公开(公告)号：US12265057B2

公开(公告)日：2025-04-01

申请号：US18621600

申请日：2024-03-29

Applicant: MKS Instruments, Inc.

Inventor： Chenglong Yang ,  Jimmy Liu ,  James Edward Blessing

IPC: G01N27/623 ,  H01J49/28

Abstract: A monitoring system detects and measures a quantity of radical particles within a gas. A test chamber is coupled to a flow channel that transmits a gas. The test chamber defines an aperture connecting the test chamber and the flow channel, and the aperture permits a subset of the gas to enter the test chamber from the flow channel. An ionizer is positioned within the test chamber and generates radical ions from radical particles of the subset of the gas. A mass spectrometer measures a quantity of the radical ions, thereby providing a measurement of the radical particles in the gas.

公开(公告)号：US20240264116A1

公开(公告)日：2024-08-08

申请号：US18621600

申请日：2024-03-29

Applicant: MKS Instruments, Inc.

Inventor： Chenglong Yang ,  Jimmy Liu ,  James Edward Blessing

IPC: G01N27/623 ,  H01J49/28

CPC classification number: G01N27/623 ,  H01J49/282

Abstract: A monitoring system detects and measures a quantity of radical particles within a gas. A test chamber is coupled to a flow channel that transmits a gas. The test chamber defines an aperture connecting the test chamber and the flow channel, and the aperture permits a subset of the gas to enter the test chamber from the flow channel. An ionizer is positioned within the test chamber and generates radical ions from radical particles of the subset of the gas. A mass spectrometer measures a quantity of the radical ions, thereby providing a measurement of the radical particles in the gas.

公开(公告)号：US11971386B2

公开(公告)日：2024-04-30

申请号：US17644704

申请日：2021-12-16

Applicant: MKS Instruments, Inc.

Inventor： Chenglong Yang ,  Jimmy Liu ,  James Edward Blessing

IPC: H01J49/28 ,  G01N27/623

CPC classification number: G01N27/623 ,  H01J49/282

Abstract: A monitoring system detects and measures a quantity of radical particles within a gas. A test chamber is coupled to a flow channel that transmits a gas. The test chamber defines an aperture connecting the test chamber and the flow channel, and the aperture permits a subset of the gas to enter the test chamber from the flow channel. An ionizer is positioned within the test chamber and generates radical ions from radical particles of the subset of the gas. A mass spectrometer measures a quantity of the radical ions, thereby providing a measurement of the radical particles in the gas.

公开(公告)号：US11768176B2

公开(公告)日：2023-09-26

申请号：US17647239

申请日：2022-01-06

Applicant: MKS Instruments, Inc.

Inventor： James Edward Blessing

IPC: G01N27/64 ,  H01J49/14 ,  H01J49/24 ,  H01J49/42 ,  G01N33/00 ,  H01J49/00

CPC classification number: G01N27/64 ,  G01N33/0027 ,  H01J49/0031 ,  H01J49/14 ,  H01J49/147 ,  H01J49/24 ,  H01J49/42

Abstract: In a system for processing gas, a gas analyzer in a gas analyzer chamber measures a quantity of ions generated from a gas. An ionization source includes an ionization chamber and an electron source for generating ions for the gas analyzer. The ionization chamber encompasses an ionization region in which particles of the gas are charged to form the ions. A channel directs the gas from a gas source into the ionization chamber, and the channel extends to a surface of the ionization chamber. An ionization source vacuum pump is in gaseous communication with the ionization chamber via a substantially large opening, and operates to draw gas from the ionization chamber.

公开(公告)号：US20230213479A1

公开(公告)日：2023-07-06

申请号：US17647239

申请日：2022-01-06

Applicant: MKS Instruments, Inc.

Inventor： James Edward Blessing

IPC: G01N27/64 ,  H01J49/24 ,  H01J49/00 ,  H01J49/42 ,  G01N33/00 ,  H01J49/14

CPC classification number: G01N27/64 ,  H01J49/24 ,  H01J49/0031 ,  H01J49/42 ,  G01N33/0027 ,  H01J49/14

Abstract: In a system for processing gas, a gas analyzer in a gas analyzer chamber measures a quantity of ions generated from a gas. An ionization source includes an ionization chamber and an electron source for generating ions for the gas analyzer. The ionization chamber encompasses an ionization region in which particles of the gas are charged to form the ions. A channel directs the gas from a gas source into the ionization chamber, and the channel extends to a surface of the ionization chamber. An ionization source vacuum pump is in gaseous communication with the ionization chamber via a substantially large opening, and operates to draw gas from the ionization chamber.

公开(公告)号：US20220196597A1

公开(公告)日：2022-06-23

申请号：US17644704

申请日：2021-12-16

Applicant: MKS Instruments, Inc.

Inventor： Chenglong Yang ,  Jimmy Liu ,  James Edward Blessing

IPC: G01N27/623 ,  H01J49/28

Abstract: A monitoring system detects and measures a quantity of radical particles within a gas. A test chamber is coupled to a flow channel that transmits a gas. The test chamber defines an aperture connecting the test chamber and the flow channel, and the aperture permits a subset of the gas to enter the test chamber from the flow channel. An ionizer is positioned within the test chamber and generates radical ions from radical particles of the subset of the gas. A mass spectrometer measures a quantity of the radical ions, thereby providing a measurement of the radical particles in the gas.