公开(公告)号：US20250102539A1

公开(公告)日：2025-03-27

申请号：US18973444

申请日：2024-12-09

Applicant: MPI CORPORATION

Inventor： STOJAN KANEV ,  MEI-TING LU ,  SEBASTIAN GIESSMANN

IPC: G01R1/067 ,  G01B11/26 ,  G01R1/18 ,  G01R31/28 ,  G06T7/33 ,  G06T11/00 ,  H04N5/272

Abstract: A probe system and a machine apparatus thereof are provided. The machine apparatus can be configured for optionally carrying at least one probe assembly. The machine apparatus includes a temperature control carrier module, a machine frame structure and a temperature shielding structure. The temperature control carrier module can be configured for carrying at least one predetermined object. The machine frame structure can be configured for partially covering the temperature control carrier module, and the machine frame structure has a frame opening for exposing the temperature control carrier module. The temperature shielding structure can be disposed on the machine frame structure for partially covering the frame opening, and the temperature shielding structure has a detection opening for exposing the at least one predetermined object. The temperature shielding structure has a gas guiding channel formed thereinside for allowing a predetermined gas in the gas guiding channel.

公开(公告)号：US20240219427A1

公开(公告)日：2024-07-04

申请号：US18402824

申请日：2024-01-03

Applicant: MPI CORPORATION

Inventor： STOJAN KANEV ,  Chien-Hung Chen ,  Ming-Yang Liu ,  Yu-Hsun Hsu ,  Yan-Cheng Chen ,  Lin-Lin Chih

IPC: G01R1/073 ,  G01R31/00 ,  G01R31/26

CPC classification number: G01R1/07392 ,  G01R31/003 ,  G01R31/2607

Abstract: A positioning method and probe system for performing the same, a method for operating probe system, and a method for utilizing probe system to produce a tested semiconductor device are provided. The positioning method is used for positioning a plurality of probe assemblies with an under-test device including a plurality of pads, each of the probe assemblies have at least one probe tip that corresponds to each of the pads for contact, and at least one fixed probe assembly and at least one motorized probe assembly are defined among the probe assemblies during a positioning process.

公开(公告)号：US20230059740A1

公开(公告)日：2023-02-23

申请号：US17888500

申请日：2022-08-16

Applicant: MPI CORPORATION

Inventor： STOJAN KANEV ,  MEI-TING LU ,  SEBASTIAN GIESSMANN

IPC: G01R1/067 ,  G01R31/28 ,  G01R1/18

Abstract: A probe system and a machine apparatus thereof are provided. The machine apparatus can be configured for optionally carrying at least one probe assembly. The machine apparatus includes a temperature control carrier module, a machine frame structure and a temperature shielding structure. The temperature control carrier module can be configured for carrying at least one predetermined object. The machine frame structure can be configured for partially covering the temperature control carrier module, and the machine frame structure has a frame opening for exposing the temperature control carrier module. The temperature shielding structure can be disposed on the machine frame structure for partially covering the frame opening, and the temperature shielding structure has a detection opening for exposing the at least one predetermined object. The temperature shielding structure has a gas guiding channel formed thereinside for allowing a predetermined gas in the gas guiding channel.