公开(公告)号：US11867558B2

公开(公告)日：2024-01-09

申请号：US16485686

申请日：2018-02-13

Applicant: MKS TECHNOLOGY, INC.

Inventor： Danial Clark Barkhurst ,  Sean Patrick Woodward ,  Keith Thompson Carron ,  Shane Alan Buller

IPC: G01J3/02 ,  G01J3/44 ,  G02B7/182

CPC classification number: G01J3/0208 ,  G01J3/0289 ,  G01J3/44 ,  G02B7/1822 ,  G02B7/1827 ,  G01J3/0218

Abstract: Optical systems have uses, such as in spectrometers, for directing a beam. A spectrometer, for example, utilizes an optical system for directing an incident beam toward a sample and receiving a spectroscopy signal from the sample. In various implementations, for example, an optical system may be further configured to move a beam with respect to a target, such as a sample, and still provide a home position where the beam is directed in a stationary configuration. A self-homing (e.g., self-centering) optical system may provide a “home” position in which the beam is directed in a first stationary mode while still allowing a focused beam to be moved with respect to a target in a second dynamic mode.

公开(公告)号：US10458917B2

公开(公告)日：2019-10-29

申请号：US15864340

申请日：2018-01-08

Applicant: MKS Technology, Inc.

Inventor： Keith T. Carron ,  Celestin P. Zemtsop ,  Shane A. Buller ,  Scott L. Rudder ,  Harald R. Guenther

IPC: G01N21/65

Abstract: A method of measuring Raman scattering includes exciting Raman scattering of a sample with a first wavelength and a second wavelength of electromagnetic radiation traveling along a common optical path to form a first scattered radiation and a second scattered radiation. The first wavelength reaches the sample polarized in a first direction, and the second wavelength reaches the sample polarized in a second direction perpendicular to the first direction. The method includes collecting a first Raman spectrum from the first scattered radiation, collecting a second Raman spectrum from the second scattered radiation, and forming a decomposed Raman spectrum based on the first Raman spectrum and the second Raman spectrum. The decomposed Raman spectrum may be substantially free of noise, such as fluorescence and background radiation. Related spectrometers and laser devices are disclosed.

公开(公告)号：US20180195965A1

公开(公告)日：2018-07-12

申请号：US15864340

申请日：2018-01-08

Applicant: MKS Technology, Inc.

Inventor： Keith T. Carron ,  Celestin P. Zemtsop ,  Shane A. Buller ,  Scott L. Rudder ,  Harald R. Guenther

IPC: G01N21/65

CPC classification number: G01N21/65 ,  G01N2201/06113 ,  G01N2201/0683

Abstract: A method of measuring Raman scattering includes exciting Raman scattering of a sample with a first wavelength and a second wavelength of electromagnetic radiation traveling along a common optical path to form a first scattered radiation and a second scattered radiation. The first wavelength reaches the sample polarized in a first direction, and the second wavelength reaches the sample polarized in a second direction perpendicular to the first direction. The method includes collecting a first Raman spectrum from the first scattered radiation, collecting a second Raman spectrum from the second scattered radiation, and forming a decomposed Raman spectrum based on the first Raman spectrum and the second Raman spectrum. The decomposed Raman spectrum may be substantially free of noise, such as fluorescence and background radiation. Related spectrometers and laser devices are disclosed.

公开(公告)号：US09523610B2

公开(公告)日：2016-12-20

申请号：US14666249

申请日：2015-03-23

Applicant: MKS Technology

Inventor： Mark Watson ,  Shane Buller ,  Keith Carron

IPC: G01J3/44 ,  G01N33/543 ,  G01N21/65 ,  G01J3/06

CPC classification number: G01J3/4406 ,  G01J3/06 ,  G01J3/44 ,  G01J2003/062 ,  G01J2003/064 ,  G01N21/65 ,  G01N21/658 ,  G01N33/54313 ,  G01N33/54373 ,  G01N2201/0612

Abstract: A spectrometer is provided. In one implementation, for example, a spectrometer comprises an excitation source, a focusing lens, a movable mirror, and an actuator assembly. The focusing lens is adapted to focus an incident beam from the excitation source. The actuator assembly is adapted to control the movable mirror to move a focused incident beam across a surface of the sample.

公开(公告)号：US12247880B1

公开(公告)日：2025-03-11

申请号：US17403473

申请日：2021-08-16

Applicant: MKS TECHNOLOGY

Inventor： Keith T. Carron ,  Shane A. Buller ,  Mark A. Watson ,  Sean Patrick Woodward

IPC: G01J3/44 ,  G01N21/65

Abstract: A spectrometer, such as a Raman spectrometer, adapted for analyzing a complex sample is provided. In an example implementation, the spectrometer may be able to determine one or more spectral characteristics of an inner subsurface layer or region of a complex sample (e.g., contents of a container). In one embodiment, for example, A spectrometer includes an excitation source configured to provide an excitation signal; an optical system configured to direct the excitation signal toward a sample and receive a spectroscopy signal from the sample. The optical system may include a spatial filter configured to separate or isolate at least one first portion of the spectroscopy signal from at least one second portion of the spectroscopy signal and pass the at least one first portion of the spectroscopy signal. A detector is configured to determine at least one spectral feature of the at least one first portion of the spectroscopy signal.

