公开(公告)号：EP1020887A3

公开(公告)日：2006-05-03

申请号：EP00109547.0

申请日：1996-03-01

Applicant: OSRAM SYLVANIA INC.

Inventor： Schoenback, Karl H. ,  Peterkin, Frank E. ,  Byszewski, Wojciech W. ,  Dharamsi, Amin N.

IPC: H01J1/02 ,  H01J61/09 ,  H01S3/06 ,  H01S3/03

CPC classification number: H01J3/025 ,  H01J1/025 ,  H01J3/04 ,  H01J17/04 ,  H01J17/06 ,  H01J27/08 ,  H01J61/067 ,  H01J61/09 ,  H01J61/12 ,  H01J61/305 ,  H01J61/66 ,  H01J61/72 ,  H01J61/78 ,  H01S3/03 ,  H01S3/0382 ,  H01S3/0385 ,  H01S3/2383

Abstract: The invention is directed to a discharge device and a cathode for use in such a discharge device.
By providing a dielectric layer between a first and a second electrode, e.g. between a cathode and an anode, said dielectric layer having an opening aligned with a micro hollow of the first electrode, the light efficiency of the discharge device can be improved.

公开(公告)号：EP1479090B1

公开(公告)日：2006-03-22

申请号：EP03702521.0

申请日：2003-01-24

Applicant: Forschungszentrum Karlsruhe GmbH

Inventor： SCHULTEISS, Christoph ,  BUTH, Lothar-Heinz-Otto

IPC: H01J1/02 ,  H01J3/02 ,  H05H1/24

CPC classification number: H01J3/025 ,  H01J1/025 ,  H05H1/52

Abstract: The invention relates to a channel spark source, triggered by gas discharge, for generating stable, focussed electron beams. Said source is characterised by a gas supply with a pressure differential of 10-4 Pascal between the hollow cathode and the channel outlet, so that the multiplication of the charge carriers in the trigger plasma ignites a hollow cathode gas discharge in a reliable manner and that the beam exits the system without a predisposition for instability or for touching and damaging the internal channel of the system.

公开(公告)号：EP1479090A2

公开(公告)日：2004-11-24

申请号：EP03702521.0

申请日：2003-01-24

Applicant: Forschungszentrum Karlsruhe GmbH

Inventor： SCHULTEISS, Christoph ,  BUTH, Lothar-Heinz-Otto

IPC: H01J37/077

CPC classification number: H01J3/025 ,  H01J1/025 ,  H05H1/52

Abstract: The invention relates to a channel spark source, triggered by gas discharge, for generating stable, focussed electron beams. Said source is characterised by a gas supply with a pressure differential of 10-4 Pascal between the hollow cathode and the channel outlet, so that the multiplication of the charge carriers in the trigger plasma ignites a hollow cathode gas discharge in a reliable manner and that the beam exits the system without a predisposition for instability or for touching and damaging the internal channel of the system.

公开(公告)号：EP0907960A2

公开(公告)日：1999-04-14

申请号：EP98916816.0

申请日：1998-02-28

Applicant: Thielen, Marcus

Inventor： Thielen, Marcus

IPC: H01J61 ,  H01J1 ,  H01J9

CPC classification number: H01J9/022 ,  H01J1/025 ,  H01J61/0672 ,  H01J61/0677 ,  H01J61/09

Abstract: The invention concerns cold electrodes for gas discharges with an electrically conductive carrier material (1) on which an emission coating (3) is disposed, the photoelectric output work of the material of the emission coating (3) being less than that of the carrier material (1) or less than 5.6*10-19 joule/electron. The emission coating (3) can in particular contain yttrium. The electrode preferably has the form of a hollow body and can be embedded in a glass body (8).

