Integrated capacitive device with hydrogen degradable dielectric layer protected by getter layer
    2.
    发明申请
    Integrated capacitive device with hydrogen degradable dielectric layer protected by getter layer 失效
    集成电容器件,具有可吸收层保护的氢可降解介电层

    公开(公告)号:US20030136989A1

    公开(公告)日:2003-07-24

    申请号:US10353159

    申请日:2003-01-27

    CPC classification number: H01L28/75 H01L28/55

    Abstract: There is described an integrated device comprising a thin-film capacitor formed of first and second electrodic layers, electrically separated by a dielectric layer formed of a hydrogen-degradable compound characterized in that it further comprises at least a getter layer of a material of the group consisting of the alloys of zirconium, vanadium and iron, optionally containing minor quantities of manganese and/or elements of the nullRare Earthsnull group, alloys of zirconium with at least one among the metals of the group consisting of iron, cobalt and nickel, optionally containing up to 15% by weight of elements belonging to the nullRare Earthsnull group.

    Abstract translation: 描述了一种集成器件,其包括由第一和第二电极层形成的薄膜电容器,由由可氢降解化合物形成的电介质层电分离,其特征在于,其还包括至少一组该材料的吸气剂层 由锆,钒和铁的合金组成,任选地含有少量的锰和/或“稀土”组的元素,锆与在铁,钴和镍中的金属中的至少一种的合金, 任选地含有高达15重量%的属于“稀土”组的元素。

    Composite materials capable of hydrogen sorption and methods for the production thereof
    3.
    发明申请
    Composite materials capable of hydrogen sorption and methods for the production thereof 审中-公开
    能吸附氢的复合材料及其生产方法

    公开(公告)号:US20030203105A1

    公开(公告)日:2003-10-30

    申请号:US10440960

    申请日:2003-05-19

    Abstract: A powder of a composite material comprising a non-evaporable getter material with a palladium coating continuously sorbs hydrogen. Embodiments in which the coverage of the palladium coating over the particles of the NEG material is complete can sorb hydrogen without the need for an activation treatment. Other embodiments in which the palladium coverage is less than total but greater than about 10% can also sorb gaseous species other than hydrogen. Loose powders, pressed powders, and sintered powders of the composite material are incorporated into getter devices and into the evacuated spaces of double-walled pipes, dewars, and thermal bottles. Methods for preparing powders of these composite materials utilize evaporative, sputter, and CVD deposition techniques. Another method prepares powders of the composite material by a liquid phase impregnation process.

    Abstract translation: 包含具有钯涂层的不可蒸发的吸气剂材料的复合材料的粉末连续吸附氢。 其中钯涂层覆盖NEG材料的颗粒的覆盖范围完全可以吸附氢,而不需要进行活化处理。 其中钯覆盖率小于总而大于约10%的其它实施方案也可以吸附除氢以外的气态物质。 将复合材料的松散粉末,压粉和烧结粉末并入到吸气装置中并进入双壁管,杜瓦瓶和热瓶的抽空空间中。 制备这些复合材料粉末的方法采用蒸发,溅射和CVD沉积技术。 另一种方法是通过液相浸渍法制备复合材料的粉末。

    Composite materials capable of hydrogen sorption and methods for the production thereof
    4.
    发明申请
    Composite materials capable of hydrogen sorption and methods for the production thereof 审中-公开
    能吸附氢的复合材料及其生产方法

    公开(公告)号:US20040101686A1

    公开(公告)日:2004-05-27

    申请号:US10704244

    申请日:2003-11-07

    Abstract: A powder of a composite material comprising a non-evaporable getter material with a palladium coating continuously sorbs hydrogen. Embodiments in which the coverage of the palladium coating over the particles of the NEG material is complete can sorb hydrogen without the need for an activation treatment. Other embodiments in which the palladium coverage is less than total but greater than about 10% can also sorb gaseous species other than hydrogen. Loose powders, pressed powders, and sintered powders of the composite material are incorporated into getter devices and into the evacuated spaces of double-walled pipes, dewars, and thermal bottles. Methods for preparing powders of these composite materials utilize evaporative, sputter, and CVD deposition techniques. Another method prepares powders of the composite material by a liquid phase impregnation process.

    Abstract translation: 包含具有钯涂层的不可蒸发的吸气剂材料的复合材料的粉末连续吸附氢。 其中钯涂层覆盖NEG材料的颗粒的覆盖范围完全可以吸附氢,而不需要进行活化处理。 其中钯覆盖率小于总而大于约10%的其它实施方案也可以吸附除氢以外的气态物质。 将复合材料的松散粉末,压粉和烧结粉末并入到吸气装置中并进入双壁管,杜瓦瓶和热瓶的抽空空间中。 制备这些复合材料粉末的方法采用蒸发,溅射和CVD沉积技术。 另一种方法是通过液相浸渍法制备复合材料的粉末。

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