MICROMECHANICAL STRUCTURE HAVING A SUBSTRATE AND A THERMOELEMENT, TEMPERATURE SENSOR AND/OR RADIATION SENSOR, AND METHOD FOR MANUFACTURING A MICROMECHANICAL STRUCTURE
    3.
    发明申请
    MICROMECHANICAL STRUCTURE HAVING A SUBSTRATE AND A THERMOELEMENT, TEMPERATURE SENSOR AND/OR RADIATION SENSOR, AND METHOD FOR MANUFACTURING A MICROMECHANICAL STRUCTURE 审中-公开
    具有基板和热敏元件的温度结构,温度传感器和/或辐射传感器以及用于制造微机械结构的方法

    公开(公告)号:US20090168836A1

    公开(公告)日:2009-07-02

    申请号:US12097891

    申请日:2006-11-24

    CPC classification number: G01J5/12

    Abstract: A micromechanical structure, a temperature and/or radiation sensor, and a method for manufacturing a micromechanical structure are suggested, the micromechanical structure including a substrate and a thermoelement having a reference contact and a measuring contact, the substrate having a main substrate plane), the thermoelement having a first material between the reference contact and the measuring contact and a second material between the measuring contact and a further reference contact, either the first material being situated over the second material or the second material being situated over the first material between the reference contact and the measuring contact in a direction perpendicular to the main substrate plane.

    Abstract translation: 提出了一种微机械结构,温度和/或辐射传感器以及微机械结构的制造方法,该微机械结构包括具有基准接触和测量接触的基片和热电偶,该基片具有主基片平面), 所述热电元件在所述参考接触件和所述测量接触件之间具有第一材料,以及在所述测量接触件和另一参考接触件之间的第二材料,所述第一材料位于所述第二材料上方或所述第二材料位于所述第一材料之间, 参考接触和测量接触在垂直于主基板平面的方向上。

    Sensor system
    5.
    发明申请
    Sensor system 有权
    传感器系统

    公开(公告)号:US20110203369A1

    公开(公告)日:2011-08-25

    申请号:US12931011

    申请日:2011-01-21

    Abstract: A sensor system includes a supporting element and a sensor element attached to the supporting element and having a main plane of extension. The supporting element has (i) at least one contact element for electrical contacting of the sensor system and (ii) at least one relief structure for stress decoupling, the at least one relief structure being situated in a plane parallel to the main plane of extension essentially between the at least one contact element and the sensor element.

    Abstract translation: 传感器系统包括支撑元件和附接到支撑元件并具有主平面延伸的传感器元件。 所述支撑元件具有(i)至少一个用于所述传感器系统的电接触的接触元件和(ii)用于应力解耦的至少一个浮雕结构,所述至少一个浮雕结构位于平行于所述主延伸平面的平面中 基本上在所述至少一个接触元件和所述传感器元件之间。

    Sensor system
    9.
    发明授权
    Sensor system 有权
    传感器系统

    公开(公告)号:US08671752B2

    公开(公告)日:2014-03-18

    申请号:US12931011

    申请日:2011-01-21

    Abstract: A sensor system includes a supporting element and a sensor element attached to the supporting element and having a main plane of extension. The supporting element has (i) at least one contact element for electrical contacting of the sensor system and (ii) at least one relief structure for stress decoupling, the at least one relief structure being situated in a plane parallel to the main plane of extension essentially between the at least one contact element and the sensor element.

    Abstract translation: 传感器系统包括支撑元件和附接到支撑元件并具有主平面延伸的传感器元件。 所述支撑元件具有(i)至少一个用于所述传感器系统的电接触的接触元件和(ii)用于应力解耦的至少一个浮雕结构,所述至少一个浮雕结构位于平行于所述主延伸平面的平面中 基本上在所述至少一个接触元件和所述传感器元件之间。

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