公开(公告)号：US20180238740A1

公开(公告)日：2018-08-23

申请号：US15898167

申请日：2018-02-15

Applicant: FLIR SYSTEMS, INC.

Inventor： Roderick C. Christel ,  Theodore R. Hoelter ,  Per Elmfors

IPC: G01J5/10 ,  G01J5/52 ,  G01J5/08 ,  H04N5/33

CPC classification number: G01J5/10 ,  G01J5/026 ,  G01J5/0275 ,  G01J5/0834 ,  G01J5/20 ,  G01J5/522 ,  G01J5/524 ,  G01J2005/0048 ,  G01J2005/0077 ,  H04N5/33

Abstract: Various techniques are provided for calibrating a thermal imaging device using a non-contact temperature sensor. In one example, a method includes capturing a thermal image of a scene. The thermal image comprises a plurality of pixel values. The method also includes detecting, by a non-contact temperature sensor, a temperature value associated with a portion of the scene corresponding to a subset of the pixel values. The method also includes comparing the subset of pixel values with the detected temperature value. The method also includes generating a correction term based on the comparing. The method also includes applying the correction term to at least the subset of pixel values to radiometrically calibrate the subset of pixel values. Related systems and alignment processes are also provided.

公开(公告)号：US20130327937A1

公开(公告)日：2013-12-12

申请号：US13729522

申请日：2012-12-28

Applicant: KAI-LI JIANG ,  JUN ZHU ,  CHEN FENG ,  SHOU-SHAN FAN

Inventor： KAI-LI JIANG ,  JUN ZHU ,  CHEN FENG ,  SHOU-SHAN FAN

IPC: H01J37/26

CPC classification number: G01J1/4257 ,  B82Y30/00 ,  B82Y40/00 ,  G01J1/4228 ,  G01J5/023 ,  G01J5/0853 ,  G01J5/524 ,  G01J2005/0077 ,  H01J37/26

Abstract: A method for measuring intensity distribution of light includes a step of providing a carbon nanotube array having a top surface. The carbon nanotube array is located in an inert gas environment or a vacuum environment. A light source irradiates the top surface of the carbon nanotube array, to make the carbon nanotube array radiate a radiation light. An imaging element images the radiation light, to obtain an intensity distribution of the light source.

Abstract translation: 用于测量光的强度分布的方法包括提供具有顶表面的碳纳米管阵列的步骤。 碳纳米管阵列位于惰性气体环境或真空环境中。 光源照射碳纳米管阵列的顶表面，使得碳纳米管阵列辐射出辐射光。 成像元件对辐射光进行成像，以获得光源的强度分布。

公开(公告)号：US20130294480A1

公开(公告)日：2013-11-07

申请号：US13993468

申请日：2011-12-09

Applicant: Yoshiro Yamada ,  Juntaro Ishii

Inventor： Yoshiro Yamada ,  Juntaro Ishii

IPC: G01J5/02

CPC classification number: G01J5/02 ,  G01J5/0003 ,  G01J5/46 ,  G01J5/522 ,  G01J5/524 ,  G01J2005/0077

Abstract: The present invention provides a measuring method and a measuring system that are capable of accurately measuring the surface temperature of a surface to be measured, without being influenced by the emissivity distribution of the surface to be measured. A surface to be measured that has an emissivity distribution, a radiometer that measures a radiance distribution of the surface to be measured, and an auxiliary heat source installed in a specular reflection position from the radiometer with respect to the surface to be measured are prepared, radiances of two places having different emissivities of the surface to be measured are measured at two different auxiliary-heat-source temperatures, a reflectance ratio of the two places having the different emissivities is calculated on the basis of two measured radiances of the two places having the different emissivities, and temperature of the surface to be measured is obtained using the reflectance ratio and the measured radiances of the two places having the different emissivities.

Abstract translation: 本发明提供一种测量方法和测量系统，其能够精确地测量待测表面的表面温度，而不受待测表面的发射率分布的影响。 制备具有发射率分布的待测表面，测量待测表面的辐射度分布的辐射计和从辐射计相对于待测表面安装在镜面反射位置的辅助热源， 在两个不同的辅助热源温度下测量具有不同发射表面发射率的两个位置的辐射，具有不同发射率的两个地方的反射率比是基于两个具有 使用具有不同发射率的两个地方的反射率比和测量的辐射度来获得待测表面的不同发射率和温度。

公开(公告)号：US20060176930A1

公开(公告)日：2006-08-10

申请号：US11050862

申请日：2005-02-07

Applicant: Jung Yoo ,  Woon Jung ,  Sung Kim

Inventor： Jung Yoo ,  Woon Jung ,  Sung Kim

IPC: G01J5/00

CPC classification number: G01J5/0003 ,  G01J1/58 ,  G01J5/524 ,  G01J2005/0077 ,  G01K3/14 ,  G01K11/20

