公开(公告)号：US20240141487A1

公开(公告)日：2024-05-02

申请号：US17975195

申请日：2022-10-27

Applicant: Applied Materials, Inc.

Inventor： Zhepeng CONG ,  Ashur J. ATANOS ,  Khokan C. PAUL ,  Nimrod SMITH ,  Tao SHENG ,  Vinh TRAN

IPC: C23C16/455 ,  C23C16/458 ,  C30B25/12 ,  C30B25/14

CPC classification number: C23C16/45517 ,  C23C16/4583 ,  C30B25/12 ,  C30B25/14 ,  C23C16/4408

Abstract: Embodiments disclosed herein generally provide improved control of gas flow in processing chambers. In at least one embodiment, a disk and liner assembly includes a quartz disk having an outer diameter, a plurality of holes or slots formed in the quartz disk, and a quartz ring having an inner diameter less than the outer diameter of the quartz disk.