公开(公告)号：US20210296081A1

公开(公告)日：2021-09-23

申请号：US17056285

申请日：2018-05-22

Applicant: Hitachi High-Tech Corporation

Inventor： Yuta IMAI ,  Masahiro SASAJIMA ,  Yoshihiro TAKAHOKO

IPC: H01J37/145 ,  H01J37/244 ,  H01J37/20 ,  H01J37/28 ,  H01J37/26

Abstract: In a charged particle beam device including a deceleration optical system, a change in a deceleration electric field and an axis shift due to a structure between an objective lens and a sample are prevented to reduce adverse effects on an irradiation system and detection system. The charged particle beam device includes an electron source, an objective lens configured to focus a probe electron beam from the electron source on the sample, an acceleration electrode configured to accelerate the probe electron beam, a first detector provided in the acceleration electrode, a deceleration electrode configured to form a deceleration electric field for the probe electron beam with the acceleration electrode, the probe electron beam being configured to pass through an opening of the deceleration electrode, and a second detector inserted between the deceleration electrode and the sample. The second detector includes an opening portion larger than the opening of the deceleration electrode, and a sensing surface is provided around the opening portion.

公开(公告)号：US20230377829A1

公开(公告)日：2023-11-23

申请号：US18363284

申请日：2023-08-01

Applicant: Hitachi High-Tech Corporation

Inventor： Yuta IMAI ,  Masahiro SASAJIMA ,  Yoshihiro TAKAHOKO

IPC: H01J37/145 ,  H01J37/15 ,  H01J37/21

CPC classification number: H01J37/145 ,  H01J37/15 ,  H01J37/21 ,  H01J37/12

Abstract: A charged particle beam device is provided in which axis adjustment as a superimposing lens is facilitated by aligning an axis of an electrostatic lens resulting from a deceleration electric field with an axis of a magnetic field lens. The charged particle beam device includes: an electron source; an objective lens that focuses a probe electron beam from the electron source on a sample; a first beam tube and a second beam tube through each of which the probe electron beam passes; a deceleration electrode arranged between the first beam tube and a sample; a first voltage source that forms a deceleration electric field for the probe electron beam between the first beam tube and the deceleration electrode by applying a first potential to the first beam tube; and a first moving mechanism that moves a position of the first beam tube.

公开(公告)号：US20210151279A1

公开(公告)日：2021-05-20

申请号：US17056993

申请日：2018-05-22

Applicant: Hitachi High-Tech Corporation

Inventor： Yuta IMAI ,  Masahiro SASAJIMA ,  Yoshihiro TAKAHOKO

IPC: H01J37/145 ,  H01J37/21 ,  H01J37/15

Abstract: A charged particle beam device is provided in which axis adjustment as a superimposing lens is facilitated by aligning an axis of an electrostatic lens resulting from a deceleration electric field with an axis of a magnetic field lens. The charged particle beam device includes: an electron source; an objective lens that focuses a probe electron beam from the electron source on a sample; a first beam tube and a second beam tube through each of which the probe electron beam passes; a deceleration electrode arranged between the first beam tube and a sample; a first voltage source that forms a deceleration electric field for the probe electron beam between the first beam tube and the deceleration electrode by applying a first potential to the first beam tube; and a first moving mechanism that moves a position of the first beam tube.