On the basis of a known method for producing a blank of titanium-doped glass with a high silica content (glass) for a mirror substrate for use in EUV lithography which has a surface region that has an outer contour, is intended to be provided with a reflective coating and is specified as a highly loaded zone when the mirror substrate is used as intended, in order to provide a blank which can be produced at low cost and nevertheless meets high requirements with respect to homogeneity and freedom from blisters and striae, a procedure which comprises the following method steps is proposed: (a) producing a front body of titanium-doped high-quality glass with dimensions more than large enough to enclose the outer contour, (b) producing a cylindrical supporting body from titanium-doped glass, (c) bonding the front body and the supporting body to form a composite body, and (d) working the composite body to form the mirror substrate blank, wherein the step of producing the front body comprises a homogenizing process involving twisting a starting body obtained in the form of a strand by flame hydrolysis of a silicon-containing compound to form a front body blank, and the supporting body is formed as a monolithic glass block with less homogeneity than the front body.

    Abstract translation: 基于具有高二氧化硅含量的钛掺杂玻璃的坯料的制造方法（玻璃）的基础是用于具有外表面的EUV光刻用的镜面基板，其目的是设置有 反射涂层，并且当反射镜基板按预期使用时被指定为高负载区域，以便提供可以以低成本生产的空白，并且在均匀性方面满足高要求并且不受起泡和条纹的影响， 提出了包括以下方法步骤的方法：（a）制造尺寸大到足以包围外轮廓的钛掺杂高品质玻璃的前体，（b）从掺钛玻璃制造圆柱形支撑体 ，（c）将所述前体和所述支撑体接合以形成复合体，和（d）加工所述复合体以形成所述反射镜基板坯料，其中，所述制造所述前体的步骤包括 一种均质化方法，其特征在于，通过使含硅化合物的火焰水解使绞合线形成的起始体扭转而形成前体坯料，所述支撑体形成为与前身均匀性较差的整体式玻璃块。

    METHOD FOR PRODUCING GLASS BODY AND METHOD FOR PRODUCING OPTICAL MEMBER FOR EUV LITHOGRAPHY
    84.
    发明申请
    METHOD FOR PRODUCING GLASS BODY AND METHOD FOR PRODUCING OPTICAL MEMBER FOR EUV LITHOGRAPHY 失效
    用于生产玻璃体的方法和用于制造用于EUV光刻的光学构件的方法

    公开(公告)号：US20110314868A1

    公开(公告)日：2011-12-29

    申请号：US13169459

    申请日：2011-06-27

    Applicant: Junko MIYASAKA ,  Akio KOIKE ,  Tomonori OGAWA ,  Masahiro KAWAGISHI

    Inventor： Junko MIYASAKA ,  Akio KOIKE ,  Tomonori OGAWA ,  Masahiro KAWAGISHI

    IPC: C03B20/00 ,  C03B19/01

    CPC classification number: C03B19/1423 ,  C03B2201/42 ,  C03B2207/06 ,  C03B2207/20 ,  Y02P40/57

    Abstract: The present invention relates to a method for producing a glass body containing: hydrolyzing a silicon compound and a compound containing a metal serving as a dopant, in a flame projected from a burner to form glass fine particles; and depositing and growing the formed glass fine particles on a base material, in which a raw material mixed gas containing a gas of the silicon compound, a gas of the compound containing a metal serving as a dopant, and either one of a combustible gas and a combustion supporting gas is fed into a central nozzle (A) positioning in the center of the burner; the other gas of the combustible gas and the combustion supporting gas is fed into a nozzle (B) different from the central nozzle (A) of the burner; a combustible gas or a combustion supporting gas is arbitrarily fed into a nozzle different from the nozzles (A) and (B); and a flow rate of the raw material mixed gas is 50% or more and not more than 90% of the largest flow rate among flow rate(s) of the combustible gas(ses) and the combustion supporting gas(ses) fed from other nozzle or nozzles than the central nozzle (A).

    Abstract translation: 本发明涉及一种玻璃体的制造方法，其特征在于，在从燃烧器投射的火焰中，含有硅化合物和含有作为掺杂剂的金属的化合物，形成玻璃微粒; 并且将形成的玻璃微粒沉积并生长在基材上，其中含有硅化合物的气体的原料混合气体，含有作为掺杂剂的金属的化合物的气体和可燃性气体和 燃烧支持气体被供给到位于燃烧器中心的中心喷嘴（A）中; 可燃气体和燃烧辅助气体的其他气体被供给到与燃烧器的中心喷嘴（A）不同的喷嘴（B）中; 将可燃气体或燃烧性支持气体任意地供给到与喷嘴（A）和（B）不同的喷嘴中; 并且原料混合气体的流量在可燃气体（s）和从其他方式供给的燃烧负载气体（s））的流量之间的最大流量的50％以上且不大于90％ 喷嘴或喷嘴比中心喷嘴（A）。

