公开(公告)号：US06194705B1

公开(公告)日：2001-02-27

申请号：US09163480

申请日：1998-09-30

Applicant: Satoshi Nakada ,  Koji Ichida ,  Yuzuru Watanabe

Inventor： Satoshi Nakada ,  Koji Ichida ,  Yuzuru Watanabe

IPC: H01J944

CPC classification number: H01J9/42 ,  H01J2203/02

Abstract: A method and apparatus for detecting position deviation of an electron gun in which, by increasing the light utilization efficiency to render the field of sight lighter and by reducing the amount of reflected light from the grid surface, the reflected light from the electron beam emitting surface is lighter to enable an edge of an electron beam transmitting hole to be discerned accurately to detect the position deviation of the electron gun accurately. The linear polarized light is illuminated on the electron gun and the light reflected by this electron gun is observed by a light polarization unit to detect the position deviation between grids of the electron gun.

Abstract translation: 一种用于检测电子枪的位置偏差的方法和装置，其中通过增加光利用效率以使视野更亮，并且通过减少来自栅格表面的反射光的量，来自电子束发射表面的反射光 较轻以使电子束透过孔的边缘能够准确辨别，以便精确地检测电子枪的位置偏差。 在电子枪上照射线性偏振光，并通过光偏振单元观察由该电子枪反射的光，以检测电子枪格栅之间的位置偏差。

公开(公告)号：US20240128042A1

公开(公告)日：2024-04-18

申请号：US18547556

申请日：2022-02-22

Applicant: TWI Limited

Inventor： Colin RIBTON

IPC: H01J37/065 ,  H01J1/18 ,  H01J1/88 ,  H01J3/02

CPC classification number: H01J37/065 ,  H01J1/18 ,  H01J1/88 ,  H01J3/024 ,  H01J2201/19 ,  H01J2203/02

Abstract: The present invention relates to an electron gun cathode mount adapted at one end to secure a thermionic cathode and at the other end to be connected to an attachment member, wherein the electron gun cathode mount is structured so as to be capable of, when in use, reducing heat transfer from the thermionic cathode to the attachment member, and the material forming the electron gun cathode mount has a thermal conductivity of less than 10 Wm−1K−1 at the operating temperature of the thermionic cathode in a direction from the thermionic cathode to the attachment member. The present invention also relates to an electron gun assembly having the electron gun cathode mount installed therein.

公开(公告)号：US12132411B2

公开(公告)日：2024-10-29

申请号：US17763840

申请日：2019-10-07

Applicant: Hitachi High-Tech Corporation

Inventor： Ryo Kadoi ,  Wen Li ,  Naoya Ishigaki

IPC: H02M7/10 ,  H01J19/02 ,  H01J37/24 ,  H02M1/14 ,  H02M7/06 ,  H05H5/04

CPC classification number: H02M7/103 ,  H01J19/02 ,  H01J37/241 ,  H02M1/14 ,  H02M7/062 ,  H02M7/10 ,  H05H5/045 ,  H01J2203/02

Abstract: The invention provides a power supply module and a charged particle beam device that are capable of reducing ripple noise. A high-voltage generation circuit 101 includes booster circuits CPa and CPb of two systems that are configured to be symmetrical to each other, and performs a boosting operation by using a capacitive element and a diode in the booster circuits CPa and CPb of the two systems. The high-voltage generation circuit is housed in a housing and a reference power supply voltage is applied thereto. A left electrode 102a is fixedly provided in the vicinity of one of the booster circuits CPa and CPb of the two systems in the housing, and a right electrode 102b is fixedly provided in the vicinity of the other of the booster circuits CPa and CPb of the two systems in the housing. A stray capacitance adjustment circuit 100a adjusts capacitance values of stray capacitances of the booster circuits CPa and CPb of the two systems by electrically controlling an electrical connection characteristic between the left electrode 102a and the reference power supply voltage 104 and an electrical connection characteristic between the right electrode 102b and the reference power supply voltage 104.

公开(公告)号：US20110084590A1

公开(公告)日：2011-04-14

申请号：US12897338

申请日：2010-10-04

Applicant: Hideyasu Tashiro ,  Yohei Hashizume ,  Taro Hiroike ,  Fumikazu Kobayashi

Inventor： Hideyasu Tashiro ,  Yohei Hashizume ,  Taro Hiroike ,  Fumikazu Kobayashi

IPC: H01J1/02

CPC classification number: H01J1/3046 ,  H01J3/021 ,  H01J31/127 ,  H01J2201/30423 ,  H01J2203/02 ,  H01J2329/0423

Abstract: An electron-emitting device according to the present invention, comprises: an insulating member having a top face, a side face and a recess portion formed between the top face and the side face; a cathode electrode which is disposed on the side face and has an electron emitting portion located in a boundary portion between the side face and the recess portion; and a gate electrode which is disposed on the top face and of which an edge faces the electron emitting portion, wherein the boundary portion in which the electron emitting portion is located has concavity and convexity in a direction parallel to the top face.

Abstract translation: 根据本发明的电子发射器件包括：绝缘构件，其具有形成在顶面和侧面之间的顶面，侧面和凹部; 阴极，其设置在所述侧面上，并且具有位于所述侧面和所述凹部之间的边界部分中的电子发射部分; 以及栅电极，其设置在所述顶面上并且其边缘面向所述电子发射部分，其中所述电子发射部分所在的所述边界部分在与所述顶面平行的方向上具有凹凸。