公开(公告)号：ES2003495A6

公开(公告)日：1988-11-01

申请号：ES8602974

申请日：1986-11-11

Applicant: IBM

Inventor： POHL WOLFGANG D ,  GIMZEWSKI JAMES K ,  MURALT PAUL R

IPC: G11B5/60 ,  G11B21/21

Abstract: METODO Y APARATO PARA CONTROLAR LA ALTURA DE FLOTACION DE UNA CABEZA MAGNETICA SOBRE UN MEDIO DE REGISTRO MOVIL, EN DONDE EL METODO IMPLICA BAJAR DICHA CABEZA HASTA LA DISTANCIA AERODINAMICA DE LA SUPERFICIE (16) DE DICHO MEDIO DE REGISTRO, BAJAR MAS DICHA CABEZA HASTA PRODUCIR UNA CORRIENTE TUNEL ENTRE ELLA Y DICHA SUPERFICIE, Y MANTENER CONSTANTE DICHA CORRIENTE UTILIZANDO SUS DESVIACIONES RESPECTO DE UN VALOR PREDETERMINADO. EL APARATO COMPRENDE UN ELECTRODO YUNEL (9) FIJADO A UN MECANISMO (5) DE CONTROL DE DISTANCIA Y DOTADO DE UN ASIENTO (45, 47) BISELADO PARA DETECTAR ANTICIPADAMENTE ASPEREZAS QUE SE APROXIMAN A LA CABEZA AL ASENTARSE SOBRE LA SUPERFICIE (16) DEL MEDIO DE REGISTRO (3). EL INVENTO ES APLICABLE A LAS UNIDADES DE MEMORIA MAGNETICA DE ALMACENAMIENTO DE DATOS.

公开(公告)号：CA1252918A

公开(公告)日：1989-04-18

申请号：CA499457

申请日：1986-01-13

Applicant: IBM

Inventor： GIMZEWSKI JAMES K ,  POHL WOLFGANG D

IPC: H01J37/28 ,  B81B3/00 ,  G01B7/34 ,  G01N23/00 ,  G01N27/00 ,  G01Q10/04 ,  G01Q30/04 ,  G01Q30/18 ,  G01Q30/20 ,  G01Q60/10 ,  G01Q60/16 ,  G01Q70/02 ,  G01Q70/06 ,  G01Q70/18 ,  H01J37/20 ,  H04R19/00 ,  G01B7/28

Abstract: Scanning Tunneling Microscope This scanning tunneling microscope consists of a semiconductor chip (7) into which slots are etched to form a central portion (1) linked by a first pair of stripes (2, 3) to an intermediate portion (4) which in turn is linked by a second pair of stripes (5, 6) to the main body of the chip (7). The pairs of stripes (2, 3; 5, 6) have mutually orthogonal directions to allow the center portion (1) to perform movements in x- and y-direc-tions under the control of electrostatic forces created between the stripes (2, 3; 5, 6) and their opposite walls. The center portion (1) has formed into it at least one tongue (17) carrying an integrated, protuding tunnel tip (18) which is capable of being moved in z-direction by means of electrostatic forces between said tongue (17) and the bottom of a cavity below the tongue (17).

公开(公告)号：CA1308574C

公开(公告)日：1992-10-13

申请号：CA565614

申请日：1988-04-29

Applicant: IBM

Inventor： BINNIG GERD K ,  DUERIG URS T ,  POHL WOLFGANG D ,  ROHRER HEINRICH ,  GIMZEWSKI JAMES K

IPC: G01B7/34 ,  G01B11/30 ,  G01B21/30 ,  G01D5/26 ,  G01L1/08 ,  G01N23/00 ,  G01N37/00 ,  G01Q20/02 ,  G01Q60/38 ,  G01R33/038 ,  G11B9/00 ,  G11B9/14 ,  G11B11/00 ,  G11B11/10 ,  G11B17/32 ,  G01L1/14

Abstract: SZ 9-86-004 The atomic force sensor head comprises a cantilever beam (50) forming an integral part of a body (53) from which it extends such that it has a free end to carry a member (55) for interaction with a surface to be investigated. As said member (55) is brought close to said surface, atomic forces will cause a deflection of said cantilever (50). This deflection is translated into a variation of an electrical value, such as a capacitance. A capacitor (57) is formed by a pairof electrodes (51, 52) coated onto the cantilever beam (50) and said body (53), respectively. The deflection of said cantilever beam (50) causes a variation of the distance (s) between said electrodes (51, 52) and, hence, of the capacitance. An improvement of the sensitivity and stability of this arrangement is made possible by filling the gap between the said electrodes (51, 52) with materials (54, 56) having different dielectric constants and different thicknesses. With arelation of 1:10 of the dielectric constants and a thickness relation of 1:5, animprovement factor of about 40 can be obtained.

公开(公告)号：CA1290054C

公开(公告)日：1991-10-01

申请号：CA519019

申请日：1986-09-24

Applicant: IBM

Inventor： POHL WOLFGANG D ,  GIMZEWSKI JAMES K ,  MURALT PAUL R

IPC: G11B5/60 ,  G11B21/21

Abstract: SZ 9-85-01C Method and Apparatus for Controlling the Flying Height of the Head in a Magnetic Storage Unit The method involves the steps of lowering the magnetic head (8) to within aerodynamic distance from the surface (16) of a moving recording medium, enforced further lowering of the head (8) until a tunnel current occurs across the gap between head (8) and surface (16), and maintaining said tunnel current constant by using the deviations of the current from a predetermined value (which corresponds to a certain flying height). The apparatus comprises a tunnel electrode (9) forming an integral part of the head assembly which is attached to a distance control mechanism (5) permitting the positioning of the head assembly with a one-nanometer accuracy. The tunnel electrode (9) has a very slightly beveled shoulder (45, 47) ensuring early detection of asperities approaching the head while sitting on the surface (16) of the moving recording medium (3). Gradation of the potential between tunnel electrode (9) and surface (16) of the recording medium (3) is used to enhance the response to asperities.

