公开(公告)号：US08916394B2

公开(公告)日：2014-12-23

申请号：US13919842

申请日：2013-06-17

Applicant: California Institute of Technology

Inventor： Risaku Toda ,  Michael J. Bronikowski ,  Edward M. Luong ,  Harish Manohara

IPC: H01L21/302 ,  H01J3/02 ,  H01J1/304 ,  B82Y10/00 ,  B82Y20/00 ,  H01J9/02 ,  B82Y40/00

CPC classification number: H01L21/302 ,  B82Y10/00 ,  B82Y20/00 ,  B82Y40/00 ,  H01J1/3042 ,  H01J1/3044 ,  H01J3/021 ,  H01J3/022 ,  H01J9/025 ,  H01J2203/0224 ,  Y10S977/842 ,  Y10S977/939

Abstract: A carbon nanotube field emission device with overhanging gate fabricated by a double silicon-on-insulator process. Other embodiments are described and claimed.

Abstract translation: 具有通过双硅绝缘体工艺制造的具有悬垂栅极的碳纳米管场发射器件。 描述和要求保护其他实施例。