公开(公告)号：US20250069845A1

公开(公告)日：2025-02-27

申请号：US18456246

申请日：2023-08-25

Applicant: c/o FEI Company

Inventor： Neel Leslie ,  James Vickers

IPC: H01J37/244 ,  H01J37/04 ,  H01J37/22 ,  H01J37/26 ,  H01J37/28

Abstract: Systems, components, methods, and algorithms for generating difference data are described. A computer-implemented method includes directing a first pulse of charged particles toward a sample. The method can include generating first detector data based at least in part on interactions between the charged particles of the first pulse and the sample. The method can include directing a second pulse of charged particles toward the sample. The method can include generating second detector data based at least in part on interactions between the charged particles of the second pulse and the sample. The method can also include generating difference data using the first detector data and the second detector data, wherein the difference data describe a change between an “on” state of the sample and an “off” state of the sample.

公开(公告)号：US20250069842A1

公开(公告)日：2025-02-27

申请号：US18456263

申请日：2023-08-25

Applicant: FEI Company

Inventor： Neel Leslie ,  James Vickers

IPC: H01J37/22 ,  G01R31/26 ,  H01J37/04

Abstract: Systems, components, computer-implemented methods, and algorithms for generating waveform data are described. A method for generating waveform data can include directing a pulsed beam of charged particles toward a sample. The sample can include a conductive feature to which a transient electrical signal is applied. The pulsed beam of charged particles can be characterized by a pulse period measured in units of time. The method can include generating detector data over a period of time corresponding to a multiple of the pulse period. The detector data can be generated based at least in part on interactions between the charged particles and the sample. The method can also include generating waveform data describing the transient electrical signal using the detector data.

公开(公告)号：US11605525B2

公开(公告)日：2023-03-14

申请号：US17117696

申请日：2020-12-10

Applicant: FEI Company

Inventor： James Vickers ,  Seema Somani ,  Cecelia Campochiaro ,  Yakov Bobrov

IPC: H01J37/302 ,  H01J37/304 ,  H01J37/305 ,  G01N23/2257 ,  H01J37/26 ,  G01R31/265 ,  G01R31/27 ,  G01R31/28 ,  G01R31/26 ,  H01J37/22 ,  H01J49/14

Abstract: Described herein are a system and method of preparing integrated circuits (ICs) so that the ICs remain electrically active and can have their active circuitry probed for diagnostic and characterization purposes using charged particle beams. The system employs an infrared camera capable of looking through the silicon substrate of the ICs to image electrical circuits therein, a focused ion beam system that can both image the IC and selectively remove substrate material from the IC, a scanning electron microscope that can both image structures on the IC and measure voltage contrast signals from active circuits on the IC, and a means of extracting heat generated by the active IC. The method uses the system to identify the region of the IC to be probed, and to selectively remove all substrate material over the region to be probed using ion bombardment, and further identifies endpoint detection means of milling to the required depth so as to observe electrical states and waveforms on the active IC.