METHOD FOR MAKING A CAVITY IN THE THICKNESS OF A SUBSTRATE WHICH MAY FORM A SITE FOR RECEIVING A COMPONENT
    2.
    发明申请
    METHOD FOR MAKING A CAVITY IN THE THICKNESS OF A SUBSTRATE WHICH MAY FORM A SITE FOR RECEIVING A COMPONENT 有权
    用于形成可以形成用于接收组件的站点的基板的厚度中的空隙的方法

    公开(公告)号:US20120031874A1

    公开(公告)日:2012-02-09

    申请号:US13264170

    申请日:2010-04-20

    CPC classification number: B81C1/00047 B81B2203/0315

    Abstract: A method for making a micro-device including at least one receiving site for components, formed in a thickness of a substrate. The method includes: a) making in at least one first substrate adhesively bonded to a second substrate via a discontinuous adhesive bonding interface, at least one first trench around at least one sacrificial block of the first substrate, by etching the first substrate so as to expose the adhesive bonding interface; and b) removing the sacrificial block so as to make at least one first cavity in the first substrate.

    Abstract translation: 一种制造微型器件的方法,所述微器件包括形成在衬底厚度中的用于部件的至少一个接收部位。 该方法包括:a)通过蚀刻第一基底,通过不连续的粘合界面,至少一个第一基底的至少一个牺牲块周围的至少一个第一沟槽,在至少一个第一基底上制造粘合的第二基底, 暴露粘合界面; 以及b)去除所述牺牲块,以便在所述第一基板中形成至少一个第一空腔。

    OPTICAL DEVICE WITH MEMBRANE THAT CAN BE DEFORMED BY ELECTROSTATIC ACTUATION
    3.
    发明申请
    OPTICAL DEVICE WITH MEMBRANE THAT CAN BE DEFORMED BY ELECTROSTATIC ACTUATION 有权
    具有膜可以通过静电激励而变形的光学器件

    公开(公告)号:US20100195213A1

    公开(公告)日:2010-08-05

    申请号:US12669323

    申请日:2008-07-17

    Inventor: Sebastien Bolis

    CPC classification number: G02B3/14 G02B26/004 G02B26/0825

    Abstract: An optical device with a deformable membrane including an anchoring area on a support helping to contain a constant volume of liquid in contact with one of its faces, a substantially central area, configured to be deformed reversibly from a rest position, and an actuation mechanism displacing the liquid in the central area stressing the membrane in at least one area situated strictly between the central area and the anchoring area. The actuation mechanism is electrostatic and includes at least one pair of opposing electrodes, one of the electrodes of the pair being at the level of the membrane, the other being at the level of the support, the electrodes being separated by dielectric, the dielectric being formed at least by the liquid.

    Abstract translation: 一种具有可变形膜的光学装置,其包括在支撑件上的锚定区域,其有助于容纳与其一个面接触的恒定体积的液体,构造成从静止位置可逆地变形的基本中心区域,以及致动机构 中心区域中的液体在严格位于中心区域和锚固区域之间的至少一个区域中对膜施加强力。 致动机构是静电的,并且包括至少一对相对电极,该对中的一个电极处于膜的高度,另一个位于支架的高度,电极被电介质隔开,电介质为 至少由液体形成。

    Method for making a cavity in the thickness of a substrate which may form a site for receiving a component
    6.
    发明授权
    Method for making a cavity in the thickness of a substrate which may form a site for receiving a component 有权
    用于制造可形成用于接收部件的部位的基板的厚度的空腔的方法

    公开(公告)号:US08470184B2

    公开(公告)日:2013-06-25

    申请号:US13264170

    申请日:2010-04-20

    CPC classification number: B81C1/00047 B81B2203/0315

    Abstract: A method for making a micro-device including at least one receiving site for components, formed in a thickness of a substrate. The method includes: a) making in at least one first substrate adhesively bonded to a second substrate via a discontinuous adhesive bonding interface, at least one first trench around at least one sacrificial block of the first substrate, by etching the first substrate so as to expose the adhesive bonding interface; and b) removing the sacrificial block so as to make at least one first cavity in the first substrate.

    Abstract translation: 一种制造微型器件的方法,所述微器件包括形成在衬底厚度中的用于部件的至少一个接收部位。 该方法包括:a)通过蚀刻第一基底,通过不连续的粘合界面,至少一个第一基底的至少一个牺牲块周围的至少一个第一沟槽,在至少一个第一基底上制造粘合的第二基底, 暴露粘合界面; 以及b)去除所述牺牲块,以便在所述第一基板中形成至少一个第一空腔。

    OPTICAL DEVICE WITH A PIEZOELECTRICALLY ACTUATED DEFORMABLE MEMBRANE SHAPED AS A CONTINUOUS CROWN
    7.
    发明申请
    OPTICAL DEVICE WITH A PIEZOELECTRICALLY ACTUATED DEFORMABLE MEMBRANE SHAPED AS A CONTINUOUS CROWN 有权
    具有压电致动的可变形膜的光学器件形成连续的形状

    公开(公告)号:US20120170920A1

    公开(公告)日:2012-07-05

    申请号:US13394641

    申请日:2010-09-14

    Abstract: An optical device with a deformable membrane (2) including an anchor area (2.3) on a support (1) entrapping a liquid or gas fluid, a central area (2.1) reversibly deformable from a rest position, actuating means for moving the fluid (4) biasing the membrane (2) into an intermediate area between the anchor area (2.3) and the central area (2.1), the actuating means include a piezoelectric continuous crown accommodating several actuators (5.1), this crown surrounding the central area (2.1), the actuating means (5) being anchored to the membrane (2) in at least the intermediate area (2.2), the actuating means (5) and the membrane (2) to which they are anchored, forming at least one piezoelectric bimorph (B), the actuating means (5) radially contracting or extending upon actuation so as to generate a movement of said fluid (4) from the intermediate area (2.2) to the central area (2.1) of the membrane (2) or vice versa, aiming at deforming the central area (2.1) with respect to its rest position.

