公开(公告)号：US11756770B2

公开(公告)日：2023-09-12

申请号：US16333827

申请日：2017-09-08

Applicant: LUXEMBOURG INSTITUTE OF SCIENCE AND TECHNOLOGY (LIST)

Inventor： Simon Bulou ,  Patrick Choquet ,  Thomas Gaulain ,  Mathieu Gerard

IPC: H01J37/32 ,  C23C16/54 ,  C23C16/452 ,  C23C16/503 ,  H05H1/24

CPC classification number: H01J37/32348 ,  C23C16/452 ,  C23C16/503 ,  C23C16/545 ,  H01J37/3277 ,  H01J37/32357 ,  H01J37/32568 ,  H05H1/2443

Abstract: A post-discharge plasma coating device for a wired substrate comprising an inner tubular electrode on an inner tubular wall for receiving the substrate and a precursor moving axially in a working direction; an outer tubular electrode coaxial with, and surrounding, the inner tubular electrode. The inner and outer electrodes are configured to be supplied with an electrical power source for producing a plasma when a plasma gas is supplied between the electrodes and is thereby excited, the plasma excited gas flowing axially in the working direction and reacting with the precursor in a coating area at the end of the inner tubular wall in the direction. The inner tubular wall extends axially towards the coating area at least until, in various instances beyond, the end of the outer electrode, in the working direction and at least one dielectric tubular wall extends axially between the inner tubular electrode and the outer tubular electrode.

公开(公告)号：US20190259577A1

公开(公告)日：2019-08-22

申请号：US16333827

申请日：2017-09-08

Applicant: LUXEMBOURG INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Simon Bulou ,  Patrick Choquet ,  Thomas Gaulain ,  Mathieu Gerard

IPC: H01J37/32 ,  C23C16/452 ,  C23C16/503 ,  C23C16/54 ,  H05H1/24

Abstract: A post-discharge plasma coating device for a wired substrate comprising an inner tubular electrode on an inner tubular wall for receiving the substrate and a precursor moving axially in a working direction; an outer tubular electrode coaxial with, and surrounding, the inner tubular electrode. The inner and outer electrodes are configured to be supplied with an electrical power source for producing a plasma when a plasma gas is supplied between the electrodes and is thereby excited, the plasma excited gas flowing axially in the working direction and reacting with the precursor in a coating area at the end of the inner tubular wall in the direction. The inner tubular wall extends axially towards the coating area at least until, in various instances beyond, the end of the outer electrode, in the working direction and at least one dielectric tubular wall extends axially between the inner tubular electrode and the outer tubular electrode.