    INTERNAL VAPOUR DEPOSITION PROCESS
    85.
    发明申请
    INTERNAL VAPOUR DEPOSITION PROCESS 有权
    内部蒸汽沉积过程

    公开(公告)号：US20110247369A1

    公开(公告)日：2011-10-13

    申请号：US13082080

    申请日：2011-04-07

    Applicant: Igor MILICEVIC ,  Mattheus Jacobus Nicolaas VAN STRALEN ,  Johannes Antoon HARTSUIKER ,  Eugen ALDEA ,  Eric Aloysius KUIJPERS

    Inventor： Igor MILICEVIC ,  Mattheus Jacobus Nicolaas VAN STRALEN ,  Johannes Antoon HARTSUIKER ,  Eugen ALDEA ,  Eric Aloysius KUIJPERS

    IPC: C03B37/018 ,  C03B37/07 ,  C03B37/025

    CPC classification number: C03B37/0183 ,  C03B37/01807 ,  C03B2201/12 ,  C03B2201/24 ,  C03B2201/28 ,  C03B2201/31 ,  C03B2201/32 ,  C03B2201/42

    Abstract: A method for manufacturing a primary preform for optical fibres using an internal vapour deposition process, including the steps of: i) providing a hollow glass substrate tube having a supply side and a discharge side, ii) surrounding at least part of the hollow glass substrate tube by a furnace, iii) supplying a gas flow, doped or undoped, of glass-forming gases to the interior of the hollow glass substrate tube via the supply side thereof, iv) creating a reaction zone in which conditions such that deposition of glass will take place on the interior of the hollow glass tube are created, and v) moving the reaction zone back and forth in longitudinal direction over the hollow glass substrate tube between a reversal point located near the supply side and a reversal point located near the discharge side of the hollow glass substrate tube.

    Abstract translation: 一种使用内部气相沉积工艺制造用于光纤的初级预制棒的方法，包括以下步骤：i）提供具有供给侧和排出侧的中空玻璃基板管，ii）至少部分中空玻璃基板 通过炉子管，iii）通过其供应侧向中空玻璃基底管的内部供应玻璃形成气体的掺杂或未掺杂的气流，iv）产生反应区，其中使玻璃沉积的条件 将产生在中空玻璃管​​的内部，并且v）使反应区域在纵向方向上前后移动到中空玻璃基板管之间，位于靠近供应侧的反转点和位于放电附近的反转点 一侧的中空玻璃基板管。

    Method for manufacturing GRIN lens
    88.
    发明授权
    Method for manufacturing GRIN lens 有权
    制作GRIN镜片的方法

    公开(公告)号：US07921672B2

    公开(公告)日：2011-04-12

    申请号：US10569280

    申请日：2005-04-12

    Applicant: Hiroyoshi Matsumura ,  Taro Suzuki ,  Toru Achiwa

    Inventor： Hiroyoshi Matsumura ,  Taro Suzuki ,  Toru Achiwa

    IPC: C03B8/00

    CPC classification number: G02B3/0087 ,  C03B19/12 ,  C03B23/047 ,  C03B2201/40 ,  C03B2201/42 ,  C03B2203/26

    Abstract: A method for manufacturing a GRIN lens includes the steps of forming a wet gel provided with a concentration distribution having a different concentration of a refractive index distribution imparting metal that differs in concentration in a radial direction, drying the wet gel to form a dry gel having a bulk specific gravity ρ (g/cm3), sintering the dry gel to form a GRIN lens base material and stretching the GRIN lens base material while heating. The method is characterized in that, in the step of sintering the dry gel, partial pressures of oxygen during sintering at 800° C. or higher are 10−1 Pa or lower and also the relation between a rate of temperature increase v (° C./hr) and a bulk density ρ of the dry gel during sintering at 1,000 to 1,150° C. is defined by v≦105*EXP (−12ρ). As a result of this, the GRIN lens, which has a large numerical aperture and a small diameter, can stably and easily be manufactured.

    Abstract translation: 制造GRIN透镜的方法包括以下步骤：形成具有浓度分布的湿凝胶，所述浓缩分布具有不同浓度的在径向上浓度不同的折射率分布赋予金属，干燥湿凝胶以形成具有 体积比重 （g / cm3），烧结干凝胶以形成GRIN透镜基材并在加热时拉伸GRIN透镜基材。 该方法的特征在于，在烧结干凝胶的步骤中，800℃以上的烧结时的氧分压为10〜1Pa以下，温度升高之间的关系v（℃ ./hr）和堆积密度 在1000至1150℃的烧结期间的干凝胶由v＆nlE; 105 * EXP（-12）定义。 作为其结果，可以稳定且容易地制造具有大数值孔径和小直径的GRIN透镜。

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