Abstract: A temperature measuring method has the steps of (a) coating a mixture of fluorescent dye on a surface of the micro device, (b) heating the micro device with a calibration heater, (c) acquiring an emission intensity image of the mixture with a camera by illuminating the surface of the micro device with a light, (d) averaging the emission intensity image by units of a plurality of pixels, (e) calculating a temperature calibration curve indicating a change of the emission intensity with respect to the temperature, from the image averaged by units of a plurality of pixels, and (f) removing the calibration heater, acquiring an emission intensity image by actually driving the micro device, and converting the acquired emission intensity image into a temperature, using the temperature calibration curve. According to the method, the temperature calibration curve is obtained through the averaged emission intensity image, and a temperature field on the micro device is measured using the temperature calibration curve. Thus, the emission intensity of fluorescent dye can correct a deviation occurring between each pixel of the image, thereby making it possible to precisely measure the temperature field in microscale.

Abstract translation: 温度测量方法具有以下步骤：（a）在微器件的表面上涂布荧光染料的混合物，（b）用校准加热器加热微器件，（c）用a获得混合物的发射强度图像 通过用光照亮微器件的表面，（d）以多个像素为单位平均发光强度图像;（e）计算表示相对于温度的发光强度变化的温度校准曲线， 从（f）去除校准加热器，通过实际驱动微型装置获取发射强度图像，并使用温度校准曲线将获取的发射强度图像转换成温度。 根据该方法，通过平均发射强度图像获得温度校准曲线，并使用温度校准曲线测量微器件上的温度场。 因此，荧光染料的发光强度可以校正图像的每个像素之间发生的偏差，从而可以以微观尺度精确地测量温度场。

公开(公告)号：US06398406B1

公开(公告)日：2002-06-04

申请号：US09587375

申请日：2000-06-01

Applicant: William G. Breiland ,  Alexander I. Gurary ,  Vadim Boguslavskiy

Inventor： William G. Breiland ,  Alexander I. Gurary ,  Vadim Boguslavskiy

IPC: G01J500

CPC classification number: G01J5/524

Abstract: A method for determining the temperature of a surface upon which a coating is grown using optical pyrometry by correcting Kirchhoff's law for errors in the emissivity or reflectance measurements associated with the growth of the coating and subsequent changes in the surface thermal emission and heat transfer characteristics. By a calibration process that can be carried out in situ in the chamber where the coating process occurs, an error calibration parameter can be determined that allows more precise determination of the temperature of the surface using optical pyrometry systems. The calibration process needs only to be carried out when the physical characteristics of the coating chamber change.

Abstract translation: 使用光学高温测量法确定涂层生长的表面的温度的方法，通过校正与涂层生长相关联的发射率或反射率测量的误差的基尔霍夫定律以及随后的表面热发射和传热特性的变化。 通过可以在发生涂覆过程的室中原位进行的校准过程，可以确定误差校准参数，其允许使用光学高温测量系统更精确地确定表面的温度。 只有当涂层室的物理特性发生变化时，才需要进行校准过程。

公开(公告)号：US5127742A

公开(公告)日：1992-07-07

申请号：US688014

申请日：1991-04-19

Applicant: Jacob Fraden

Inventor： Jacob Fraden

IPC: G01J5/06 ,  G01J5/08 ,  G01J5/52 ,  G01J5/62

CPC classification number: G01J5/524 ,  G01J5/62 ,  G01J2005/063 ,  G01J2005/623

Abstract: A thermal radiation sensor is joined with a shutter that is adapted for reversible interruption of radiation from an object to the sensor. The shutter includes an integral electrically operated heater for maintaining a portion of the shutter at a predetermined temperature as a thermal reference for the sensor. The sensor is alternatively exposed to radiation from the object and the thermal reference portion of the shutter, and provides a first signal representative of the radiation that it receives from the object and a second signal representative of the radiation that it receives from the reference portion. An electronic circuit is connected to the sensor for receiving the first and second signals, for calculating the temperature of the object, and for providing a signal representative of the calculated temperature.

Abstract translation: 热辐射传感器与适于可逆地中断从物体到传感器的辐射的快门连接。 快门包括用于将一部分快门保持在预定温度的整体电动加热器作为传感器的热参考。 传感器交替地暴露于来自物体和快门的热参考部分的辐射，并且提供表示从物体接收的辐射的第一信号和表示从参考部分接收的辐射的第二信号。 电子电路连接到传感器，用于接收第一和第二信号，用于计算物体的温度，并提供表示计算出的温度的信号。

公开(公告)号：US4854727A

公开(公告)日：1989-08-08

申请号：US114542

申请日：1987-10-26

Applicant: Michel Pecot ,  Jaim Nulman

Inventor： Michel Pecot ,  Jaim Nulman

IPC: G01J5/00 ,  G01J5/04

CPC classification number: G01J5/0003 ,  G01J5/0007 ,  G01J5/041 ,  G01J5/045 ,  G01J5/524 ,  G01J2005/0048 ,  G01J2005/068

Abstract: An improved method and apparatus are disclosed for calibrating the emissivity characteristics of a semiconductor wafer within a processing chamber by supporting a sample wafer on a graphite susceptor within the chamber and by comparing the temperature measured within the susceptor in close proximity to the center of the wafer with the temperature measured by the emission of radiation from the surface of the wafer through the walls of the processing chamber. Temperature measurements subsequently made from the radiation emitted from the surface of similar wafers are corrected with reference to the measurement made of the temperature within the susceptor on the sample wafer.

