公开(公告)号：US20240280500A1

公开(公告)日：2024-08-22

申请号：US18436083

申请日：2024-02-08

Applicant: NuFlare Technology, Inc.

Inventor： Ryoichi HIRANO ,  Yasuhiro YAMASHITA ,  Toshiaki OTAKI

IPC: G01N21/88 ,  G01N21/956 ,  G01N21/95

CPC classification number: G01N21/8806 ,  G01N21/8851 ,  G01N21/95607 ,  G01N21/9501 ,  G01N2201/103

Abstract: A method for adjusting a focus position of an inspection apparatus includes measuring, while varying a height position of a pattern forming surface of an evaluation substrate with thereon plural types of figure patterns, for each type of figure pattern, light amounts at front and back focus positions of a light transmitted through or reflected from the evaluation substrate irradiated with an inspection light, calculating an autofocus signal, for each type of figure pattern and for each height position of the pattern forming surface, by using the light amounts measured at the front and back focus positions, and specifying a value of an inspection autofocus signal such that a difference between autofocus signal values of plural type figure patterns calculated at the same height position of the pattern forming surface is equal to or less than a threshold value.

公开(公告)号：US20240167961A1

公开(公告)日：2024-05-23

申请号：US18393159

申请日：2023-12-21

Applicant: ENERSOFT INC.

Inventor： Grant I. SANDEN ,  Yannai Z.R. SEGAL ,  Mikhail KOSTOUSOV

IPC: G01N21/71 ,  G01N33/24

CPC classification number: G01N21/718 ,  G01N33/24 ,  G01N2201/06113 ,  G01N2201/0636 ,  G01N2201/08 ,  G01N2201/103

Abstract: Laser induced breakdown spectroscopy (LIBS) devices for analysis of geological and related samples, and related methods. In the method, a scanning table having a geological core is moved from a start position to an end position for each position in a plurality of positions of the scanning table corresponding to an e region of interest of the geological core. At each position, laser ablation is performed on the exposed surface of the geological core using an oscillating planar focus laser. Contemporaneously with performing laser ablation on the exposed surface of the geological core, spectroscopy is permitted on the emitted light received by a fiber optic receiver sharing an optical path with the oscillating planar focus laser.

公开(公告)号：US20240096667A1

公开(公告)日：2024-03-21

申请号：US18272859

申请日：2021-01-29

Applicant: HITACHI HIGH-TECH CORPORATION

Inventor： Hiromichi YAMAKAWA ,  Toshifumi HONDA ,  Yuta URANO ,  Shunichi MATSUMOTO ,  Masaya YAMAMOTO ,  Eiji ARIMA

IPC: H01L21/67 ,  G01N21/95 ,  G06T7/60 ,  G06T7/70

CPC classification number: H01L21/67288 ,  G01N21/9501 ,  G06T7/60 ,  G06T7/70 ,  G01N2201/103 ,  G01N2201/1087 ,  G01N2201/121 ,  H04N23/67

Abstract: A defect inspection device in which an optical axis of a detection optical system is inclined with respect to a surface of a sample, and an imaging sensor is inclined with respect to the optical axis, a height variation amount of an illumination spot in a normal direction of the surface of the sample is calculated based on an output of a height measuring unit, a deviation amount of the focusing position with respect to the light receiving surface in an optical axis direction of the detection optical system is calculated based on the height variation amount of the illumination spot, the deviation amount of the focusing position being generated accompanying a height variation of the illumination spot, and the focus actuator is controlled based on the deviation amount of the focusing position, and scattered light intensities at the same coordinates of the sample are added.

公开(公告)号：US11781996B1

公开(公告)日：2023-10-10

申请号：US18142340

申请日：2023-05-02

Applicant: AUROS TECHNOLOGY, INC.

Inventor： Ji-Hoon Kang ,  Hyun-Tae Kim

IPC: G01N21/956 ,  G01N21/95 ,  G01N21/88

CPC classification number: G01N21/956 ,  G01N21/8806 ,  G01N21/9501 ,  G01N2201/103

Abstract: There are provided an overlay measuring device and a method for controlling a focus and a program therefor. An overlay measuring device controlling a focus in one embodiment includes an objective lens; a memory; a lens focus actuator operating the objective lens to adjust a distance between the objective lens and a wafer; and a processor controlling operations of the memory and the lens focus actuator, wherein the processor is configured to obtain a first height value in relation to each site of the wafer, match the obtained first height value and a corresponding site and store the same, and as initial measurement in relation to each site of the wafer starts, control the lens focus actuator, based on the stored first height value of the site, to control a Z-axis movement of the objective lens.

