公开(公告)号：US20100187433A1

公开(公告)日：2010-07-29

申请号：US12523984

申请日：2008-01-24

Applicant: Derek Anthony Eastham

Inventor： Derek Anthony Eastham

IPC: H01J37/10 ,  H01J3/14

CPC classification number: H01J37/073 ,  B82Y15/00 ,  H01J37/065 ,  H01J37/12 ,  H01J37/28 ,  H01J2237/03 ,  H01J2237/0492 ,  H01J2237/062 ,  H01J2237/06341 ,  H01J2237/1205 ,  H01J2237/1207

Abstract: A particle beam generator comprising particle extraction means disposed adjacent a particle source and operable to extract particles from such a source into an extraction aperture of the extraction means to form a particle beam, particle accelerating means operable to accelerate the extracted particles to increase the energy of the beam, and focussing means operable to focus the particle beam, each of said extraction means, accelerating means and focussing means being arranged in sequence and having apertures therethrough and in alignment to define a passageway through which the particles are constrained to move, characterised in that the extraction means comprises a lens structure comprising at least a pair of electrodes separated by a layer of insulating material allowing the application of different potentials to each of the lens structure electrodes, one of said electrodes comprising an extraction plate having an extraction aperture formed therein, by means of which extraction plate particles may be drawn from the particle source and through the extraction aperture by means of a potential difference between the source and said extraction plate.

Abstract translation: 一种粒子束发生器，其包括与颗粒源相邻设置的颗粒提取装置，可操作以将颗粒从这种源提取到提取装置的提取孔中以形成粒子束，粒子加速装置可操作以加速提取的颗粒以增加能量 所述光束和聚焦装置可操作以聚焦所述粒子束，所述提取装置，加速装置和聚焦装置中的每一个按顺序布置并且具有贯穿其中的孔并且对齐以限定所述颗粒被约束以移动的通道，其特征在于 所述提取装置包括透镜结构，所述透镜结构包括至少一对电极，所述至少一对电极由绝缘材料层隔开，允许对每个所述透镜结构电极施加不同的电位，所述电极中的一个包括在其中形成有提取孔的提取板 ，通过其提取平台 e颗粒可以通过源和所述提取板之间的电位差从颗粒源和抽出孔中抽出。

公开(公告)号：US20090206271A1

公开(公告)日：2009-08-20

申请号：US11719181

申请日：2005-11-17

Applicant: Derek Anthony Eastham

Inventor： Derek Anthony Eastham

IPC: H01J3/14

CPC classification number: B82Y10/00 ,  B82Y40/00 ,  H01J37/3177 ,  H01J2237/20228 ,  H01J2237/3175 ,  H01J2237/31788

Abstract: A mask suitable for use with a particle beam source such as ion or electron source for forming features and structures and writing on surfaces of materials. The mask comprising an aperture plate, having a plurality of apertures, and focusing means disposed to underlie the aperture plate. The plurality of apertures forming an array whereby each plate aperture is adapted to receive a portion of a particle beam incident on the aperture plate. Each portion of particle beam then passes through focusing means through which the portion of beam is focused onto the surface. The mask thereby forming a plurality of high resolution simultaneously operable focused particle beams.

Abstract translation: 适合与粒子束源（例如离子或电子源）一起使用以形成特征和结构并在材料表面上书写的掩模。 所述掩模包括具有多个孔的孔板，以及设置在所述孔板下面的聚焦装置。 所述多个孔形成阵列，由此每个板孔适于接收入射在孔板上的一部分粒子束。 粒子束的每个部分然后通过聚焦装置，通过该聚焦装置将光束的该部分聚焦在该表面上。 该掩模由此形成多个高分辨率的可同时操作的聚焦粒子束。

公开(公告)号：US4032810A

公开(公告)日：1977-06-28

申请号：US610763

申请日：1975-09-05

Applicant: Derek Anthony Eastham ,  Thomas Joy

Inventor： Derek Anthony Eastham ,  Thomas Joy

IPC: H05H5/02 ,  H05H5/00

CPC classification number: H05H5/02

Abstract: An accelerating tube for an electrostatic particle accelerator is composed of a plurality of rings of insulating material interleaved with annular metal discs. The discs are interconnected externally of the tube by resistor bridges in a manner to provide a decoupled zone somewhere along the potential gradient and within this zone particle trapping electrodes are placed to take out low energy particles near the periphery of the main beam with reduced secondary particle generation.