公开(公告)号：US20170205287A1

公开(公告)日：2017-07-20

申请号：US15475402

申请日：2017-03-31

Applicant: SHIMADZU CORPORATION

Inventor： Toshiya HABU

IPC: G01J3/10 ,  G01J3/443 ,  H01J37/244 ,  H05H1/46 ,  H01J37/32

CPC classification number: G01J3/10 ,  G01J3/027 ,  G01J3/443 ,  H01J37/244 ,  H01J37/321 ,  H01J37/32174 ,  H01J37/32183 ,  H05H1/0037 ,  H05H1/36 ,  H05H1/46 ,  H05H2001/4652 ,  H05H2001/4682

Abstract: A high-frequency input voltage and a high-frequency input current to a series resonant circuit are detected by a voltage detection unit and a current detection unit, respectively, and plasma input power is detected by a plasma input power detection unit based on the detected high-frequency input voltage and high-frequency input current. By directly detecting the plasma input power in this manner, the plasma input power may be accurately controlled regardless of the state of a plasma-generating gas or an analysis sample. Also, use of a switching circuit including a semiconductor device allows an inexpensive configuration compared with a configuration where a vacuum tube or the like is used.

公开(公告)号：US20160066404A1

公开(公告)日：2016-03-03

申请号：US14825301

申请日：2015-08-13

Applicant: SHIMADZU CORPORATION

Inventor： Toshiya HABU

IPC: H05H1/46 ,  G01J3/02 ,  H01J37/32

CPC classification number: H05H1/46 ,  G01J3/027 ,  H01J37/321 ,  H01J37/32174 ,  H05H1/36 ,  H05H2001/4652 ,  H05H2001/4682

Abstract: A transformer is formed into a substantially U shape. The length of the transformer may thus be secured, and also the length of pattern wiring between an input terminal and an output terminal of a secondary coil of the transformer and the control terminals of a semiconductor device may be reduced. Moreover, the primary coil and the secondary coil of the transformer are arranged in parallel. The coupling coefficient between the primary coil and the secondary coil is thereby increased. An LC resonant circuit, not including the induction coil, and a switching circuit and the transformer are accommodated inside a housing. A water-cooling radiator is provided inside the housing, and also air inside the housing is circulated by a cooling fan while being guided to the radiator.

Abstract translation: 变压器形成为大致U形。 因此可以确保变压器的长度，并且还可以减小变压器的次级线圈的输入端子和输出端子与半导体器件的控制端子之间的图案布线的长度。 此外，变压器的初级线圈和次级线圈平行布置。 因此，初级线圈和次级线圈之间的耦合系数增加。 不包括感应线圈的LC谐振电路以及开关电路和变压器被容纳在壳体内。 在壳体内设置水冷散热器，并且壳体内的空气也被冷却风扇循环，同时被引导到散热器。

公开(公告)号：US20160066405A1

公开(公告)日：2016-03-03

申请号：US14825325

申请日：2015-08-13

Applicant: SHIMADZU CORPORATION

Inventor： Toshiya HABU

IPC: H05H1/46 ,  H01J37/244 ,  G01J3/02 ,  H01J37/32

CPC classification number: G01J3/10 ,  G01J3/027 ,  G01J3/443 ,  H01J37/244 ,  H01J37/321 ,  H01J37/32174 ,  H01J37/32183 ,  H05H1/0037 ,  H05H1/36 ,  H05H1/46 ,  H05H2001/4652 ,  H05H2001/4682

Abstract: A high-frequency input voltage and a high-frequency input current to a series resonant circuit are detected by a voltage detection unit and a current detection unit, respectively, and plasma input power is detected by a plasma input power detection unit based on the detected high-frequency input voltage and high-frequency input current. By directly detecting the plasma input power in this manner, the plasma input power may be accurately controlled regardless of the state of a plasma-generating gas or an analysis sample. Also, use of a switching circuit including a semiconductor device allows an inexpensive configuration compared with a configuration where a vacuum tube or the like is used.

