公开(公告)号：US10345154B2

公开(公告)日：2019-07-09

申请号：US15997836

申请日：2018-06-05

Applicant: Melexis Technologies NV

Inventor： Carl Van Buggenhout ,  Ben Maes ,  Karel Vanroye ,  Stijn Reekmans

IPC: G01J5/06 ,  G01J5/10 ,  G01J5/04 ,  G01J5/00

Abstract: An infrared sensor assembly for sensing infrared radiation comprises infrared sensing elements and the infrared sensing compensation elements that are different so that, for a same flux on the infrared sensing elements and the infrared sensing compensation elements, the radiation responsive element of the infrared sensing elements absorbs more radiation than the radiation responsive element of the infrared sensing compensation elements, as to receive substantially more radiation than the radiation responsive element of the infrared sensing compensation elements. An output of the sensor array is a subtractive function of a sum of the signals of the plurality of infrared sensing elements and a sum of the signals of the plurality of the infrared sensing compensation elements such that at least linear and/or non-linear parasitic thermal fluxes are at least partly compensated for.

公开(公告)号：US11680856B2

公开(公告)日：2023-06-20

申请号：US17518746

申请日：2021-11-04

Applicant: Melexis Technologies NV

Inventor： Johan Vergauwen ,  Ben Maes ,  Maliheh Ramezani ,  Appolonius Jacobus Van Der Wiel

IPC: G01L1/22

CPC classification number: G01L1/2268 ,  G01L1/2293

Abstract: A controller configured for detecting a disturbance using a comparison of outputs of at least two sensors and for determining a pressure from the outputs of the at least two sensors. A ratio of the measurement sensitivity and the disturbance sensitivity should be different for the at least two sensors. A method for monitoring disturbances of a sensor assembly includes comparing the outputs of the at least two sensors. The controller and related method provide, while requiring only two sensors, a redundant system that is also able to detect excessive disturbances on a sensor assembly.

公开(公告)号：US09989405B2

公开(公告)日：2018-06-05

申请号：US15211123

申请日：2016-07-15

Applicant: Melexis Technologies NV

Inventor： Carl Van Buggenhout ,  Ben Maes ,  Karel Vanroye ,  Stijn Reekmans

IPC: G01J5/02 ,  G01J1/02 ,  G01J5/06 ,  G01J5/12 ,  G01J1/42

CPC classification number: G01J1/0252 ,  G01J1/4228 ,  G01J5/06 ,  G01J5/12 ,  G01J2005/066 ,  G01J2005/068

Abstract: An infrared sensor assembly for sensing infrared radiation from an object is disclosed. The infrared sensor assembly comprises a sensor array comprising a plurality of sensing elements, provided on or embedded in a substrate extending in a substrate plane. The sensor array comprises at least two infrared sensing elements, each infrared sensing element having a radiation responsive element providing a proportionate electrical signal in response to infrared radiation incident thereto and at least two blind sensing elements, at least one blind sensing element being interspersed among the at least two sensing elements, each blind sensing element being shielded from incident infrared radiation from the object and providing a proportionate electrical signal in response to parasitic thermal fluxes. The output of the sensor array is a function of the infrared sensing elements and of the blind sensing elements such that parasitic thermal fluxes are at least partly compensated for.

公开(公告)号：US09909924B2

公开(公告)日：2018-03-06

申请号：US15107065

申请日：2014-12-13

Applicant: MELEXIS TECHNOLOGIES NV

Inventor： Ben Maes ,  Carl Van Buggenhout ,  Appolonius Jacobus Van Der Wiel

IPC: G01J5/12 ,  G01J5/02 ,  G01J5/16 ,  G01J5/14

CPC classification number: G01J5/023 ,  G01J5/0225 ,  G01J5/12 ,  G01J5/14 ,  G01J5/16 ,  G01J2005/123

Abstract: An infrared thermal sensor for sensing infrared radiation is disclosed. The infrared thermal sensor comprises a substrate and a cap structure together forming a sealed cavity, a membrane arranged in said cavity for receiving infrared radiation (IR) through a window or aperture and a plurality of beams for suspending the membrane. At least one beam has a thermocouple arranged therein or thereon for measuring a temperature difference (ΔT) between the membrane and the substrate, the plurality of beams. Furthermore at least one beam is mechanically supporting the membrane without a thermocouple being present therein or thereon.

公开(公告)号：US09184330B2

公开(公告)日：2015-11-10

申请号：US14578701

申请日：2014-12-22

Applicant: MELEXIS TECHNOLOGIES NV

Inventor： Ben Maes ,  Carl Van Buggenhout ,  Appolonius Jacobus Van Der Wiel

IPC: H01L31/09 ,  H01L33/34 ,  G01J5/02 ,  G01J5/12 ,  H01L27/146 ,  G01J5/20 ,  H01L31/18

CPC classification number: H01L31/09 ,  G01J5/02 ,  G01J5/024 ,  G01J5/12 ,  G01J5/20 ,  H01L27/14669 ,  H01L27/14683 ,  H01L31/18

Abstract: The invention relates to an infrared thermal sensor comprising a substrate having a cavity, a cavity bottom wall formed by a continuous substrate surface. The sensor comprises a membrane adapted for receiving heat from incident infrared radiation, a beam suspending the membrane, and a thermocouple. This membrane comprises openings extending through the membrane for facilitating the passage of an anisotropic etchant for etching the cavity during manufacture. Each opening has a cross-section with a length to width ratio of at least 4. The width direction of respectively a first and a second set of openings is oriented according to respectively a first crystallographic orientation and a second crystallographic orientation, these orientations corresponding to different directions lying in loosely packed crystal lattice faces of the semiconductor substrate.

Abstract translation: 本发明涉及一种红外热传感器，其包括具有空腔的基板，由连续基板表面形成的空腔底壁。 传感器包括适于从入射的红外辐射接收热量的膜，悬挂膜的光束和热电偶。 该膜包括延伸穿过膜的开口，以便在制造期间便于各向异性蚀刻剂通过蚀刻腔。 每个开口具有长宽比至少为4的横截面。分别第一组和第二组开口的宽度方向分别根据第一结晶取向和第二结晶取向取向，这些取向对应于 不同的方向位于半导体衬底的松散堆积的晶格面上。