    Abstract translation: 一种具有可变形膜(2)的光学装置,包括在包含液体或气体流体的支撑件(1)上的锚定区域(2.3),从静止位置可逆地变形的中心区域(2.1),用于移动流体的致动装置 4)将膜(2)偏置到锚定区域(2.3)和中心区域(2.1)之间的中间区域中,致动装置包括容纳多个致动器(5.1)的压电连续冠,围绕中心区域(2.1 ),所述致动装置(5)至少在中间区域(2.2),所述致动装置(5)和所述膜(2)中锚固到所述膜(2)上,所述致动装置(5)和所述膜(2)形成至少一个压电双压电晶片 (B)中,致动装置(5)在致动时径向收缩或延伸,以便产生所述流体(4)从中间区域(2.2)到膜(2)的中心区域(2.1)或副 反之亦然,旨在使中心区域(2.1)相对于其静止位置变形 。

    Optical device with means of actuating a compact deformable membrane
    8.
    发明授权
    Optical device with means of actuating a compact deformable membrane 有权
    具有致动紧凑型可变形膜的手段的光学装置

    公开(公告)号:US08072689B2

    公开(公告)日:2011-12-06

    申请号:US12669266

    申请日:2008-07-17

    Inventor: Sebastien Bolis

    CPC classification number: G02B3/14 G02B26/0825 G02B26/0858 G02B26/0866

    Abstract: An optical device with a deformable membrane including an anchoring area on a support helping to contain a constant volume of liquid in contact with one of its faces, a substantially central area, configured to be deformed reversibly from a rest position, and an actuation mechanism displacing the liquid in the central area, stressing the membrane in parts situated between the central area and the anchoring area. The actuation mechanism includes plural thermal or piezoelectric actuators of micro-beam type, distributed at the periphery of the membrane, the micro-beams including at least one fixed part joined to the support and at least one moving part coming into contact, on an actuation, with the membrane in an area situated between the central area and the anchoring area.

    Abstract translation: 一种具有可变形膜的光学装置,其包括在支撑件上的锚定区域,其有助于容纳与其一个面接触的恒定体积的液体,构造成从静止位置可逆地变形的基本中心区域,以及致动机构 在中心区域的液体,在位于中心区域和锚固区域之间的部分中压迫膜。 致动机构包括分布在隔膜周边的多个微波束型的热压电致动器或压电致动器,所述微型梁包括至少一个固定部分,所述至少一个固定部分接合到所述支撑件上以及至少一个移动部件接触, ,其中膜位于位于中心区域和锚定区域之间的区域中。

    MEMBRANE, ESPECIALLY FOR AN OPTICAL DEVICE HAVING A DEFORMABLE MEMBRANE
    9.
    发明申请
    MEMBRANE, ESPECIALLY FOR AN OPTICAL DEVICE HAVING A DEFORMABLE MEMBRANE 有权
    膜特别适用于具有可变膜的光学器件

    公开(公告)号:US20110032624A1

    公开(公告)日:2011-02-10

    申请号:US12937977

    申请日:2009-04-17

    Abstract: An optical device having a deformable membrane comprising a flexible film having at least one peripheral anchoring zone, a central zone and an intermediate zone between the central zone and the anchoring zone. The membrane also includes one or more movable parts of electrostatic actuating means, each movable part being formed from a leg terminating on one side in a foot mechanically fastened to a film-fastening region located in the intermediate zone and terminating on the other side in a free end. The legs incorporate a movable electrode, the free end having to be attracted by a fixed electrode of the actuating means. The free end is placed facing the free end so as to deform at least the central zone of the membrane.

    Abstract translation: 一种具有可变形膜的光学装置,其包括柔性膜,所述柔性膜具有至少一个外围锚固区,中心区和中心区与锚定区之间的中间区。 膜还包括静电致动装置的一个或多个可移动部分,每个可移动部分由一个脚部形成,该腿部以一个机械方式固定在位于中间区域中的胶片紧固区域并以一个 自由结束 腿部包括可动电极,自由端必须被致动装置的固定电极吸引。 自由端被放置成面向自由端,以至少使膜的中心区域变形。

    Method for preparing a cover for protecting a component on a substrate
    10.
    发明申请
    Method for preparing a cover for protecting a component on a substrate 有权
    制备用于保护基材上的组分的覆盖物的方法

    公开(公告)号:US20080180890A1

    公开(公告)日:2008-07-31

    申请号:US12011333

    申请日:2008-01-25

    Inventor: Sebastien Bolis

    Abstract: A method for preparing a cover on a substrate in particular for the encapsulation of electronic, optical, optoelectronic components, of the electromechanical microsystems type, also known as Micro-Electro-Mechanical Systems (MEMS) or optoelectromechanical microsystems, also known as Micro-Opto-Elect-Mechanical systems (MOEMS), joined to the substrate.

    Abstract translation: 用于在衬底上制备覆盖物的方法,特别是用于机电微系统类型的电子,光学,光电子部件的封装,也称为微机电系统(MEMS)或光电机械微系统,也称为微光电 - 机电系统(MOEMS),连接到基板。

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