公开(公告)号：KR101585889B1

公开(公告)日：2016-02-02

申请号：KR1020140023495

申请日：2014-02-27

Applicant: 한국과학기술원

Inventor： 최원호 ,  임유봉 ,  김호락 ,  박주영 ,  선종호

IPC: H01J23/04

CPC classification number: H01J1/025 ,  B64G1/405 ,  H01J37/32596

Abstract: 본발명은고효율할로우음극와이를적용한음극시스템에관한것으로서, 두개 이상의내화금속파트로구성되는튜브; 상기튜브의끝단에각각형성되는가스공급부및 가스출구; 상기튜브의내부에장착되는인서트;를포함한다. 본발명에따르면, 두개 이상의물질을이용하여할로우음극을구성하여열적안정성, 수명및 효율을높일수 있을뿐만아니라그에따른원가를절감할수 있는효과가있다.

公开(公告)号：KR100876491B1

公开(公告)日：2008-12-31

申请号：KR1020047007134

申请日：2002-11-11

Applicant: 사에스 게터스 에스.페.아.

Inventor： 갈리통낫타,알렉산드로 ,  보피토,클라우디오 ,  코라쟈,알레시오

IPC: H01J61/02

CPC classification number: H01J1/025 ,  H01J7/18 ,  H01J9/02 ,  H01J61/09 ,  H01J61/26

Abstract: A hollow cathode having at least a portion of the inner, outer or both surfaces coated with a layer of a getter material is described. Some methods for the production of the hollow cathode of the invention are also described, which include cathodic and electrophoretic deposition of the getter layer onto the hollow cathode.

公开(公告)号：US09526158B1

公开(公告)日：2016-12-20

申请号：US14814622

申请日：2015-07-31

Applicant: KLA-Tencor Corporation

Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Yanming Zhao ,  Gildardo R. Delgado

IPC: H02J1/02 ,  H05H1/24 ,  H01J61/09 ,  H01J1/02 ,  H01J23/033

CPC classification number: H05H1/24 ,  H01J1/025 ,  H01J23/033 ,  H01J61/09 ,  H01J61/28 ,  H01J61/52 ,  H01J61/54 ,  H01J61/545 ,  H01J65/042

Abstract: A laser sustained plasma light source having a cell with a gas volume contained within the cell. At least one laser is directed into the gas volume, for sustaining a plasma within the gas volume, which plasma produces a light. Means are provided for continuously providing the gas volume to the plasma in a laminar flow. A reflector collects the light and provides the light to a desired location.

Abstract translation: 一种激光持续等离子体光源，其具有包含在电池内的气体体积的电池。 至少一个激光器被引导到气体体积中，用于维持等离子体产生光的气体体积内的等离子体。 提供了用于在层流中连续地向等离子体提供气体体积的装置。 反射器收集光并将光提供到期望的位置。

公开(公告)号：US08344338B2

公开(公告)日：2013-01-01

申请号：US11126513

申请日：2005-05-09

Applicant: Paul B. Lundquist ,  Stephen William McCahon

Inventor： Paul B. Lundquist ,  Stephen William McCahon

IPC: G01G4/00

CPC classification number: H01J1/025 ,  H01S3/0007

Abstract: Systems and methods presented herein are generally directed to enhancing electrical discharge. A hollow conical electrode may be provided to discharge electrical energy in a directed manner. The conical electrode has two openings: a larger entrance opening; and a smaller exit opening. These openings are configured to allow radiated energy to pass therethrough and form a preferential path of electrical conduction. The larger entrance opening has a surface with a radius of curvature that is larger than that of the second smaller exit opening. The smaller exit opening directs electrical energy to the path because of stronger electric fields. In one embodiment, a protruding electrode element is configured with the smaller exit opening to further enhance electrical discharge by focusing electric fields in the vicinity of the protruding electrode.

