Micro-structured atomic source system
    3.
    发明授权
    Micro-structured atomic source system 有权
    微结构原子源系统

    公开(公告)号:US09585237B2

    公开(公告)日:2017-02-28

    申请号:US14682810

    申请日:2015-04-09

    Abstract: A micro-structured atomic source system is described herein. One system includes a silicon substrate, a dielectric diaphragm, wherein the dielectric diaphragm includes a heater configured to heat an atomic source substance, an intermediary material comprising a chamber configured to receive the atomic source substance, and a guide material configured to direct a flux of atoms from the atomic source substance.

    Abstract translation: 本文描述了微结构的原子源系统。 一个系统包括硅衬底,介质隔膜,其中介质隔膜包括构造成加热原子源物质的加热器,包括被配置为接纳原子源物质的室的中间材料,以及引导材料, 原子来源物质的原子。

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