公开(公告)号：US20240191354A1

公开(公告)日：2024-06-13

申请号：US18078841

申请日：2022-12-09

Applicant: Applied Materials, Inc.

Inventor： Ying-Bing JIANG ,  Joung Joo LEE ,  Xianmin TANG ,  Jiang LU ,  Avgerinos V. GELATOS ,  Dien-yeh WU ,  Weifeng YE ,  Yiyang WAN ,  Gary HOW ,  Joseph HERNANDEZ

IPC: C23C16/455 ,  C23C16/42 ,  C23C16/505 ,  H01J37/32

CPC classification number: C23C16/45536 ,  C23C16/42 ,  C23C16/45553 ,  C23C16/45565 ,  C23C16/505 ,  H01J37/321 ,  H01J2237/3321

Abstract: Methods of depositing a metal silicide on a substrate are provided herein. In some embodiments, a method of depositing a metal silicide on a substrate having a silicon containing surface includes: creating a plasma comprising a first gas in a plasma region in a chemical vapor deposition (CVD) chamber, wherein the plasma region is disposed between a lid heater and a showerhead; flowing the first gas through a plurality of first openings of the showerhead to an activation region in the CVD chamber disposed between the showerhead and the substrate; flowing a second gas comprising a metal precursor in a non-plasma state through a plurality of second openings of the showerhead to the activation region, wherein the plurality of second openings are fluidly independent from the plurality of first openings within the showerhead; mixing the first gas with the second gas to activate the second gas in the activation region; and exposing the silicon containing surface of the substrate to the activated second gas.

公开(公告)号：US20240379768A1

公开(公告)日：2024-11-14

申请号：US18196833

申请日：2023-05-12

Applicant: Applied Materials, Inc.

Inventor： Shumao ZHANG ,  Le ZHANG ,  Weifeng YE ,  Chih-Hsun HSU ,  David T. OR ,  Gary HOW ,  Yiyang WAN ,  Liqi WU ,  Jiang LU

IPC: H01L29/40 ,  H01L21/02 ,  H01L21/768

Abstract: Embodiments of the disclosure include a method of forming contact structure on a semiconductor substrate. The method includes treating a native oxide layer formed on a contact junction, wherein treating the native oxide layer forms a silica salt layer on the contact junction disposed within a contact feature that includes one or more surfaces that comprise silicon nitride. Then exposing the silica salt layer and the one or more surfaces to a plasma comprising oxygen, wherein the plasma forms a silicon oxynitride material on the one or more surfaces. Then removing the second silica salt layer, selectively forming a metal silicide layer on the contact junction, and then filling the contact feature with a metal, wherein filling the feature comprises selectively depositing a metal layer over the selectively formed metal silicide layer.

公开(公告)号：US20250054767A1

公开(公告)日：2025-02-13

申请号：US18646055

申请日：2024-04-25

Applicant: Applied Materials, Inc.

Inventor： Qihao ZHU ,  Shumao ZHANG ,  Weifeng YE ,  Yiyang WAN ,  Gary HOW ,  Jianqiu GUO ,  Dong WANG ,  Shihchung CHEN ,  Liqi WU ,  Jiang LU

IPC: H01L21/285 ,  C23C16/02 ,  C23C16/04 ,  C23C16/14 ,  C23C16/42 ,  C23C16/455 ,  C23C16/50 ,  C23C16/52 ,  H01J37/32 ,  H01L21/02 ,  H01L21/768

Abstract: Embodiments include a method of forming a contact structure on a semiconductor substrate. The method including selectively depositing a metal silicide layer over a contact formed within a cavity of a substrate and a bottom surface of the cavity using a selective deposition process, including forming a residual layer on a surface of a dielectric layer forming sidewalls of the cavity, wherein a thickness of the metal silicide layer deposited over the contact is greater than a thickness of the residual layer, removing at least a portion of the residual layer formed on the dielectric layer using an etching process that comprises exposing the metal selectively deposited layer to a metal halide containing precursor, and selectively depositing a metal fill over the metal silicide layer remaining over the contact after removing the at least the portion of the residual layer using a selective metal fill process.

公开(公告)号：US20250054812A1

公开(公告)日：2025-02-13

申请号：US18400819

申请日：2023-12-29

Applicant: Applied Materials, Inc.

Inventor： Qihao ZHU ,  Shumao ZHANG ,  Weifeng YE ,  Yiyang WAN ,  Gary HOW ,  Jianqiu GUO ,  Dong WANG ,  Shihchung CHEN ,  Liqi WU ,  Jiang LU

IPC: H01L21/768 ,  H01L23/532 ,  H01L23/535

Abstract: Embodiments include a method of forming a contact structure on a semiconductor substrate. The method including selectively depositing a metal silicide layer over a contact formed within a cavity of a substrate and a bottom surface of the cavity using a selective deposition process, including forming a residual layer on a surface of a dielectric layer forming sidewalls of the cavity, wherein a thickness of the metal silicide layer deposited over the contact is greater than a thickness of the residual layer, removing at least a portion of the residual layer formed on the dielectric layer using an etching process that comprises exposing the metal selectively deposited layer to a metal halide containing precursor, and selectively depositing a metal fill over the metal silicide layer remaining over the contact after removing the at least the portion of the residual layer using a selective metal fill process.

公开(公告)号：US20230377892A1

公开(公告)日：2023-11-23

申请号：US17748329

申请日：2022-05-19

Applicant: Applied Materials, Inc.

Inventor： Yiyang WAN ,  Weifeng YE ,  Shumao ZHANG ,  Gary HOW ,  Jiang LU ,  Lei ZHOU ,  Dien-yeh WU ,  Douglas LONG ,  Avgerinos V. GELATOS ,  Ying-Bing JIANG ,  Rongjun WANG ,  Xianmin TANG ,  Halbert CHONG

IPC: H01L21/285 ,  H01J37/32 ,  C23C16/42 ,  C23C16/507

CPC classification number: H01L21/28518 ,  H01J37/32082 ,  H01J37/3244 ,  H01J37/32357 ,  C23C16/42 ,  C23C16/507 ,  H01J37/32816 ,  H01J2237/332

Abstract: Methods and apparatus for processing a substrate are provided herein. For example, a method for processing a substrate comprises forming a plasma reaction between titanium tetrachloride (TlCl4), hydrogen (H2), and argon (Ar) in a region between a lid heater and a showerhead of a process chamber or the showerhead and a substrate while providing RF power at a pulse frequency of about 5 kHz to about 100 kHz and at a duty cycle of about 10% to about 20% and flowing reaction products into the process chamber to selectively form a titanium material layer upon a silicon surface of the substrate.