Abstract translation: 本文提出的系统和方法通常涉及增强放电。 可以提供中空圆锥形电极以以有向的方式排出电能。 锥形电极具有两个开口：较大的入口; 和一个较小的出口。 这些开口被配置成允许辐射能量通过并形成优先的导电路径。 较大的入口开口具有曲率半径大于第二较小出口的曲面半径的表面。 由于电场较强，较小的出口将电能引导到路径。 在一个实施例中，突出电极元件配置有较小的出口，以通过聚焦突出电极附近的电场来进一步增强放电。

公开(公告)号：US08221179B2

公开(公告)日：2012-07-17

申请号：US11981412

申请日：2007-10-31

Applicant: J. Gary Eden ,  Sung-Jin Park ,  Clark J. Wagner

Inventor： J. Gary Eden ,  Sung-Jin Park ,  Clark J. Wagner

IPC: H01J17/49

CPC classification number: H01J17/49 ,  H01J1/025 ,  H01J9/00 ,  H01J9/02 ,  H01J25/50 ,  H01J61/09 ,  H01J61/305 ,  H01J61/62 ,  H01J63/04 ,  H01J65/046

Abstract: The cavity 102 defines an empty volume formed in the insulator 108 has its walls defined by the insulator 108 and may extend through either (or both) the first electrode 106 or the second electrode 104, in which case the first electrode and/or second electrode also define the walls of the cavity 102. The cavity 102 is preferably cylindrical and has a diameter of 0.1 μm-1 mm. More preferably, the diameter ranges from 0.1 μm-500 μm, 1 μm-100 μm, or 100 μm-500 μm. The cavity 102 will be filled with a gas that contacts the cavity walls, fills the entire cavity 102 and is selected for its breakdown voltage or light emission properties at breakdown. Light is produced when the voltage difference between the first electrode 106 and the second electrode 104 creates an electric field sufficiently large to electrically break down the gas (nominally about 104 V-cm). This light escapes from the microcavity 102 through at least one end of the cavity 102.

Abstract translation: 空腔102限定在绝缘体108中形成的空的体积具有由绝缘体108限定的壁，并且可延伸穿过第一电极106或第二电极104（或两者）中的一个或两者，在这种情况下，第一电极和/或第二电极 还限定空腔102的壁。空腔102优选是圆柱形的并且具有0.1μm-1mm的直径。 更优选的是，直径为0.1μm〜500μm，1μm〜100μm或100μm〜500μm。 空腔102将填充有与空腔壁接触的气体，填充整个空腔102，并且在击穿时选择其击穿电压或发光特性。 当第一电极106和第二电极104之间的电压差产生足够大的电场以电气分解气体（标称约为104V-cm）时产生光。 该光通过空腔102的至少一端从微腔102逸出。

公开(公告)号：US07728498B2

公开(公告)日：2010-06-01

申请号：US11639639

申请日：2006-12-16

Applicant: Chris M. Shonka ,  James R. Kahn ,  Harold R. Kaufman

Inventor： Chris M. Shonka ,  James R. Kahn ,  Harold R. Kaufman

IPC: H01J1/20

CPC classification number: H01J1/025

Abstract: In accordance with one embodiment, the hollow cathode is comprised of a first tantalum tube, tantalum foil, and a second tantalum tube. The foil is in the form of a spiral winding around the outside of the first tube and is held in place by the second tube, which surrounds the foil. One end of the second tube is approximately flush with one end of the first tube. The other end of the second tube extends to a cathode support through which the working gas flows. To start the cathode, a flow of ionizable inert gas, usually argon, is initiated through the hollow cathode and out the open end of the first tube. An electrical discharge is then started between an external electrode and the first tube. When the first tube is heated to operating temperature, electrons are emitted from the open end of the first tube.

Abstract translation: 根据一个实施例，空心阴极包括第一钽管，钽箔和第二钽管。 箔是围绕第一管的外侧的螺旋缠绕的形式，并且被包围箔的第二管保持在适当的位置。 第二管的一端大致与第一管的一端齐平。 第二管的另一端延伸到阴极支撑件，工作气体通过该支撑件流动。 为了启动阴极，可以通过空心阴极引出电离惰性气体（通常为氩气）流出第一管的开口端。 然后在外部电极和第一管之间开始放电。 当第一管被加热到工作温度时，从第一管的开口端发射电子。