公开(公告)号：US11720032B2

公开(公告)日：2023-08-08

申请号：US17273758

申请日：2019-08-30

Applicant: ASML NETHERLANDS B.V.

Inventor： Raphael Nico Johan Stegen ,  Erik Henricus Egidius Catharina Eummelen ,  Christianus Wilhelmus Johannes Berendsen ,  Theodorus Wilhelmus Polet ,  Giovanni Luca Gattobigio

IPC: G03F7/20 ,  G03F7/00 ,  G01N21/88

CPC classification number: G03F7/7065 ,  G01N21/88 ,  G03F7/70341 ,  G03F7/70716 ,  G01N2201/0636 ,  G01N2201/103

Abstract: A process tool for processing production substrates, the process tool including: a movable stage configured to perform long-stroke movements in an X-Y plane; an imaging device mounted to a fixed part of the tool and having an optical axis substantially parallel to the X-Y plane; and a mirror mounted on the movable stage and oriented at a predetermined angle of inclination to the X-Y plane so that by moving the movable stage to a predetermined position a part of a component to be inspected can be imaged by the imaging device.

公开(公告)号：US20180085792A1

公开(公告)日：2018-03-29

申请号：US15806380

申请日：2017-11-08

Applicant: The Boeing Company

Inventor： Morteza Safai ,  Jeffrey G. Thompson

IPC: B08B5/02 ,  G01N21/94 ,  G01N21/88 ,  B29C70/30 ,  G01N21/84

CPC classification number: B08B5/02 ,  B29C70/30 ,  G01N21/8851 ,  G01N21/94 ,  G01N2021/8472 ,  G01N2201/103

Abstract: A system for the detection of foreign object debris material on a surface of a composite part being manufactured. A platform is configured to move over the surface. A thermal excitation source is fixed to the platform and configured to direct infrared radiation across the surface. An infrared camera is also fixed to the platform and configured to scan the surface as the platform moves over the surface to detect and output a signal proportional to infrared radiation emitted by the surface and/or by any foreign object debris material on the surface in response to the infrared radiation from the excitation source. A controller is coupled to the excitation source and to the infrared camera and is configured to compare the signal from the infrared camera with a first predetermined threshold signal to detect if any foreign object debris material is located on the surface.

公开(公告)号：US20170089506A1

公开(公告)日：2017-03-30

申请号：US15315878

申请日：2015-06-03

Applicant: THE REGENTS OF THE UNIVERSITY OF MICHIGAN

Inventor： Chinedum E. OKWUDIRE ,  Deokkyun D. YOON

IPC: F16M11/04 ,  F16M11/18 ,  G03F7/20 ,  H01L21/67

CPC classification number: F16M11/043 ,  F16M11/18 ,  G01N21/9501 ,  G01N2201/103 ,  G03F7/70758 ,  G03F7/70858 ,  G03F7/709 ,  H01L21/67259 ,  H01L21/68

Abstract: A magnet assisted stage system for scanning applications having a scanning table being moveable from a first position to a second position, a scanning actuator operably associated with the scanning table to move the scanning table along a scanning direction from the first position to the second position, and an actively variable magnetic spring system being operably augmented to the scanning table to exert a magnetic repulsion force upon the scanning table in the scanning direction.

公开(公告)号：US20160349190A1

公开(公告)日：2016-12-01

申请号：US15116612

申请日：2015-02-04

Applicant: NSK AMERICAS, INC.

Inventor： George Morrison, III ,  Ty Alan Brown ,  Timothy Brian Rood

IPC: G01N21/95 ,  G01B11/00 ,  B62D65/02 ,  G01N21/952

CPC classification number: G01N21/9515 ,  B62D65/02 ,  G01B5/0025 ,  G01B11/00 ,  G01N21/952 ,  G01N2021/888 ,  G01N2201/06113 ,  G01N2201/103

Abstract: An apparatus (110) (and associated method) for inspecting a steering column assembly (10) including a motor (114a) driven drive sleeve (128) supported in a headstock (114) and having a longitudinal axis, and being adapted for receiving and engaging a portion of the steering column assembly, and at least one optical scanning device (160a, 160b, 160c) adapted to optically scan a feature of interest of the steering column assembly (10) while the shaft of the steering column assembly (10) is rotated for gathering data for identifying one or more deviations from one or more predetermined values for the feature of interest.

