公开(公告)号：US20240219427A1

公开(公告)日：2024-07-04

申请号：US18402824

申请日：2024-01-03

Applicant: MPI CORPORATION

Inventor： STOJAN KANEV ,  Chien-Hung Chen ,  Ming-Yang Liu ,  Yu-Hsun Hsu ,  Yan-Cheng Chen ,  Lin-Lin Chih

IPC: G01R1/073 ,  G01R31/00 ,  G01R31/26

CPC classification number: G01R1/07392 ,  G01R31/003 ,  G01R31/2607

Abstract: A positioning method and probe system for performing the same, a method for operating probe system, and a method for utilizing probe system to produce a tested semiconductor device are provided. The positioning method is used for positioning a plurality of probe assemblies with an under-test device including a plurality of pads, each of the probe assemblies have at least one probe tip that corresponds to each of the pads for contact, and at least one fixed probe assembly and at least one motorized probe assembly are defined among the probe assemblies during a positioning process.