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    Micro-electro-mechanical gyroscope having electrically insulated regions
    3.
    发明公开
    Micro-electro-mechanical gyroscope having electrically insulated regions 有权
    Mems-Kreisel mit elektrisch isolierten Bereiche

    公开(公告)号：EP1677073A1

    公开(公告)日：2006-07-05

    申请号：EP04425957.0

    申请日：2004-12-29

    Applicant: STMicroelectronics S.r.l.

    Inventor： Spinola Durante, Guido ,  Sassolini, Simone ,  Rusconi Clerici, Andrea

    IPC: G01C19/56

    CPC classification number: G01C19/5762 ,  G01C19/5747

    Abstract: Integrated gyroscope (1) including a suspended mass (10); mobile actuation electrodes (11) extending from the suspended mass; and a sensing mass (6) connected to the actuation mass (10) through coupling springs (25). The suspended mass (10) is formed by an external part (10a) and an internal part (10b), electrically separated by an electrical-insulation region (23) having a closed annular shape. The electrical-insulation region (23) is laterally completely surrounded by the external part (10a) and by the internal part (10, 10b). In one embodiment, the suspended mass (10) has the shape of a closed frame delimiting an opening (18), the sensing mass (20) is formed inside the opening (18) and is connected to the internal part (10b), and the mobile actuation electrodes (11) are connected to the external part (10a).

    Abstract translation: 集成陀螺仪（1），包括悬挂质量（10）; 从悬挂块延伸的移动致动电极（11） 以及通过联接弹簧（25）连接到致动质量块（10）的传感块（6）。 悬挂物质（10）由外部部分（10a）和内部部分（10b）形成，内部部分（10b）由具有闭合环形的电绝缘区域（23）电分离。 电绝缘区域（23）由外部部件（10a）和内部部件（10,10b）横向完全包围。 在一个实施例中，悬挂质量（10）具有限定开口（18）的封闭框架的形状，感测块（20）形成在开口（18）内部并连接到内部部分（10b），并且 移动致动电极（11）连接到外部部分（10a）。

    Microelectromechanical integrated sensor structure with rotary driving motion
    4.
    发明公开
    Microelectromechanical integrated sensor structure with rotary driving motion 有权
    传感器传感器

    公开(公告)号：EP1832841A1

    公开(公告)日：2007-09-12

    申请号：EP06425163.0

    申请日：2006-03-10

    Applicant: STMicroelectronics S.r.l.

    Inventor： Spinola Durante, Guido ,  Balzelli Ludovico, Alessandro ,  Zerbini, Sarah

    IPC: G01C19/56

    CPC classification number: G01C19/5712

    Abstract: A driving mass (3) of an integrated microelectromechanical structure (1) is moved with a rotary motion about an axis of rotation (z), and a first sensing mass (16a) is connected to the driving mass (3) via elastic supporting elements (20) so as to perform a first detection movement in the presence or a first external stress. The driving mass (3) is anchored to an anchorage (7) arranged along the axis of rotation by elastic anchorage elements (8); an opening (9a) is provided within the driving mass, and the first sensing mass (16a) is arranged within the opening. The elastic supporting and anchorage elements render the first sensing mass (16a) fixed to the driving mass (3) in the rotary driving motion, and substantially decoupled from the driving mass in the detection movement.

    Abstract translation: 集成的微机电结构（1）的驱动块（3）以围绕旋转轴线（z）的旋转运动移动，并且第一感测质量块（16a）经由弹性支撑元件 （20），以便在存在或第一外部应力的情况下执行第一检测运动。 驱动质量块（3）被锚固到通过弹性锚固元件（8）沿旋转轴线布置的锚固件（7）; 在驱动质量块内设有开口（9a），第一传感块（16a）设置在开口内。 弹性支撑和锚固元件使得第一感测质量块（16a）在旋转驱动运动中固定到驱动质量块（3），并且在检测运动中基本上与驱动质量块分离。

    Micro-electro-mechanical structure having electrically insulated regions and manufacturing process thereof
    8.
    发明公开
    Micro-electro-mechanical structure having electrically insulated regions and manufacturing process thereof 有权
    一种微机电结构与电隔离区，以及它们的制备方法

    公开(公告)号：EP1617178A1

    公开(公告)日：2006-01-18

    申请号：EP04425514.9

    申请日：2004-07-12

    Applicant: STMicroelectronics S.r.l.

    Inventor： Spinola Durante, Guido ,  Sassolini, Simone ,  Ferrera, Marco ,  Marchi, Mauro

    IPC: G01C19/56

    CPC classification number: G01C19/5769

    Abstract: Micro-electro-mechanical structure formed by a substrate (41) of semiconductor material and a suspended mass (10, 20) extending above the substrate (41) and separated therefrom by an air gap (55). An insulating region (23, 24) of a first electrically insulating material extends through the suspended mass (10, 20) and divides it into at least one first electrically insulated suspended region and one second electrically insulated suspended region (10a, 10b, 20a, 20b). A plug element (46) of a second electrically insulating material different from the first electrically insulating material is formed underneath the insulating region (23, 24) and constitutes a barrier between the insulating region and the air gap (55) for preventing removal of the insulating region during fabrication, when an etching agent is used for removing a sacrificial layer and forming the air gap.