公开(公告)号：DE69522815T2

公开(公告)日：2002-04-11

申请号：DE69522815

申请日：1995-07-24

Applicant: IBM

Inventor： GIMZEWSKI JAMES K ,  JUNG THOMAS A ,  SCHLITTLER RETO R

IPC: C30B23/02 ,  C30B29/54

公开(公告)号：BR8704432A

公开(公告)日：1988-05-24

申请号：BR8704432

申请日：1987-08-27

Applicant: IBM

Inventor： DUERIG URS THEODOR ,  GIMZEWSKI JAMES K ,  GRESCHNER JOHANN ,  POHL WOLFGANG D ,  WOLTER OLAF

IPC: G01B7/34 ,  G01B7/00 ,  G01B21/30 ,  G01D5/04 ,  G01L1/00 ,  G01L1/04 ,  G01N13/00 ,  G01N23/00 ,  G01N37/00 ,  G01Q20/04 ,  G01Q40/00 ,  G01Q60/38 ,  G01Q70/14 ,  H01J37/26 ,  H01J37/28

公开(公告)号：DE69522815D1

公开(公告)日：2001-10-25

申请号：DE69522815

申请日：1995-07-24

Applicant: IBM

Inventor： GIMZEWSKI JAMES K ,  JUNG THOMAS A ,  SCHLITTLER RETO R

IPC: C30B23/02 ,  C30B29/54

公开(公告)号：CA1305872C

公开(公告)日：1992-08-04

申请号：CA548420

申请日：1987-10-01

Applicant: IBM

Inventor： DUERIG URS T ,  GIMZEWSKI JAMES K ,  GRESCHNER JOHANN ,  POHL WOLFGANG D ,  WOLTER OLAF

IPC: G01B7/34 ,  G01B7/00 ,  G01B21/30 ,  G01D5/04 ,  G01L1/00 ,  G01L1/04 ,  G01N13/00 ,  G01N23/00 ,  G01N37/00 ,  G01Q20/04 ,  G01Q40/00 ,  G01Q60/38 ,  G01Q70/14 ,  H01J37/26 ,  H01J37/28

Abstract: The micromechanical sensor head is designed to measure forces down to 10-13 N. It comprises a common base from which a cantilever beam and a beam member extend in parallel. The cantilever beam carries a sharply pointed tip of a hard material, dielectric or not, for interaction with the surface of a sample to be investigated. Bulges forming a tunneling junction protrude from facing surfaces of said beams, the gap between said bulges being adjustable by means of electrostatic forces generated by a potential (Vd) applied to a pair of electrodes respectively coated onto parallel surfaces of said beams. The sensor head consists of one single piece of semiconductor material, such as silicon or gallium arsenide (or any other compounds thereof) which is fabricated to the dimensions required for the application by means of conventional semiconductor chip manufacturing techniques. SZ9-86-002

公开(公告)号：CA1283733C

公开(公告)日：1991-04-30

申请号：CA534217

申请日：1987-04-08

Applicant: IBM

Inventor： POHL WOLFGANG D ,  DUERIG URS T ,  GIMZEWSKI JAMES K

IPC: G01B7/34 ,  G01B21/30 ,  G01Q20/04 ,  G01Q80/00 ,  G11B9/00 ,  G11B9/08 ,  G11B9/14 ,  G11B17/34 ,  G11B19/20 ,  G11B21/00 ,  G11B25/04

Abstract: Direct Access Storage Unit The storage unit comprises an array of tunnel tips (13) arranged at tunneling distance from a storage medium (2) which is capable of permitting digital information to be written or read through variations of the tunneling current. Each tunnel tip (13) is supported on its own cantilever beam (12) extending across a cavity (14) formed in a common substrate (15). Each cantilever beam (12) as well as the bottom of each cavity (14) are covered with an electrically conducting layer (16, 18) enabling the distance between each one of the tunnel tips (13) and the surface of the storage medium (2) to be electrostatically controlled. The storage medium (2) is attached to the free end of a piezoceramic bender, the end in operation performing a circular motion so that each tunnel tip (13) scans its associated area of the storage medium (2) along a circular track.

公开(公告)号：CA1236592A

公开(公告)日：1988-05-10

申请号：CA495484

申请日：1985-11-15

Applicant: IBM

Inventor： BEDNORZ JOHANNES G ,  GIMZEWSKI JAMES K ,  REIHL BRUNO

IPC: H01J37/28 ,  H01J37/073 ,  H01J37/256 ,  G01N23/227

Abstract: Field-Emission Scanning Auger Electron Microscope The Auger electron microscope is equipped with a field-emission tip (10) maintained at an essentially constant distance above the surface of the specimen (7). The tip (10) may consist of a tungsten (100) whisker having a radius of ~50 nm at the apex, the working distance being on the order of 1mm. Auger electrons emitted from the surface of the specimen (7) are collected by an electron energy analyzer (11) for conventional processing. Mutual scanning displacement between tip (10) and specimen (7) is obtained by an xyz-drive module (6) which is also responsible for adjusting the working distance of the tip (10). The entire microscope set-up is mounted on vibration damping means (4, 5) and may be inserted into a vacuum system by means of an appropriate flange (1), if need be.