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公开(公告)号：US20140061469A1
公开(公告)日：2014-03-06
申请号：US13933557
申请日：2013-07-02
Applicant: Harold Y. Hwang , Mengkun Liu , Richard D. Averitt , Keith A. Nelson , Aaron Sternbach , Kebin Fan
Inventor： Harold Y. Hwang , Mengkun Liu , Richard D. Averitt , Keith A. Nelson , Aaron Sternbach , Kebin Fan
IPC: G01J5/28
CPC classification number: G01J5/28 , G01J5/20 , G01J2005/0077 , G01J2005/202 , G01J2005/283 , G01J2005/286 , H01L27/14636 , H01L27/1464 , H01L27/14669 , H01L31/09
Abstract: An apparatus for detecting electromagnetic radiation within a target frequency range is provided. The apparatus includes a substrate and one or more resonator structures disposed on the substrate. The substrate can be a dielectric or semiconductor material. Each of the one or more resonator structures has at least one dimension that is less than the wavelength of target electromagnetic radiation within the target frequency range, and each of the resonator structures includes at least two conductive structures separated by a spacing. Charge carriers are induced in the substrate near the spacing when the resonator structures are exposed to the target electromagnetic radiation. A measure of the change in conductivity of the substrate due to the induced charge carriers provides an indication of the presence of the target electromagnetic radiation.
Abstract translation: 提供一种用于检测目标频率范围内的电磁辐射的装置。 该装置包括衬底和设置在衬底上的一个或多个谐振器结构。 衬底可以是电介质或半导体材料。 一个或多个谐振器结构中的每一个具有小于目标频率范围内的目标电磁辐射的波长的至少一个维度，并且每个谐振器结构都包括由间隔隔开的至少两个导电结构。 当谐振器结构暴露于目标电磁辐射时，电荷载流子在衬底附近被感应。 由于感应的电荷载体导致的衬底的电导率变化的测量提供了目标电磁辐射的存在的指示。
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公开(公告)号：US5274235A
公开(公告)日：1993-12-28
申请号：US785022
申请日：1991-10-30
Applicant: William H. Taylor
Inventor： William H. Taylor
CPC classification number: G01J5/08 , G01J5/061 , G01J5/0806 , H04N3/09 , H04N5/33 , G01J2005/065 , G01J2005/283
Abstract: A totally integrated imaging system has a housing including imaging optics, a scanning mirror and a curved detector array. The imaging optics constitute a meniscus lens and a spherical focusing mirror. The scanning mirror scans the image, and the spherical mirror focuses the scanned image onto the detector array. The meniscus lens advantageously corrects aberrations. A detector support provides access, if desired, for cryogenic cooling of the detector, and individual cold shielding of the detector elements is made possible by the telecentricity of the optics. Processing electronics, at least a portion of which may also be disposed on the detector support, process the detector signals to display an image. The integrated structure advantageously eliminates any need for separate scanner, imager, and electronics modules and the scanning optical system obtains highly desirable image quality over a wide field of view.
Abstract translation: 完全集成的成像系统具有包括成像光学元件，扫描镜和弯曲检测器阵列的外壳。 成像光学元件构成弯月透镜和球面聚焦镜。 扫描镜扫描图像，球面镜将扫描图像聚焦到检测器阵列上。 弯月透镜有利地校正像差。 如果需要，检测器支架提供对检测器的低温冷却的访问，并且通过光学器件的远心性使检测器元件的各个冷屏蔽成为可能。 处理电子器件，其至少一部分也可以设置在检测器支架上，处理检测器信号以显示图像。 集成结构有利地消除了对单独的扫描仪，成像器和电子模块的任何需要，并且扫描光学系统在宽视野范围内获得非常期望的图像质量。
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公开(公告)号：US09638581B2
公开(公告)日：2017-05-02
申请号：US14302934
申请日：2014-06-12
Applicant: GLOBALFOUNDRIES INC.