Abstract translation: 通过电压检测单元和电流检测单元分别检测到串联谐振电路的高频输入电压和高频输入电流，并且基于检测到的等离子体输入功率检测单元检测等离子体输入功率 高频输入电压和高频输入电流。 通过以这种方式直接检测等离子体输入功率，可以精确地控制等离子体输入功率，而与等离子体产生气体或分析样品的状态无关。 此外，与使用真空管等的构造相比，使用包括半导体器件的开关电路允许便宜的配置。

公开(公告)号：US20150250046A1

公开(公告)日：2015-09-03

申请号：US14635152

申请日：2015-03-02

Applicant: SHIMADZU CORPORATION

Inventor： Toshiya HABU

IPC: H05H1/46

CPC classification number: H05H1/46 ,  H03H7/38 ,  H05H2001/4645

Abstract: PROBLEM: To improve the stability of the process of the plasma ignition, by allowing a high current to pass through an induction coil without increasing the power-supply voltage in the process of the plasma ignition.SOLUTION: An impedance conversion circuit 16 including an inductor 17 and a capacitor 18 is arranged between a full-bridge drive circuit 13 for switching DC voltage and an LC resonance circuit 19 including an induction coil 21 for plasma generation. The capacitance of the capacitor 18 can be varied between two levels, with a switching driver 23 serving as a switcher. When the plasma is to be ignited, the capacitance of the capacitor 18 is set at the higher level to allow a high current to be supplied to the LC resonance circuit 19. After the plasma is brought into a steady state of lighting, the capacitance of the capacitor 18 is changed to the lower level at which an impedance matching is achieved so as to maximize the power efficiency.

Abstract translation: 问题：为了提高等离子体点火过程的稳定性，通过允许高电流通过感应线圈而不增加等离子体点火过程中的电源电压。 解决方案：包括电感器17和电容器18的阻抗转换电路16布置在用于切换直流电压的全桥驱动电路13和包括用于等离子体产生的感应线圈21的LC谐振电路19之间。 电容器18的电容可以在两个电平之间变化，开关驱动器23用作切换器。 当要点燃等离子体时，电容器18的电容被设置在较高的电平以允许向LC谐振电路19提供高电流。在等离子体进入稳定的点亮状态之后，电容 将电容器18改变为实现阻抗匹配的较低电平，从而使功率效率最大化。

公开(公告)号：US20150249429A1

公开(公告)日：2015-09-03

申请号：US14633336

申请日：2015-02-27

Applicant: SHIMADZU CORPORATION

Inventor： Toshiya HABU

IPC: H03B5/06 ,  H05H1/24 ,  H03B5/12

CPC classification number: H05H1/46 ,  H03B5/06 ,  H03B5/1218 ,  H03B5/1228 ,  H03B5/1296 ,  H03B2200/0094 ,  H03L3/00 ,  H05H1/24 ,  H05H1/30 ,  H05H1/36 ,  H05H2001/4652 ,  H05H2001/4682

Abstract: PROBLEM: To generate a self-oscillation in a stable manner and at a low cost in a self-oscillating radio frequency oscillation circuit for high-power applications used for plasma generation in an ICP emission spectrometer or for other purposes.SOLUTION: A secondary winding 38 of a starting transformer is arranged in an LC resonance circuit 30 including an induction coil 9, capacitor 36 and other elements. A starter 6, e.g. a Clapp oscillator circuit, is connected to a primary winding 5 magnetically coupled with the winding 38. A radio-frequency current is induced in the LC resonance circuit 30 through the primary and secondary windings 5 and 38 by energizing the starter 6 for a certain period of time in a starting phase. As a result, electric current flows through the secondary windings 11, 14, 17 and 20 in a full-bridge drive circuit 10 which are magnetically coupled with primary windings 32, 33, 34 and 35, respectively, whereby voltage is developed between the gate and source of MOSFETs 13, 16, 19 and 22, causing these MOSFETs 13, 16, 19 and 22 to begin an ON/OFF operation, whereby the self-oscillation is started.

Abstract translation: 问题：在ICP发射光谱仪中用于等离子体生成的大功率应用的自振荡射频振荡电路中，以稳定的方式和低成本地产生自振荡，或用于其它目的。 解决方案：起动变压器的次级绕组38布置在包括感应线圈9，电容器36和其它元件的LC谐振电路30中。 起动器6，例如。 Clap振荡器电路连接到与绕组38磁耦合的初级绕组5.通过使起动器6通电一定时间，在LC谐振电路30中通过初级和次级绕组5和38感应出射频电流 的时间在开始阶段。 结果，电流分别在与初级绕组32,33,34和35磁耦合的全桥驱动电路10中流过次级绕组11,14,17和20，从而在栅极之间产生电压 和MOSFET 13,16,19,22的源极，使得这些MOSFET 13,16,19,22开始导通/截止操作，从而开始自振荡。