公开(公告)号：US20160172153A1

公开(公告)日：2016-06-16

申请号：US15051210

申请日：2016-02-23

Applicant: PROTOCHIPS, INC.

Inventor： John DAMIANO, Jr. ,  Stephen E. MICK ,  David P. NACKASHI

IPC: H01J37/20 ,  H01J37/26

CPC classification number: H01J37/20 ,  H01J37/26 ,  H01J37/261 ,  H01J2237/188 ,  H01J2237/2001 ,  H01J2237/2002 ,  H01J2237/2003 ,  H01J2237/2007 ,  H01J2237/2008 ,  H01J2237/2602 ,  H01J2237/28 ,  H01J2237/2802

Abstract: Electron microscope support structures and methods of making and using same. The support structures are generally constructed using semiconductor materials and semiconductor manufacturing processes. The temperature of the support structure may be controlled and/or gases or liquids may be confined in the observation region for reactions and/or imaging.