公开(公告)号：US09099273B2

公开(公告)日：2015-08-04

申请号：US14345439

申请日：2012-10-05

Applicant: LIGHTLAB SWEDEN AB

Inventor： Qiu-Hong Hu ,  Shang-Ray Yang ,  Kjell Bohlin

IPC: H01L21/00 ,  H01J1/304 ,  H01J9/02 ,  H01J63/04 ,  C30B7/10 ,  H01J1/36 ,  H01J63/02 ,  C30B29/16

CPC classification number: H01J1/304 ,  C30B7/10 ,  C30B29/16 ,  H01J1/3044 ,  H01J1/36 ,  H01J9/025 ,  H01J63/02 ,  H01J63/04 ,  H01J2201/30496

Abstract: The present invention relates to a method for manufacturing a plurality of nanostructures comprising the steps of providing a plurality of protruding base structures (104) arranged on a surface of a first substrate (102), providing a seed layer mixture, comprising a solvent/dispersant and a seed material, in contact with the protruding base structures, providing a second substrate arranged in parallel with the first substrate adjacent to the protruding base structures, thereby enclosing a majority of the seed layer mixture between the first and second substrates, evaporating the solvent, thereby forming a seed layer (110) comprising the seed material on the protruding base structures, removing the second substrate, providing a growth mixture, comprising a growth agent, in contact with the seed layer, and controlling the temperature of the growth mixture so that nanostructures (114) are formed on the seed layer via chemical reaction in presence of the growth agent.

Abstract translation: 本发明涉及一种用于制造多个纳米结构的方法，包括以下步骤：提供布置在第一基底（102）的表面上的多个突出的基底结构（104），提供种子层混合物，其包含溶剂/分散剂 以及与所述突出的基部结构接触的种子材料，提供与所述第一基板平行布置的与所述突出的基部结构相邻的第二基板，从而在所述第一和第二基板之间封闭所述种子层混合物的大部分，蒸发所述溶剂 ，从而在突出的基部结构上形成包含种子材料的种子层（110），去除第二基底，提供包含与种子层接触的生长剂并且控制生长混合物的温度的生长混合物 纳米结构（114）通过生长剂存在下的化学反应在种子层上形成。

公开(公告)号：US20140346976A1

公开(公告)日：2014-11-27

申请号：US14345439

申请日：2012-10-05

Applicant: LIGHTLAB SWEDEN AB

Inventor： Qiu-Hong Hu ,  Shang-Ray Yang ,  Kjell Bohlin

IPC: H01J1/304 ,  H01J1/36 ,  H01J63/02 ,  C30B7/10

CPC classification number: H01J1/304 ,  C30B7/10 ,  C30B29/16 ,  H01J1/3044 ,  H01J1/36 ,  H01J9/025 ,  H01J63/02 ,  H01J63/04 ,  H01J2201/30496

Abstract: The present invention relates to a method for manufacturing a plurality of nanostructures comprising the steps of providing a plurality of protruding base structures (104) arranged on a surface of a first substrate (102), providing a seed layer mixture, comprising a solvent/dispersant and a seed material, in contact with the protruding base structures, providing a second substrate arranged in parallel with the first substrate adjacent to the protruding base structures, thereby enclosing a majority of the seed layer mixture between the first and second substrates, evaporating the solvent, thereby forming a seed layer (110) comprising the seed material on the protruding base structures, removing the second substrate, providing a growth mixture, comprising a growth agent, in contact with the seed layer, and controlling the temperature of the growth mixture so that nanostructures (114) are formed on the seed layer via chemical reaction in presence of the growth agent.

Abstract translation: 本发明涉及一种用于制造多个纳米结构的方法，包括以下步骤：提供布置在第一基底（102）的表面上的多个突出的基底结构（104），提供种子层混合物，其包含溶剂/分散剂 以及与所述突出的基部结构接触的种子材料，提供与所述第一基板平行布置的与所述突出的基部结构相邻的第二基板，从而在所述第一和第二基板之间封闭所述种子层混合物的大部分，蒸发所述溶剂 ，从而在突出的基部结构上形成包含种子材料的种子层（110），去除第二基底，提供包含与种子层接触的生长剂并且控制生长混合物的温度的生长混合物 纳米结构（114）通过生长剂存在下的化学反应在种子层上形成。