Inventor： Nicholas G. Clore , Kendra A. Lyons , Andrew H. Norfleet , Jared P. Yanofsky
CPC classification number: G01J5/0878 , G01J5/0007 , G01J5/025 , G01J2005/0085 , G01J2005/283 , H01L22/12 , H01L22/20 , H01L22/34
Abstract: According to embodiments of the present invention, a semiconductor substrate is formed on at least a portion of a surface of a semiconductor substrate. The emitting layer is excited for a first predetermined time period. A first luminescent intensity value of the emitting layer is determined. In response to exposing the semiconductor substrate and the emitting layer to a condition for a second predetermined time period, a second luminescent intensity value of the emitting layer is determined. A thermal profile of at least the portion of the surface of the semiconductor substrate is determined utilizing the first luminescent intensity value and the second luminescent intensity value of the emitting layer. The thermal profile at least reflects information about one or more of the condition and the semiconductor substrate subsequent to exposure to the condition.
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公开(公告)号：US09366576B2
公开(公告)日：2016-06-14
申请号：US14634307
申请日：2015-02-27
Inventor： Harold Y. Hwang , Mengkun Liu , Richard D. Averitt , Keith A. Nelson , Aaron Sternbach , Kebin Fan
CPC classification number: G01J5/28 , G01J5/20 , G01J2005/0077 , G01J2005/202 , G01J2005/283 , G01J2005/286 , H01L27/14636 , H01L27/1464 , H01L27/14669 , H01L31/09
Abstract: An apparatus for detecting electromagnetic radiation within a target frequency range is provided. The apparatus includes a substrate and one or more resonator structures disposed on the substrate. The substrate can be a dielectric or semiconductor material. Each of the one or more resonator structures has at least one dimension that is less than the wavelength of target electromagnetic radiation within the target frequency range, and each of the resonator structures includes at least two conductive structures separated by a spacing. Charge carriers are induced in the substrate near the spacing when the resonator structures are exposed to the target electromagnetic radiation. A measure of the change in conductivity of the substrate due to the induced charge carriers provides an indication of the presence of the target electromagnetic radiation.
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公开(公告)号：US5235184A
公开(公告)日：1993-08-10
申请号：US791359
申请日：1991-11-14
Applicant: Albert M. Paulson
Inventor： Albert M. Paulson
IPC: F25D19/00 , G01J5/06 , G01J5/28 , H01L31/024
CPC classification number: F25D19/006 , G01J5/28 , H01L31/024 , G01J2005/283 , G01J5/061
Abstract: A low temperature solid state light detecting system is disclosed. The same incorporates a source of cooling and an electrical light detector. A heat conducting member extends from the detector chip to the source of cooling. A vacuum chamber contains the light detector. The chamber has a window for permitting light to fall on the electrical light detector. A plurality of electrical feedthrough devices are mounted on the chamber for coupling electricity from inside the chamber to the outside of the chamber. A plurality of bare wires extends from the detector to the feedthrough devices positioned on the housing.
Abstract translation: 公开了一种低温固态光检测系统。 同样的结合了冷却源和电光检测器。 导热构件从检测器芯片延伸到冷却源。 真空室包含光检测器。 该室具有允许光落在电光检测器上的窗口。 多个电馈通装置安装在腔室上，用于将腔室内部的电力耦合到腔室的外部。 多个裸线从检测器延伸到定位在壳体上的馈通装置。
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Patent Agency Ranking6.发明授权Strip of infra-red detectors comprising a cold screen with a constant viewing angle 失效红外探测器带包括具有恒定视角的冷屏幕
公开(公告)号：US4775792A
公开(公告)日：1988-10-04
申请号：US893016
申请日：1986-08-04
Applicant: Roger Prost
Inventor： Roger Prost
CPC classification number: G01J5/061 , G01J2005/065 , G01J2005/283
Abstract: The invention uses a strip of infra-red detectors comprising a cold screen of the type that provides a constant viewing angle for all the directors in a direction that is prependicular to the axis of the strip. Two cylindrical mirrors are set at the ends of the strip and placed in the heated part of the cryostat containing the strip and the cold screen. The shape and dimensions of the mirrors as well as their positions are chosen so that the detector placed in the center of the strip detects, through reflection in two mirrors, only cold surfaces while the other detectors detect heated surfaces, through reflection in the two mirrors, in a proportion that increases with distance from the central detector of the strip, so that, along the axis of the strip, every detector has a substantially constant viewing angle. Applications: large-sized strips, for example in space applications.
