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    Method of manufacturing an ejection orifice member
    2.
    发明授权
    Method of manufacturing an ejection orifice member 有权
    喷射孔构件的制造方法

    公开(公告)号：US09227406B2

    公开(公告)日：2016-01-05

    申请号：US14453061

    申请日：2014-08-06

    Applicant: CANON KABUSHIKI KAISHA

    Inventor： Shinan Wang ,  Yasuto Kodera ,  Yasuyuki Tamura

    IPC: B41J2/16

    CPC classification number: B41J2/162 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1643 ,  B41J2/1646

    Abstract: A method of manufacturing an ejection orifice member includes: preparing a substrate including a first layer, a second layer, and a third layer, the first layer protruding in a first direction crossing a principal surface of the substrate, the second and third layers being formed on the first direction side of the first layer, the preparing a substrate including forming the second layer to follow a contour of a first direction side surface of the first layer, and then forming the third layer on a surface of the second layer which protrudes on the first direction side; performing plating using the second layer as a seed to form a fourth layer on the first direction side of the second layer; removing the third layer from the fourth layer to form a hole as the ejection orifice in the fourth layer; and thinning the fourth layer at least around the hole.

    Abstract translation: 一种喷射孔构件的制造方法，包括：准备包括第一层，第二层和第三层的基板，所述第一层沿与所述基板的主面交叉的第一方向突出，所述第二和第三层形成 在第一层的第一方向侧上，准备包括形成第二层的基板，以跟随第一层的第一方向侧表面的轮廓，然后在第二层上突出的第二层的表面上形成第三层 第一方向 使用第二层作为种子进行电镀以在第二层的第一方向侧上形成第四层; 从第四层移除第三层以在第四层中形成作为喷射孔的孔; 并且至少在孔周围使第四层变薄。

    Liquid ejection head and method of manufacturing the same
    3.
    发明授权
    Liquid ejection head and method of manufacturing the same 有权
    液体喷射头及其制造方法

    公开(公告)号：US08950850B2

    公开(公告)日：2015-02-10

    申请号：US13915919

    申请日：2013-06-12

    Applicant: Canon Kabushiki Kaisha

    Inventor： Shinan Wang

    IPC: B41J2/045 ,  H01L41/22 ,  B41J2/14 ,  B41J2/16

    CPC classification number: B41J2/14201 ,  B41J2/14209 ,  B41J2/1609 ,  B41J2/1621 ,  B41J2/1631 ,  B41J2/1634 ,  B41J2/1642 ,  B41J2/1646 ,  Y10T29/42

    Abstract: A liquid ejection head has a plurality of pressure chambers each communicating with an ejection port at one end and with an ink supply port at the other end. Each of the pressure chambers has lateral walls formed by piezoelectric elements and configured so as to eject ink from the corresponding ejection port as a result of a capacity change of the pressure chamber due to an expansion or contraction of the piezoelectric elements. The liquid ejection head is constituted by a plate-shaped piezoelectric portion and a plurality of column-shaped piezoelectric portions arranged thereon. The plate-shaped piezoelectric portion has a plurality of holes and a plurality of through holes located around the holes. Each of the column-shaped piezoelectric portions has a hollow section. Each hole of the plate-shaped piezoelectric portion and the hollow section of the corresponding column-shaped piezoelectric portion form a pressure chamber.

    Abstract translation: 液体喷射头具有多个压力室，每个压力室在一端与排出口连通，另一端与供墨口连通。 每个压力室具有由压电元件形成的侧壁，并且构造成由于压电元件的膨胀或收缩而导致压力室的容量变化而从相应的喷射口喷出墨。 液体喷射头由布置在其上的板状压电部分和多个柱状压电部件构成。 板状压电部具有多个孔和位于孔附近的多个通孔。 每个柱状压电部分都具有中空部分。 板状压电部的各孔和相应的柱状压电部的中空部形成压力室。

    PROCESS FOR PRODUCING LIQUID EJECTION HEAD
    4.
    发明申请
    PROCESS FOR PRODUCING LIQUID EJECTION HEAD 有权
    生产液体喷射头的方法

    公开(公告)号：US20130340219A1

    公开(公告)日：2013-12-26

    申请号：US13915901

    申请日：2013-06-12

    Applicant: Canon Kabushiki Kaisha

    Inventor： Shinan Wang ,  Toru Nakakubo ,  Hirotaka Sekiguchi

    IPC: B41J2/16

    CPC classification number: B41J2/164 ,  B41J2/1609 ,  B41J2/1623 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1634 ,  B41J2/1642 ,  B41J2/1646 ,  Y10T29/42 ,  Y10T29/49401

    Abstract: A process for producing a liquid ejection head having a piezoelectric body provided with an ejection orifice for ejecting liquid and a pressure chamber communicating therewith for retaining the liquid, wherein an electrode is formed on an inner wall surface of the pressure chamber to deform the pressure chamber by piezoelectric action caused by applying voltage to the electrode to eject the liquid, comprising providing the piezoelectric body in which a surface thereof having the ejection orifice has an arithmetic mean roughness of 0.1-1 μm, forming a dry film resist pattern on the surface of the piezoelectric body so as to expose the ejection orifice and a linear region connected thereto, and forming a metal thin film pattern being connected to the electrode on the inner wall surface and continuously extending from the inner wall surface to the linear region by using the dry film resist pattern as a mask.

