Abstract:
This invention relates to the immobilization of toxic, e.g., radioactive, materials in a silicate glass or silica gel matrix for extremely long periods of time. Toxic materials, such as radioactive wastes containing radioactive cations, which may be in the form of liquids, or solids dissolved or dispersed in liquids or gases, are incorporated into a glass or silica gel matrix, having alkali metal, Group Ib metal and/or ammonium cations bonded to silicon atoms of said glass or silica gel through divalent oxygen linkages, by a process which involves the ion exchange of said toxic or radioactive cations with said alkali metal, Group Ib metal and/or ammonium cations to bind said toxic or radioactive cations to silicon atoms of said glass or silica gel through said silicon-bonded divalent oxygen linkages. Thereafter, the resulting glass or silica gel now characterized by toxic or radioactive cations bonded to silicon atoms through divalent oxygen linkages can be stored, or packaged in suitable containers, or disposed of as by burial, and/or sintered to collapse the pores thereof.
Abstract:
Quartz glass of high thermal stability is produced from a SiO.sub.2 solution or sol which is substantially free of alkali and alkaline earth metal oxides and contains chromium and/or manganese in about 0.05 to 20% by weight of the SiO.sub.2 expressed as Cr.sub.2 O.sub.3 and Mn.sub.2 O.sub.3. The quartz glass upon heating above 1100.degree. C forms cristobalite having an average crystallite size of about 100 to 500 A. Articles therefrom retain their physical and mechanical properties at high temperatures. The materials are suited for producing fibers by the usual methods of spinning from solutions or sols and, as such, or as fibers they are suited for use in reinforcement and insulation and in making flameproof textiles.
Abstract:
To provide a technique with which a quartz glass jig and a doped quartz glass jig are regenerated by completely removing the impurities which are attached to the surface and the impurities which have diffused into the interior from quartz glass jigs which have been used in semiconductor production processes and then carrying out working repair and removing the contamination from the working processes as well. After use, the impurities are removed from the aforementioned quartz glass jigs in the said purification treatment process which includes a purification treatment process in which the quartz glass jigs are subjected to a purification treatment in a gaseous atmosphere which includes a halogen element at a temperature within the region above a prescribed temperature.
Abstract:
PROBLEM TO BE SOLVED: To provide an F-doped quartz glass material used in the lithographic application operating at a shorter wavelength than about 300 nm, which shows a lower polarization-induced birefringence or preferably, does not show the polarization-induced birefringence substantially even after being subjected to 10 million pulses of linearly polarized pulsed laser beam at 157 nm having a fluence of 250 μJ×cm -2 ×pulse -1 and a pulse length of 30 ns. SOLUTION: The F-doped synthetic quartz glass material contains, by weight, less than 50 ppm of Cl, less than 50 ppb of Na, less than 50 ppb in total of transition metals, and 0.1-5,000 ppm of fluorine. COPYRIGHT: (C)2008,JPO&INPIT
Abstract:
A doped silica-titania glass article is provided that includes a glass article having a glass composition comprising (i) a silica-titania base glass, (ii) a fluorine dopant, and (iii) a second dopant. The fluorine dopant has a concentration of fluorine of up to 5 wt. % and the second dopant comprises one or more oxides selected from the group consisting of Al, Nb, Ta, B, Na, K, Mg, Ca and Li oxides at a total oxide concentration from 50 ppm to 6 wt. %. Further, the glass article has an expansivity slope of less than 0.5 ppb/K2 at 20° C. The second dopant can be optional. The composition of the glass article may also contain an OH concentration of less than 100 ppm.