Abstract translation: 本发明使用一条红外线检测器，其包括一种冷屏幕，该冷屏幕在垂直于条带轴线的方向上为所有导向器提供恒定的视角。 将两个圆柱形反射镜设置在条带的端部并且放置在包含条带和冷屏幕的低温恒温器的加热部分中。 选择反射镜的形状和尺寸以及它们的位置，使得放置在条的中心的检测器通过两个反射镜中的反射来检测仅冷表面，而其他检测器通过两个反射镜中的反射来检测加热的表面 以与条带的中心检测器的距离增加的比例，使得沿着条带的轴线，每个检测器具有基本上恒定的视角。 应用：大尺寸条，例如在空间应用中。
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公开(公告)号：US4746224A
公开(公告)日：1988-05-24
申请号：US943489
申请日：1986-12-19
Applicant: Masashi Mizuno , Mitsuo Utsuno
Inventor： Masashi Mizuno , Mitsuo Utsuno
CPC classification number: G01J5/0022 , G01J2005/0029 , G01J2005/283
Abstract: A radiant-energy temperature measuring apparatus of a scanning type having a linear array of light-sensitive elements which generate photoelectric signals corresponding to respective amounts of radiant energy produced at different points of an object and vicinities thereof on a straight line corresponding to the above linear array, and further having a device for determining a temperature of the object at desired one of its different points, based on the photoelectric signal generated by one of the light-sensitive elements which optically matches the desired one point of the object. The apparatus includes an edge detector for detecting an edge of the object, based on the photoelectric signals generated by the light-sensitive elements, and a selector for selecting the desired one point of the object, by designating a number of the light-sensitive elements as counted from the element corresponding to the detected edge of the object, to the element which corresponds to the above-indicated desired one point. The selector applies to the temperature determining device the photoelectric signal from the light-sensitive element corresponding to the selected point.
Abstract translation: 一种扫描型的辐射能温度测量装置，其具有光敏元件的线性阵列，该光敏元件产生对应于在与上述线性对应的直线上的物体及其附近的不同点产生的相应辐射能量的光电信号 并且还具有用于基于与光学上匹配物体的期望的一个点的光敏元件中的一个产生的光电信号，在其不同点的期望的一个点处确定物体的温度的装置。 该装置包括：边缘检测器，用于基于由感光元件产生的光电信号来检测物体的边缘;以及选择器，用于通过指定多个感光元件来选择所需物体的所需一点 从对应于检测到的对象的边缘的元素计数到与上述所需的一个点相对应的元素。 选择器适用于温度确定装置来自与所选择的点对应的光敏元件的光电信号。
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公开(公告)号：US20150362373A1
公开(公告)日：2015-12-17
申请号：US14302934
申请日：2014-06-12
Applicant: International Business Machines Corporation
Inventor： Nicholas G. Clore , Kendra A. Lyons , Andrew H. Norfleet , Jared P. Yanofsky
CPC classification number: G01J5/0878 , G01J5/0007 , G01J5/025 , G01J2005/0085 , G01J2005/283 , H01L22/12 , H01L22/20 , H01L22/34
Abstract: According to embodiments of the present invention, a semiconductor substrate is formed on at least a portion of a surface of a semiconductor substrate. The emitting layer is excited for a first predetermined time period. A first luminescent intensity value of the emitting layer is determined. In response to exposing the semiconductor substrate and the emitting layer to a condition for a second predetermined time period, a second luminescent intensity value of the emitting layer is determined. A thermal profile of at least the portion of the surface of the semiconductor substrate is determined utilizing the first luminescent intensity value and the second luminescent intensity value of the emitting layer. The thermal profile at least reflects information about one or more of the condition and the semiconductor substrate subsequent to exposure to the condition.