    Abstract translation: 一种具有压电体的液体喷射头的制造方法，该压电体设置有用于喷射液体的喷射孔和与其连通以保持液体的压力室，其中在压力室的内壁表面上形成电极以使压力室变形 通过对电极施加电压而喷射液体而产生的压电作用，包括提供压电体，其中具有喷口的表面具有0.1-1μm的算术平均粗糙度，在表面上形成干膜抗蚀剂图案 所述压电体以暴露所述喷射孔和与其连接的线性区域，并且形成金属薄膜图案，所述金属薄膜图案通过使用所述干燥状态从所述内壁表面连续地延伸到所述内壁表面到所述线性区域 膜抗蚀剂图案作为掩模。

    METHOD FOR MANUFACTURING THROUGH WIRING SUBSTRATE AND METHOD FOR MANUFACTURING DEVICE
    7.
    发明申请
    METHOD FOR MANUFACTURING THROUGH WIRING SUBSTRATE AND METHOD FOR MANUFACTURING DEVICE 审中-公开

    公开(公告)号：US20170156209A1

    公开(公告)日：2017-06-01

    申请号：US15364001

    申请日：2016-11-29

    Applicant: CANON KABUSHIKI KAISHA

    Inventor： Shinan Wang ,  Yutaka Setomoto

    IPC: H05K1/11 ,  H05K3/40 ,  G01N29/24 ,  H05K3/00 ,  H05K3/22 ,  H05K3/26 ,  H05K3/30 ,  H05K1/18

    Abstract: The present invention offers a device requiring a reduced number of manufacturing processes and providing high electrical reliability, and a method for manufacturing the device. The method for manufacturing the device forms through holes in a substrate, fills the through holes with a conductive material through electroplating from a first surface side of the substrate, polishes the conductive material to form through wirings, and forms an element portion on the first surface side. Then, the method processes the substrate so that the positions of the end faces of the through wirings measured from the substrate surface on the first surface side are made smaller in depth than the positions of the end faces of the through wirings measured from the substrate surface on the second surface side.

    DEVICE WITH ELECTRODE CONNECTED TO THROUGH WIRE, AND METHOD FOR MANUFACTURING THE SAME
    8.
    发明申请
    DEVICE WITH ELECTRODE CONNECTED TO THROUGH WIRE, AND METHOD FOR MANUFACTURING THE SAME 审中-公开
    具有连接到电线的电极的装置及其制造方法

    公开(公告)号：US20160043660A1

    公开(公告)日：2016-02-11

    申请号：US14818153

    申请日：2015-08-04

    Applicant: CANON KABUSHIKI KAISHA

    Inventor： Shinan Wang ,  Yutaka Setomoto

    IPC: H02N1/00 ,  G01L1/14 ,  B81C1/00

    CPC classification number: H02N1/00 ,  B06B1/0292 ,  B81C1/00 ,  B81C1/00134 ,  B81C1/00373 ,  B81C1/00611 ,  G01L1/14 ,  H01L21/76849 ,  H01L21/76898 ,  H01L23/481 ,  H01L2924/0002 ,  H01L2924/00

    Abstract: A capacitive transducer includes a substrate having a first surface and a second surface opposite the first surface, the substrate including a through wire extending therethrough between the first surface and the second surface, and a cell on the first surface, the cell including a first electrode and a second electrode spaced apart from the first electrode with a gap between the first electrode and the second electrode. Conductive protective films are disposed over surfaces of the through wire on the first surface side and the second surface side of the substrate.

    Abstract translation: 电容换能器包括具有第一表面和与第一表面相对的第二表面的基底，所述基底包括在第一表面和第二表面之间延伸穿过其中的通孔，以及在第一表面上的电池，所述电池包括第一电极 以及与第一电极间隔开的第二电极，在第一电极和第二电极之间具有间隙。 导电保护膜设置在基板的第一表面侧和第二表面侧上的通孔表面上。

    CAPACITIVE TRANSDUCER AND METHOD OF MANUFACTURING THE SAME
    9.
    发明申请
    CAPACITIVE TRANSDUCER AND METHOD OF MANUFACTURING THE SAME 有权
    电容式传感器及其制造方法

    公开(公告)号：US20150183634A1

    公开(公告)日：2015-07-02

    申请号：US14562955

    申请日：2014-12-08

    Applicant: CANON KABUSHIKI KAISHA

    Inventor： Shinan Wang ,  Shinichiro Watanabe

    IPC: B81B3/00 ,  G01N29/24 ,  G01N29/44 ,  B06B1/02 ,  B81C1/00

    CPC classification number: G01N29/2418 ,  B06B1/0292 ,  B81B7/0006 ,  B81B2201/0271 ,  B81B2203/0127 ,  B81B2203/04 ,  B81B2207/07 ,  G01N29/0654 ,  G01N29/2406

    Abstract: The present inventions provide a capacitive transducer that can reduce film damage on a substrate surface on a vibration film side due to a difference in thermal expansion coefficient between a through wiring and a substrate and a method of manufacturing the same. The capacitive transducer consists of a plurality of cells with each cell comprising a first electrode and a vibration film on a first surface side of a substrate having a through wiring that penetrates the substrate from a first surface to a second surface of the substrate, the vibration film including a second electrode that is formed with a gap from the first electrode. A holding member that holds a leading end of the through wiring is provided on the first surface side of the substrate.

    Abstract translation: 本发明提供了一种电容式换能器及其制造方法，其可以减少振动膜侧的基板表面上的薄膜损伤，这是由于通孔布线和基板之间的热膨胀系数的差异引起的。 电容换能器由多个单元组成，每个单元包括第一电极和振动膜，该基板的第一表面侧上具有从基板的第一表面到第二表面穿透基板的通孔，振动 膜包括形成有与第一电极间隙的第二电极。 在基板的第一表面侧设置保持贯通配线前端的保持部件。

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