    Abstract translation: 由半导体材料与悬挂质量（10，20）的基板（41）形成的微机电结构的基片（41）和从通过在空气间隙（55）隔开有上方延伸。 一个第一电绝缘材料制成的绝缘区域（23，24）通过所述悬挂质量（10，20）延伸，并且它分成至少一个第一电绝缘的悬浮区域和至少一个第二电绝缘的悬浮区域（10A，10B，20A， 20B）。 从第一电绝缘材料不同的第二电绝缘材料制成的插头元件（46）被形成在所述绝缘区下面（23，24）和用于防止去除的构成绝缘区域和所述空气间隙（55）之间的阻挡 制造中，当蚀刻剂用于去除牺牲层和形成空气间隙期间绝缘区域。

    Integrated gyroscope of semiconductor material with at least one sensitive axis in the sensor plane
    9.
    发明公开
    Integrated gyroscope of semiconductor material with at least one sensitive axis in the sensor plane 有权
    与至少一个集成陀螺仪的敏感轴在传感器平面由半导体材料制成

    公开(公告)号：EP1365211A1

    公开(公告)日：2003-11-26

    申请号：EP02425320.5

    申请日：2002-05-21

    Applicant: STMicroelectronics S.r.l.

    Inventor： Spinola Durante, Guido ,  Zerbini, Sarah ,  Merassi, Angelo

    IPC: G01C19/56 ,  G01P15/00 ,  G01P15/125 ,  G01P9/04

    CPC classification number: G01C19/5747

    Abstract: An integrated gyroscope (1), including an acceleration sensor (23) formed by: a driving assembly (16); a sensitive mass (6) extending in at least one first and second directions (X, Y) and being moved by the driving assembly (16) in the first direction (X); and by a capacitive sensing electrode (20), facing the sensitive mass. The acceleration sensor (23) has an rotation axis (A) parallel to the second direction (Y), and the sensitive mass (6) is sensitive to forces acting in a third direction (Z) perpendicular to the other directions. The capacitive sensing electrode (20) is formed by a conductive material region extending underneath the sensitive mass (6) and spaced therefrom by an air gap.

    Abstract translation: 一种集成陀螺仪（1）包括在由形成加速度传感器（23）：一驱动组件（16）; 一个敏感质量块（6）延伸的至少一个第一和第二方向（X，Y），并通过在第一方向（X）的驱动组件（16）被移动; 和由面对敏感质量的电容感测电极（20）。 加速度传感器（23）具有上旋转轴线（A）平行于第二方向（Y），和敏感质量块（6）是在第三方向（Z）垂直的其他方向作用的力是敏感的。 电容感测电极（20）由导电材料区域延伸的敏感质量块（6），并在空气间隙从那里间隔开的下面形成。

    Integrated gyroscope of semiconductor material
    10.
    发明公开
    Integrated gyroscope of semiconductor material 有权
    Aus Halbleitermaterial hergestellter integrierter Kreisel

    公开(公告)号：EP1253399A1

    公开(公告)日：2002-10-30

    申请号：EP01830277.8

    申请日：2001-04-27

    Applicant: STMicroelectronics S.r.l.

    Inventor： Spinola Durante, Guido ,  Zerbini, Sarah ,  Gardella, Simone

    IPC: G01C19/56 ,  G01P9/04

    CPC classification number: G01C19/5747

    Abstract: The gyroscope (1) is formed by a driving system (16) including a driving mass (5) having an open concave shape; an accelerometer including a sensing mass (6) and comprising mobile sensing electrodes (18); a linkage (24) connecting the driving mass (5) to the sensing mass (6). The sensing mass is surrounded on three sides by the driving mass and has a peripheral portion not facing the sensing mass. The mobile sensing electrodes (18) extend integral with the sensing mass from the peripheral portion not facing the driving mass (5) and are interleaved with fixed sensing electrodes (19a, 19b). Thereby, there are no passing electrical connections extending below the sensing mass (6). Moreover the linkage includes springs (24) placed equidistant from the center of gravity (G2) of the accelerometer, and the gyroscope (1) is anchored to the substrate with anchoring springs (10) placed equidistant from the center of gravity (G1) of the assembly formed by the driving system (16) and by the accelerometer (23).

    Abstract translation: 陀螺仪（1）由包括具有开口凹形的驱动块（5）的驱动系统（16）形成; 包括感测块（6）并包括移动感测电极（18）的加速度计; 将驱动质量块（5）连接到传感块（6）的连杆（24）。 感测质量被驱动质量块三面围绕，并且具有不面向感测质量的周边部分。 移动感测电极（18）与不与驱动质量块（5）相对的周边部分与传感质量块成一整体，并与固定感测电极（19a，19b）交错。 因此，在传感块（6）下方没有延伸的电气连接。 此外，连杆包括从加速度计的重心（G2）等距离放置的弹簧（24），并且陀螺仪（1）通过与从重心（G1）等距离放置的锚定弹簧（10）锚定到基板 所述组件由所述驱动系统（16）和所述加速度计（23）形成。

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