公开(公告)号：US20160268098A1

公开(公告)日：2016-09-15

申请号：US14404442

申请日：2014-06-12

Applicant: AUROS TECHNOLOGY CO., LTD.

Inventor： JONG LIP CHOI ,  SANG MYEONG LEE ,  HO YOUNG HEO ,  YUN GI LEE ,  SEUNG CHUL OH

IPC: H01J37/28 ,  H01J37/141

CPC classification number: H01J37/28 ,  H01J37/141 ,  H01J37/263 ,  H01J37/265 ,  H01J2237/04922 ,  H01J2237/1405 ,  H01J2237/2809 ,  H01J2237/2817

Abstract: A scanning electron microscope capable of controlling the spot of an electron beam and a measurement method using the same. The scanning electron microscope includes electron magnets disposed in a path in which an electron beam irradiated to a sample moves from the electron beam source of the scanning electron microscope to a sample and configured to control and irradiate the spot of the electron beam in a linear electron beam having a different horizontal to vertical ratio. A control unit controls a ratio and direction of the spot of the electron beam by controlling a supply voltage of the electron magnets.

Abstract translation: 能够控制电子束点的扫描型电子显微镜及使用其的测定方法。 扫描电子显微镜包括设置在照射到样品的电子束从扫描电子显微镜的电子束源移动到样品的路径中的电子磁体，并且被配置为控制和照射电子束的点在线性电子 横梁具有不同的水平与垂直比。 控制单元通过控制电子磁体的电源电压来控制电子束点的比率和方向。