Abstract translation: 一种用于检查转向柱组件（10）的装置（110）（和相关联的方法），所述转向柱组件包括支撑在主轴箱（114）中并具有纵向轴线的马达（114a）驱动的驱动套筒（128），并且适于接收和 接合转向柱组件的一部分，以及适于在转向柱组件（10）的轴处光学地扫描转向柱组件（10）的感兴趣特征的至少一个光学扫描装置（160a，160b，160c） 旋转以收集用于识别关于感兴趣特征的一个或多个预定值的一个或多个偏差的数据。

公开(公告)号：US20160221048A1

公开(公告)日：2016-08-04

申请号：US14614198

申请日：2015-02-04

Applicant: The Boeing Company

Inventor： Morteza Safai ,  Jeffrey G. Thompson

IPC: B08B5/02 ,  G01N21/88 ,  G01N21/94

CPC classification number: B08B5/02 ,  B29C70/30 ,  G01N21/8851 ,  G01N21/94 ,  G01N2021/8472 ,  G01N2201/103

Abstract: A system for the detection of foreign object debris material on a surface of a composite part being manufactured. A platform is configured to move over the surface. A thermal excitation source is fixed to the platform and configured to direct infrared radiation across the surface. An infrared camera is also fixed to the platform and configured to scan the surface as the platform moves over the surface to detect and output a signal proportional to infrared radiation emitted by the surface and/or by any foreign object debris material on the surface in response to the infrared radiation from the excitation source. A controller is coupled to the excitation source and to the infrared camera and is configured to compare the signal from the infrared camera with a first predetermined threshold signal to detect if any foreign object debris material is located on the surface.

Abstract translation: 一种用于检测正在制造的复合部件表面上的异物碎屑材料的系统。 平台被配置成在表面上移动。 热激发源固定在平台上，并被配置为引导穿过表面的红外辐射。 红外摄像机也固定在平台上并配置成当平台在表面上移动时扫描表面，以便响应地检测并输出与由表面发射的红外线辐射和/或任何异物碎屑材料成反比的信号 到来自激发源的红外辐射。 控制器耦合到激励源和红外摄像机，并且被配置为将来自红外摄像机的信号与第一预定阈值信号进行比较，以检测是否有异物碎屑材料位于表面上。

公开(公告)号：US09341564B2

公开(公告)日：2016-05-17

申请号：US13123518

申请日：2009-10-09

Applicant: Fraser McNeil-Watson

Inventor： Fraser McNeil-Watson

IPC: G01N27/453 ,  G01N21/25 ,  B01L3/00 ,  G01N21/51 ,  G01N27/447 ,  G01N21/03 ,  G01N15/14 ,  G01N21/47

CPC classification number: G01N21/253 ,  B01L3/5025 ,  B01L2300/0829 ,  B01L2400/0421 ,  G01N21/03 ,  G01N21/51 ,  G01N27/44721 ,  G01N2015/1493 ,  G01N2021/0346 ,  G01N2021/4707 ,  G01N2021/513 ,  G01N2201/103 ,  G01N2201/105

Abstract: A high-throughput optical suspension characterization instrument is disclosed, which can include hydraulically separate and at least partially transparent sample containers. A selection mechanism is operative to selectively direct light from a light source (12) through different ones of the sample containers along an optical axis, and an off-axis scattering detector (38,24) is responsive to scattered light from the light source after it has interacted with a sample. Phase analysis light scattering is used to determine the electrophoretic mobility and zeta potential of samples. A second instrument is disclosed, wherein all sample containers are illuminated simultaneously. Transmitted light is collected by a camera. The electrophoretic mobility and hydrodynamic size of the samples may be determined.

Abstract translation: 公开了一种高通量光学悬浮表征仪器，其可以包括液压分离和至少部分透明的样品容器。 选择机构可操作以沿着光轴选择性地将来自光源（12）的光引导通过不同的样本容器，并且离轴散射检测器（38,24）响应于来自光源的散射光， 它已经与样本进行了互动。 相位分析光散射用于确定样品的电泳迁移率和ζ电位。 公开了第二种仪器，其中所有的样品容器都是同时照射的。 透射光被照相机收集。 可以确定样品的电泳迁移率和流体动力学尺寸。