公开(公告)号：US12042815B2

公开(公告)日：2024-07-23

申请号：US17489045

申请日：2021-09-29

Applicant: Tokyo Electron Limited

Inventor： Kotaro Tsurusaki ,  Koji Yamashita ,  Yusuke Yamamoto ,  Koji Tanaka ,  Kouzou Kanagawa

IPC: B05C3/109 ,  B05C3/02 ,  B05C11/00 ,  B05C11/10 ,  B05D1/20 ,  C25D21/04 ,  H01L21/67 ,  B05C3/00

CPC classification number: B05C3/109 ,  B05C3/02 ,  B05C11/00 ,  B05C11/1013 ,  B05D1/20 ,  C25D21/04 ,  H01L21/67017 ,  H01L21/67057 ,  B05C3/00

Abstract: A substrate processing apparatus includes a processing tank, a holder, an organic solvent supply, a drainage port, a gas supply, and an exhaust port. The processing tank stores an aqueous layer. The holder holds a substrate. The organic solvent supply supplies an organic solvent onto the aqueous layer to form a liquid layer of the organic solvent. The drainage port discharges the aqueous layer from a bottom wall of the processing tank and causes the liquid layer of the organic solvent to descend from above the substrate to below the substrate. The gas supply supplies a gas of a water repellent agent to the liquid layer from above the processing tank while the liquid layer descends. The exhaust port is exposed on a side wall of the processing tank by the descending of the liquid layer and discharges the gas of the water repellent gas.

公开(公告)号：US10035173B2

公开(公告)日：2018-07-31

申请号：US14736582

申请日：2015-06-11

Applicant: TOKYO ELECTRON LIMITED

Inventor： Toshinobu Furusho ,  Takahiro Ookubo ,  Kousuke Yoshihara ,  Yusuke Yamamoto ,  Steffen Hornig

IPC: B05D1/02 ,  H01L21/67 ,  F17D1/00 ,  B01D29/56 ,  B01D35/02 ,  B05C11/10 ,  B05C9/06

CPC classification number: B05D1/02 ,  B01D29/56 ,  B01D35/02 ,  B05C9/06 ,  B05C11/10 ,  F17D1/00 ,  H01L21/67017 ,  H01L21/6715 ,  H01L21/67173 ,  H01L21/67178 ,  Y10T137/794

Abstract: A chemical supply system comprises: a first container and a second container for storing a chemical solution; a first pump, located on a first pipe connecting the first and second containers, for directing the solution stored in the first container to the second container; and a first filter, located in the first pipe, for filtering the solution flowing through the first pipe from the first container toward the second container. The system further includes: a second pipe for connecting the first container and the second container; and a second pump, located on the second pipe, for directing the solution stored in the second container to the first container.