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公开(公告)号：US20180149587A1
公开(公告)日：2018-05-31
申请号：US15822398
申请日：2017-11-27
Applicant: Yokogawa Electric Corporation
Inventor： Kazuki SETSUDA , Naomichi CHIDA , Kazufumi NISHIDA
IPC: G01N21/3559 , G01N21/359 , H03F3/08
CPC classification number: G01N21/3559 , G01N21/3151 , G01N21/359 , H03F3/085 , H03F3/087
Abstract: A signal detection device according to one aspect of the present invention includes a receiver configured to receive a signal including at least a first signal component modulated by a first frequency and a second signal component modulated by a second frequency, and a detector configured to generate, using a base signal, a first reference signal to be used for detecting the first signal component and a second reference signal to be used for detecting the second signal component, perform lock-in detection on the signal received by the receiver using the first reference signal to obtain a first detection signal, perform lock-in detection on the signal received by the receiver using the second reference signal to obtain two second detection signals having different phases from each other, and change at least one of a frequency and a phase of each of the first and second reference signals to set one of the two second detection signals to zero.
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公开(公告)号：US20190078875A1
公开(公告)日：2019-03-14
申请号：US16127318
申请日：2018-09-11
Applicant: Yokogawa Electric Corporation
Inventor： Naomichi CHIDA , Kazuki SETSUDA , Kazufumi NISHIDA , Jun KATSUYAMA
Abstract: A displacement sensor includes a linear light source which emits a linear beam, a beam splitter, a line sensor, and an imaging lens. The linear light source is disposed with an inclination of a predetermined angle with respect to a perpendicular line of an optical axis of the imaging lens. The imaging lens forms an image of the linear light source at a position conjugate with the linear light source with an inclination of a predetermined angle with respect to the perpendicular line of the optical axis of the imaging lens. The beam splitter is disposed between the linear light source and the imaging lens. The line sensor is disposed at a position conjugate with the image formed by the imaging lens through the imaging lens and the beam splitter so that the optical axis of the imaging lens has the inclination of the predetermined angle with respect to the perpendicular line of the optical axis reflected by the beam splitter.
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3.发明申请DISPLACEMENT SENSOR, SPECTRAL CHARACTERISTIC MEASURING APPARATUS, COLOR MEASURING APPARATUS, PLANAR MEASURED OBJECT QUALITY MONITORING APPARATUS, DISPLACEMENT MEASURING METHOD, SPECTRAL CHARACTERISTIC MEASURING METHOD, AND COLOR MEASURING METHOD 审中-公开位移传感器，光谱特性测量装置，颜色测量装置，平面测量对象质量监测装置，位移测量方法，光谱特性测量方法和颜色测量方法公开(公告)号：US20170023355A1
公开(公告)日：2017-01-26
申请号：US15287869
申请日：2016-10-07
Applicant: YOKOGAWA ELECTRIC CORPORATION
Inventor： Atsushi TSUJII , Naomichi CHIDA , Kazufumi NISHIDA
CPC classification number: G01B11/14 , G01B11/026 , G01B11/0608 , G01B2210/50 , G01J3/0205 , G01J3/0208 , G01J3/021 , G01J3/0216 , G01J3/027 , G01J3/0291 , G01J3/10 , G01J3/18 , G01J3/2803 , G01J3/42 , G01J3/50
Abstract: A displacement sensor includes a light source unit configured to apply light with different plural wavelengths in a direction oblique to a measurement region of a planar measured object, a spectroscope configured to measure spectral distribution of light reflected by the measurement region, a feature amount extracting module configured to extract a feature amount of the spectral distribution, and a displacement calculating module configured to calculate displacement of the measurement region based on the extracted feature amount and a relation between displacement and a feature amount acquired previously.
Abstract translation: 位移传感器包括：光源单元，被配置为沿着与平面测量对象的测量区域倾斜的方向施加不同多个波长的光;配置为测量由测量区域反射的光的光谱分布的分光镜;特征量提取模块 被配置为提取频谱分布的特征量;以及位移计算模块，被配置为基于所提取的特征量以及位移与先前获得的特征量之间的关系来计算测量区域的位移。
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4.发明申请DISPLACEMENT SENSOR, SPECTRAL CHARACTERISTIC MEASURING APPARATUS, COLOR MEASURING APPARATUS, PLANAR MEASURED OBJECT QUALITY MONITORING APPARATUS, DISPLACEMENT MEASURING METHOD, SPECTRAL CHARACTERISTIC MEASURING METHOD, AND COLOR MEASURING METHOD 有权位移传感器，光谱特性测量装置，颜色测量装置，平面测量对象质量监测装置，位移测量方法，光谱特性测量方法和颜色测量方法公开(公告)号：US20140104623A1
公开(公告)日：2014-04-17
申请号：US14051855
申请日：2013-10-11
Applicant: YOKOGAWA ELECTRIC CORPORATION
Inventor： Atsushi TSUJII , Naomichi CHIDA , Kazufumi NISHIDA
CPC classification number: G01B11/14 , G01B11/026 , G01B11/0608 , G01B2210/50 , G01J3/0205 , G01J3/0208 , G01J3/021 , G01J3/0216 , G01J3/027 , G01J3/0291 , G01J3/10 , G01J3/18 , G01J3/2803 , G01J3/42 , G01J3/50
Abstract: A displacement sensor includes a light source unit configured to apply light with different plural wavelengths in a direction oblique to a measurement region of a planar measured object, a spectroscope configured to measure spectral distribution of light reflected by the measurement region, a feature amount extracting module configured to extract a feature amount of the spectral distribution, and a displacement calculating module configured to calculate displacement of the measurement region based on the extracted feature amount and a relation between displacement and a feature amount acquired previously.
Abstract translation: 位移传感器包括：光源单元，被配置为沿着与平面测量对象的测量区域倾斜的方向施加不同多个波长的光;配置为测量由测量区域反射的光的光谱分布的分光镜;特征量提取模块 被配置为提取频谱分布的特征量;以及位移计算模块，被配置为基于所提取的特征量以及位移与先前获得的特征量之间的关系来计算测量区域的位移。
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