Abstract:
In a microfluidic assembly (20), a microfluidic device (I1) is provided with a body (4) in which at least a first inlet (7) for loading a fluid to analyse and a buried area (8) in fluidic communication with the first inlet (7) are defined. An analysis chamber (10') is in fluidic communication with the buried area (8) and an interface cover (23) is coupled in a fluid-tight manner above the microfluidic device (I1) . The interface cover (23) is provided with a sealing portion (35) in correspondence to the analysis chamber (10')/ adapted to assume a first configuration, at rest, in which it leaves the analysis chamber (10') open, and a second configuration, as a consequence of a stress, in which it closes in a fluid-tight manner the same analysis chamber.
Abstract:
A load-sensing device (10), arranged in a package (12) forming a chamber (24). The package (12) has a deformable substrate (21) configured, in use, to be deformed by an external force. A sensor unit (11) is in direct contact with the deformable substrate (21) and is configured to detect deformations of the deformable substrate. An elastic element (15) is arranged within of the chamber (24) and acts between the package (12) and the sensor unit (11) to generate, on the sensor unit, a force keeping the sensor unit in contact with the deformable substrate. For example, the deformable substrate is a base (21) of the package (12), and the elastic element is a metal lamina (15) arranged between the lid (22) of the package (12) and the sensor unit (11). The sensor unit (11) may be a semiconductor die integrating piezoresistors.
Abstract:
A semiconductor integrated device (51, 81; 91), comprising: a package (50) defining an internal space (8) and having an acoustic-access opening (28; 98b) in acoustic communication with an environment external to the package (50); a MEMS acoustic transducer (21), housed in the internal space (8) and provided with an acoustic chamber (6) facing the acoustic-access opening (28; 98b); and a filtering module (52; 82; 96), which is designed to inhibit passage of contaminating particles having dimensions larger than a filtering dimension (d 1 ; d MAX ) and is set between the MEMS acoustic transducer (21) and the acoustic-access opening (28; 98b). The filtering module defines at least one direct acoustic path between the acoustic-access opening (28; 98b) and the acoustic chamber (6).
Abstract:
A microelectromechanical microphone includes: a substrate (2); a sensor chip (5), integrating a microelectromechanical electroacoustic transducer (35); and a control chip (6) operatively coupled to the sensor chip (5). The sensor chip (5) and the control chip (6) are bonded to the substrate (2), and the sensor chip (5) in part overlies the control chip (6). The sensor chip (5) the has a first portion fixed to a face (6a) of the control chip (6) and comprises a transduction member (37) acoustically communicating with a sound port (11).
Abstract:
A multi-device module (61), comprising: a first substrate (23), which houses a first MEMS transducer (21, 1), designed to transduce a first environmental quantity into a first electrical signal, and an integrated circuit (22, 22'), coupled to the first MEMS transducer for receiving the first electrical signal; a second substrate (49), which houses a second MEMS transducer (41, 42), designed to transduce a second environmental quantity into a second electrical signal; and a flexible printed circuit (36), mechanically connected to the first and second substrates and electrically coupled to the integrated circuit and to the second MEMS transducer so that the second electrical signal flows, in use, from the second MEMS transducer to the integrated circuit.
Abstract:
The mirror group (30) is formed by a monolithic frame (31) bent along a bending line (C) and including a first and a second supporting portions (32, 33) carrying, respectively, a first and a second chips forming two micromirrors made using MEMS technology. The first and second supporting portions (32, 33) are arranged on opposite sides of the bending line of the frame (C), angularly inclined with respect to each other. The mirror group is obtained by separating a shaped metal tape carrying a plurality of frames, having flexible electric connection elements. After attaching the chips, the frames are precut, bent along the bending line, and separated.
Abstract:
A transducer module (10), comprising: a supporting substrate (23), having a first side (23a) and a second side (23b); a cap (27), which extends over the first side of the supporting substrate and defines therewith a first chamber (108) and a second chamber (109) internally isolated from one another; a first transducer (1) in the first chamber (8); a second transducer (42) in the second chamber (18); and a control chip (22), which extends at least partially in the first chamber and/or in the second chamber and is functionally coupled to the first and second transducers for receiving, in use, the signals transduced by the first and second transducers.
Abstract:
A transducer module (10), comprising: a supporting substrate (23), having a first side (23a) and a second side (23b); a cap (27), which extends over the first side of the supporting substrate and defines therewith a first chamber (108) and a second chamber (109) internally isolated from one another; a first transducer (1) in the first chamber (8); a second transducer (42) in the second chamber (18); and a control chip (22), which extends at least partially in the first chamber and/or in the second chamber and is functionally coupled to the first and second transducers for receiving, in use, the signals transduced by the first and second transducers.