Abstract translation: 公开了一种改进的方法和装置，用于通过将样品晶片支撑在腔室内的石墨感受器上来校准处理室内的半导体晶片的发射率特性，并且通过将基座内测量的温度与晶片的中心相接近 其温度通过从晶片表面通过处理室的壁的辐射而被测量。 随后从相似晶片表面发射的辐射产生的温度测量参照由样品晶片上的基座内的温度进行的测量来校正。

公开(公告)号：US4465382A

公开(公告)日：1984-08-14

申请号：US239727

申请日：1981-03-02

Applicant: Tohru Iuchi ,  Kunitoshi Watanabe ,  Toshihiko Shibata ,  Tetsuro Kawamura

Inventor： Tohru Iuchi ,  Kunitoshi Watanabe ,  Toshihiko Shibata ,  Tetsuro Kawamura

IPC: G01J5/00 ,  G01J5/52 ,  G01J5/62 ,  G01J5/10 ,  G01K13/06

CPC classification number: G01J5/524 ,  G01J2005/0074 ,  G01J5/0044 ,  G01J5/62

Abstract: When a steel sheet or the like is heated in a furnace to a temperature somewhat higher than the room temperature and is still or moved, its temperature can be measured by detecting the radiant energy therefrom. The measurement is normally difficult due to the influence of background noise of radiant energy from the surroundings, change of the transmittance factor of the environment or atmosphere for radiant energy, and change of the emissivity of the object to be measured. In order to remove such causes of errors and to correctly measure the temperature by detecting radiant energy, a radiometer and a black body radiator are disposed symmetrically and specularly with respect to the normal to a surface of an object to be measured, and two different amounts of radiant energies are emitted from the black body radiator, and the emissivity of the object to be measured is determined from the detected values from the radiometer, the two temperature values of the black body radiator, and the diffusely reflecting factor associated with the object to be measured, whereby correct measurement of the surface temperature of the object to be measured can be done. Embodiments for implementing this method are proposed.

Abstract translation: 当钢板等在炉中加热到稍高于室温并仍然或移动的温度时，可以通过检测其温度来测量其温度。 由于来自周围的辐射能的背景噪声，辐射能的环境或大气的透过率因子的变化以及被测定物的发射率的变化，通常难以进行测量。 为了消除这种错误的原因并且通过检测辐射能来正确地测量温度，辐射计和黑体散热器相对于被测量物体的表面的法线对称且镜面地设置，并且两个不同的量 从黑体散热器发射辐射能，并且根据来自辐射计的检测值，黑体散热器的两个温度值和与该对象相关联的漫反射因数确定待测物体的发射率 可以进行测量对象物的表面温度的正确测量。 提出了实现该方法的实施例。

公开(公告)号：US2846882A

公开(公告)日：1958-08-12

申请号：US31069652

申请日：1952-09-20

Applicant: LEEDS & NORTHRUP CO

Inventor： GRAY WILLIAM T

IPC: G01J5/52

CPC classification number: G01J5/524

公开(公告)号：US08192077B2

公开(公告)日：2012-06-05

申请号：US12574096

申请日：2009-10-06

Applicant: Michael Twerdochlib

Inventor： Michael Twerdochlib

IPC: G01J5/02

CPC classification number: G01J5/0003 ,  G01J5/524 ,  G01J5/602 ,  G01J2005/0074

Abstract: A method for measuring the differential emissivity between two sites on the surface of a body and the temperature of the two sites. The method includes a plurality of measurements of the infrared radiation arising from each of the two sites under a number of different conditions. Some of the measurements include irradiation by external infrared radiation at a known wavelength and intensity. The infrared radiation arising from each of the sites may include emitted radiation, reflected ambient radiation, and reflected external radiation. Additionally, the temperature determined using the method described can be used to calibrate infrared imaging devices used to inspect the entire body.

Abstract translation: 一种用于测量身体表面两个位置与两个部位的温度之间的差异发射率的方法。 该方法包括在多个不同条件下从两个位置中的每一个产生的红外辐射的多个测量。 一些测量包括以已知波长和强度的外部红外辐射照射。 从每个地点产生的红外辐射可能包括发射的辐射，反射的环境辐射和反射的外部辐射。 另外，使用所述方法确定的温度可用于校准用于检查整个身体的红外成像装置。