公开(公告)号：US20190242751A1

公开(公告)日：2019-08-08

申请号：US16126998

申请日：2018-09-10

Applicant: MKS TECHNOLOGY (D/B/A SNOWY RANGE INSTRUMENTS)

Inventor： Keith T. Carron ,  Shane A. Buller ,  Mark A. Watson ,  Sean Patrick Woodward

IPC: G01J3/44 ,  G01J3/02 ,  G01N21/65 ,  G01J3/10

CPC classification number: G01J3/4412 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/027 ,  G01J3/0297 ,  G01J3/10 ,  G01J3/44 ,  G01N21/65 ,  G01N2021/4711 ,  G01N2201/0612 ,  G01N2201/068 ,  G01N2201/12

Abstract: Spectrometers and methods for determining the presence or absence of a material in proximity to and/or combined with another material are provided. In one particular example, a spectrometer is provided that includes a light source, a detector and an optical system. In this implementation, the light source is configured to provide an excitation incident beam. The detector is configured to detect a spectroscopy signal. The optical system is configured to direct the excitation incident beam toward a sample at a non-zero angle from a zero-angle reference. The optical system is further configured to receive a spectroscopy signal from the sample and provide the spectroscopy signal to the detector. The detector is configured to remove a spectral interference component of the spectroscopy signal.

公开(公告)号：US20150260576A1

公开(公告)日：2015-09-17

申请号：US14666249

申请日：2015-03-23

Applicant: MKS Technology (d/b/a Snowy Range Instruments)

Inventor： Mark Watson ,  Shane Buller ,  Keith Carron

IPC: G01J3/44 ,  G01N21/65 ,  G01J3/06

CPC classification number: G01J3/4406 ,  G01J3/06 ,  G01J3/44 ,  G01J2003/062 ,  G01J2003/064 ,  G01N21/65 ,  G01N21/658 ,  G01N33/54313 ,  G01N33/54373 ,  G01N2201/0612

Abstract: A spectrometer is provided. In one implementation, for example, a spectrometer comprises an excitation source, a focusing lens, a movable mirror, and an actuator assembly. The focusing lens is adapted to focus an incident beam from the excitation source. The actuator assembly is adapted to control the movable mirror to move a focused incident beam across a surface of the sample.

Abstract translation: 提供光谱仪。 在一个实施方案中，例如，光谱仪包括激发源，聚焦透镜，可移动反射镜和致动器组件。 聚焦透镜适于聚焦来自激发源的入射光束。 致动器组件适于控制可移动镜以将聚焦的入射光束移动穿过样品的表面。

公开(公告)号：US20230251132A1

公开(公告)日：2023-08-10

申请号：US17943056

申请日：2022-09-12

Applicant: MKS Technology (D/B/A Snowy Range Instruments)

Inventor： Quaid Vohra ,  Celestin Zemtsop ,  Mark Watson

IPC: G01J3/44 ,  G01J3/02 ,  G01J3/10 ,  G01J3/18 ,  G01J3/28

CPC classification number: G01J3/44 ,  G01J3/0208 ,  G01J3/0297 ,  G01J3/10 ,  G01J3/18 ,  G01J3/2803

Abstract: A multi-dispersive spectrometer is provided in which the spectrometer comprises an optical system configured to direct an excitation signal from an excitation light source toward a sample, receive a spectroscopy signal from the sample, and direct the spectroscopy signal toward the detector. The optical system comprises a movable optical component adapted to move the spectroscopy signal relative to at least one sensor of the detector and the detector is adapted to detect a plurality of discrete shifted spectroscopy signals. A method of obtaining a Raman spectrum from a sample is also provided. The method comprises directing an excitation signal from an excitation light source toward a sample; receiving a spectroscopy signal from the sample; and directing the spectroscopy signal toward a detector, wherein the spectroscopy signal is moved relative to at least one sensor of the detector to provide a plurality of discrete shifted spectroscopy signals.

公开(公告)号：US11441948B2

公开(公告)日：2022-09-13

申请号：US17054157

申请日：2020-03-25

Applicant: MKS TECHNOLOGY, INC.

Inventor： Quaid Vohra ,  Celestin Zemtsop ,  Mark Watson

IPC: G01J3/44 ,  G01J3/02 ,  G01J3/10 ,  G01J3/18 ,  G01J3/28

Abstract: A multi-dispersive spectrometer is provided in which the spectrometer comprises an optical system configured to direct an excitation signal from an excitation light source toward a sample, receive a spectroscopy signal from the sample, and direct the spectroscopy signal toward the detector. The optical system comprises a movable optical component adapted to move the spectroscopy signal relative to at least one sensor of the detector and the detector is adapted to detect a plurality of discrete shifted spectroscopy signals. A method of obtaining a Raman spectrum from a sample is also provided. The method comprises directing an excitation signal from an excitation light source toward a sample; receiving a spectroscopy signal from the sample; and directing the spectroscopy signal toward a detector, wherein the spectroscopy signal is moved relative to at least one sensor of the detector to provide a plurality of discrete shifted spectroscopy signals.

公开(公告)号：US11307090B2

公开(公告)日：2022-04-19

申请号：US16681192

申请日：2019-11-12

Applicant: MKS TECHNOLOGY

Inventor： Mark Watson ,  Shane Buller ,  Keith Carron

IPC: G01J3/02 ,  G01J3/06 ,  G01J3/44 ,  G01N21/65

Abstract: A spectrometer is provided. In one implementation, for example, a spectrometer comprises an excitation source, a focusing lens, a movable mirror, and an actuator assembly. The focusing lens is adapted to focus an incident beam from the excitation source. The actuator assembly is adapted to control the movable mirror to move a focused incident beam across a surface of the sample.