公开(公告)号：US20200312615A1

公开(公告)日：2020-10-01

申请号：US16900176

申请日：2020-06-12

Applicant: Hitachi High-Tech Corporation

Inventor： Toshiyuki YOKOSUKA ,  Chahn LEE ,  Hideyuki KAZUMI ,  Hajime KAWANO ,  Shahedul HOQUE ,  Kumiko SHIMIZU ,  Hiroyuki TAKAHASHI

IPC: H01J37/28 ,  H01J37/147 ,  H01J37/20 ,  H01J37/22

Abstract: The scanning charged particle beam microscope according to the present application is characterized in that, in acquiring an image of the FOV (field of view), interspaced beam irradiation points are set, and then, a deflector is controlled so that a charged particle beam scan is performed faster when the charged particle beam irradiates a position on the sample between each of the irradiation points than when the charged particle beam irradiates a position on the sample corresponding to each of the irradiation points (a position on the sample corresponding to each pixel detecting a signal). This allows the effects from a micro-domain electrification occurring within the FOV to be mitigated or controlled.

公开(公告)号：US20230030651A1

公开(公告)日：2023-02-02

申请号：US17962915

申请日：2022-10-10

Applicant: HITACHI HIGH-TECH CORPORATION

Inventor： Yoshifumi SEKIGUCHI ,  Shin IMAMURA ,  Shunsuke MIZUTANI ,  Shahedul HOQUE ,  Uki IKEDA

IPC: H01J37/244 ,  G01N23/2251 ,  G02B6/42

Abstract: A charged particle beam apparatus using a light guide that improves light utilization efficiency includes a detector including a scintillator for emitting light when a charged particle is incident, a light receiving element, and a light guide for guiding the light from the scintillator to the light receiving element. The light guide includes: an incident surface that faces a light emitting surface of the scintillator and to which the light emitted by the scintillator is incident; an emitting surface that is configured to emit light; and a reflecting surface that is inclined with respect to the incident surface so that the light from the incident surface is reflected toward the emitting surface. The emitting surface is smaller than the incident surface. A slope surface is provided between the incident surface and the emitting surface, faces the reflecting surface, and is inclined with respect to the incident surface.

公开(公告)号：US20220122804A1

公开(公告)日：2022-04-21

申请号：US17563186

申请日：2021-12-28

Applicant: Hitachi High-Tech Corporation

Inventor： Toshiyuki YOKOSUKA ,  Chahn LEE ,  Hideyuki KAZUMI ,  Hajime KAWANO ,  Shahedul HOQUE ,  Kumiko SHIMIZU ,  Hiroyuki TAKAHASHI

IPC: H01J37/28 ,  H01J37/147 ,  H01J37/20 ,  H01J37/22

Abstract: The scanning charged particle beam microscope according to the present application is characterized in that, in acquiring an image of the FOV (field of view), interspaced beam irradiation points are set, and then, a deflector is controlled so that a charged particle beam scan is performed faster when the charged particle beam irradiates a position on the sample between each of the irradiation points than when the charged particle beam irradiates a position on the sample corresponding to each of the irradiation points (a position on the sample corresponding to each pixel detecting a signal). This allows the effects from a micro-domain electrification occurring within the FOV to be mitigated or controlled.

公开(公告)号：US20210183614A1

公开(公告)日：2021-06-17

申请号：US17269424

申请日：2018-09-21

Applicant: HITACHI HIGH-TECH CORPORATION

Inventor： Yoshifumi SEKIGUCHI ,  Shin IMAMURA ,  Shunsuke MIZUTANI ,  Shahedul HOQUE ,  Uki IKEDA

IPC: H01J37/244 ,  G02B6/42 ,  G01N23/2251

Abstract: A charged particle beam apparatus using a light guide that improves light utilization efficiency includes a detector including a scintillator for emitting light when a charged particle is incident, a light receiving element, and a light guide for guiding the light from the scintillator to the light receiving element. The light guide includes: an incident surface that faces a light emitting surface of the scintillator and to which the light emitted by the scintillator is incident; an emitting surface that is configured to emit light; and a reflecting surface that is inclined with respect to the incident surface so that the light from the incident surface is reflected toward the emitting surface. The emitting surface is smaller than the incident surface. A slope surface is provided between the incident surface and the emitting surface, faces the reflecting surface, and is inclined with respect to the incident surface.

公开(公告)号：US20210375583A1

公开(公告)日：2021-12-02

申请号：US17394925

申请日：2021-08-05

Applicant: Hitachi High-Tech Corporation

Inventor： Shunsuke MIZUTANI ,  Shahedul HOQUE ,  Uki IKEDA ,  Makoto SUZUKI

IPC: H01J37/28 ,  H01J37/147 ,  H01J37/244

Abstract: A charged particle beam apparatus covering a wide range of detection angles of charged particles emitted from a sample includes an objective lens for converging charged particle beams emitted from a charged particle source and a detector for detecting charged particles emitted from a sample. The objective lens includes inner and outer magnetic paths which are formed so as to enclose a coil. A first inner magnetic path is disposed at a position opposite to an optical axis of the charged particle beams. A second inner magnetic path, formed at a slant with respect to the optical axis of the charged particle beams, includes a leading end. A detection surface of the detector is disposed at the outer side from a virtual straight line that passes through the leading end and that is parallel to the optical axis of the charged particle beams.