Abstract translation: 根据本发明的实施例，在半导体衬底的表面的至少一部分上形成半导体衬底。 发光层被激发第一预定时间段。 确定发光层的第一发光强度值。 响应于将半导体衬底和发光层暴露于第二预定时间段的条件，确定发光层的第二发光强度值。 使用发光层的第一发光强度值和第二发光强度值来确定至少半导体衬底的表面部分的热分布。 热分布至少反映在暴露于该条件之后关于条件和半导体衬底中的一个或多个的信息。
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公开(公告)号：US5298752A
公开(公告)日：1994-03-29
申请号：US953058
申请日：1992-09-30
Applicant: Ralph H. Wight
Inventor： Ralph H. Wight
CPC classification number: G01J5/06 , G01J2005/065 , G01J2005/283
Abstract: A thermal or infrared imaging system having an optical barrel, an external stop formed by a mirror, a dewar, a cold shield, a focal plane array, and multiple retroreflectors. The cold shield and focal plane array are located inside the dewar. The mirror directs desired light bundles at the focal plane array. The retroreflectors are attached to the inside of the optical barrel. The retroreflectors are arranged such that the retroreflectors exist in all lines of sight of the focal plane array, except those lines of sight associated with the external stop. Consequently, the retroreflectors do not interfere with the desired light bundles which are focused onto the focal plane array. However, all light outside of that which is focused is prevented from reaching the focal plane array by the retroreflectors. The retroreflectors are infrared retroreflectors arranged in a matrix. Each of the retroreflectors is a "concave" corner cube having low emissivity reflecting facets. The corner cubes reflect incoming rays by 180 degrees relative to input angles of the incoming rays. Thus, the focal plane array sees only cold outside of the desired light bundles.
Abstract translation: 具有光学镜筒，由镜子形成的外部止挡件，杜瓦瓶，冷屏蔽罩，焦平面阵列和多个后向反射器的热或红外成像系统。 冷屏和焦平面阵列位于杜瓦内。 镜子在焦平面阵列处引导所需的光束。 后向反射器附着在光学镜筒的内部。 后向反射器被布置成使得后向反射器存在于焦平面阵列的所有视线中，除了与外部停止相关联的视线外。 因此，后向反射器不会干扰聚焦在焦平面阵列上的期望的光束。 然而，被聚焦的所有光都被防反射器抵达焦平面阵列。 后向反射器是布置在矩阵中的红外后向反射器。 每个后向反射器是具有低发射率反射面的“凹”角立方体。 角落立方体将入射光线相对于入射光线的输入角反射180度。 因此，焦平面阵列仅在期望的光束外部看到冷。
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公开(公告)号：US5091646A
公开(公告)日：1992-02-25
申请号：US529933
申请日：1990-05-29
Applicant: William H. Taylor
Inventor： William H. Taylor
CPC classification number: G01J5/08 , G01J5/061 , G01J5/0806 , H04N3/09 , H04N5/33 , G01J2005/065 , G01J2005/283
Abstract: A totally integrated thermal imaging system has a dewar housing including imaging optics, a scanning mirror and a curved detector array. The imaging optics constitute a meniscus lens and a spherical focusing mirror. The scanning mirror scans the image, and the spherical mirror focuses the scanned image onto the detector array. The meniscus lens advantageously corrects aberrations. A detector support provides access for cryogenic cooling of the detector, and individual cold shielding of the detector elements is made possible by the telecentricity of the optics. Processing electronics, at least a portion of which may also be disposed on the detector support, process the detector signals to display an image. The integrated structure advantageously eliminates any need for separate scanner, imager, detector dewar and electronics modules.
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