公开(公告)号：US20160049285A1

公开(公告)日：2016-02-18

申请号：US14781618

申请日：2014-04-04

Applicant: FASMATECH SCIENCE AND TECHNOLOGY SA

Inventor： DIMITRIS PAPANASTASIOU ,  EMMANUEL RAPTAKIS ,  DIAMANTIS KOUNADIS ,  ALEXANDER LEKKAS ,  IOANNIS ORFANOPOULOS

IPC: H01J49/16 ,  H01J49/04

CPC classification number: H01J49/167 ,  H01J49/0404 ,  H01J49/045 ,  H01J49/0495 ,  H01J49/162

Abstract: Techniques are provided for generating charged droplets of liquid entrained within a gas flow within a vacuum chamber and for controlling the gas flow. The gas flow with the entrained charged droplets of liquid is jetted into the vacuum chamber along a predetermined jetting axis. The gas jet is received within a gas conduit housed within the vacuum chamber and having a conduit bore coaxial with the predetermined jetting axis. The received gas jet is caused to be restrained to form a laminar gas flow entrained with charged droplets inside of the gas conduit for guiding the entrained charged droplets therealong.

Abstract translation: 提供了技术来产生夹带在真空室内的气流中的带电液滴并用于控制气流。 具有夹带的液体的带电液滴的气流沿着预定的喷射轴线被喷射到真空室中。 气体射流被容纳在容纳在真空室内的气体管道中，并且具有与预定喷射轴线同轴的导管孔。 引起接收的气体射流被限制以形成夹带在气体导管内部的带电荷的液滴的层流气流，用于在其上引导夹带的带电液滴。