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公开(公告)号：KR101242626B1
公开(公告)日：2013-03-19
申请号：KR1020100129236
申请日：2010-12-16
Applicant: 한국표준과학연구원
Abstract: 본 발명은 디스플레이, 반도체, 태양전지 등 공정챔버내 부품들의 처짐에 따른 변형을 실시간으로 측정할 수 있는 검사 장치에 관한 것이다.
본 발명에 따른 처짐 감지 장치에 따르면, 시간이 지남에 따라 처짐 현상이 발생하는 부품들을 실시간으로 모니터하여, 부품의 변형으로 발생되는 각종 공정이슈들을 사전에 방지할 수 있는 효과가 있다.-
公开(公告)号：KR101107639B1
公开(公告)日：2012-01-25
申请号：KR1020100053835
申请日：2010-06-08
Applicant: 한국표준과학연구원
IPC: H01L21/66 , H01L21/205
Abstract: 본 발명은 반도체 제조 공정에 있어서 화학 증착법에 이용되는 전구체의 증기압을 실시간으로 측정하기 위한 측정 시스템 및 방법에 관한 것이다.
본 발명에 따른 반도체 제조공정을 위한 전구체의 실시간 증기압 측정 시스템에 의하면, 온도변화에 따른 전구체의 석출 및 전구체의 미소 탈기에 따른 압력 변화의 가능성을 현저하게 줄임으로써 보다 정확한 증기압을 실시간으로 측정할 수 있는 특징이 있다. 이에 따라 획득되는 증기압 관련 열역학적 데이터는 화학 증착법을 사용하는 반도체 제조공정 등에서 유용하게 활용할 수 있다.-
公开(公告)号：KR1020110034430A
公开(公告)日：2011-04-05
申请号：KR1020090091953
申请日：2009-09-28
Applicant: 한국표준과학연구원
Abstract: PURPOSE: A particle beam mass spectroscopy is provided to improve the productivity and yield by monitoring the nano particles. CONSTITUTION: An aerodynamic lens(10) forms a particle beam by accelerating the gas flow. An electron gun(30) forms charged particle beam by ionizing the particle beam and accelerating thermoelectron. A deflector(40) refracts the charged particle beam by the kinetic energy to charge ratio. A sensor(50) measures current by the charged particle beam. A magnetic field generating unit creates restriction magnet field for restricting thermoelectron.
Abstract translation: 目的：提供粒子束质谱以通过监测纳米颗粒来提高生产率和产率。 构成：气动透镜（10）通过加速气流形成粒子束。 电子枪（30）通过电离粒子束并加速热电子形成带电粒子束。 偏转器（40）通过动能与充电比折射带电粒子束。 传感器（50）通过带电粒子束测量电流。 磁场产生单元产生用于限制热电子的限制磁场。
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公开(公告)号：KR1020100125648A
公开(公告)日：2010-12-01
申请号：KR1020090044459
申请日：2009-05-21
Applicant: 한국표준과학연구원
Abstract: PURPOSE: A surface contaminant preventing device, which is protected from the particles and by-products generated in a vacuum process, is provided to increase the reliability of equipment or sensor by easily analyzing the particles and by-products. CONSTITUTION: A surface contaminant preventing device comprises a sound wave generator(70) and a wedge unit(80). The sound wave generator is installed in the outside of a beam emitting zone of an emitting window(40) and a beam incident zone of an incidence window(30). The lower-part of the wedge unit is contacted with the beam emitting zone of an emitting window and the beam incident zone of an incidence window.
Abstract translation: 目的：提供防止在真空过程中产生的颗粒和副产物的表面污染物防止装置，通过容易地分析颗粒和副产物来增加设备或传感器的可靠性。 构成：表面防污染装置包括声波发生器（70）和楔形单元（80）。 声波发生器安装在发射窗（40）的射束发射区域和入射窗（30）的光束入射区域的外侧。 楔形单元的下部与发射窗的光束发射区和入射窗的光束入射区接触。
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公开(公告)号：KR100989140B1
公开(公告)日：2010-10-20
申请号：KR1020080021062
申请日：2008-03-06
Applicant: 한국표준과학연구원
Abstract: 본 발명은 산화아연 나노와이어에 전이금속을 도핑하는 방법에 관한 것으로, 상세하게는 a) 기판 상부에 아연박막을 형성시키는 단계; b) 아연박막이 형성된 기판을 아연염, 환원제 및 전이금속염을 함유하는 수용액에 침지하는 단계; 및 c) 상기 수용액에 초음파를 가하여 상기 아연박막 상에 전이금속이 도핑된 산화아연 나노와이어를 생성 및 성장시키는 단계;를 포함하는 특징이 있다.
초음파, 공동효과, 산화아연, 나노와이어, 불순물, 전이금속, 도핑-
Patent Agency Ranking
公开(公告)号：KR1020100051307A
公开(公告)日：2010-05-17
申请号：KR1020080110415
申请日：2008-11-07
Applicant: 한국표준과학연구원
IPC: H01L21/3065 , H01L21/205 , H01L21/66
CPC classification number: H01J37/32935 , G01N21/67
Abstract: PURPOSE: A method for evaluating plasma resistance using arc is provided to evaluate the durability of a component by applying arc to a chamber and measuring emitted particles from the coating layer of a component. CONSTITUTION: The specimen of a coating component and an optical emission spectroscopy(OES) are arranged in a chamber(P1). Plasma is generated in the chamber in order to apply arc to the specimen of the coating component(P2). Particles are emitted from the specimen by the arc. The OES analyzes the particles in order to quantify the peak size of aluminum or oxygen component(P3). Based on the analysis data, plasma resistance is evaluated(P4).
Abstract translation: 目的：提供一种使用电弧评估等离子体电阻的方法，以通过对室施加电弧并从组件的涂层测量发射的颗粒来评估组件的耐久性。 构成：将涂层组分和光学发射光谱（OES）的样品设置在室（P1）中。 在室中产生等离子体，以便向涂层组分（P2）的样品施加电弧。 颗粒通过电弧从试样中排出。 OES分析颗粒以量化铝或氧组分（P3）的峰值尺寸。 根据分析数据，评价血浆电阻（P4）。
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107.发明公开
公开(公告)号：KR1020090074589A
公开(公告)日：2009-07-07
申请号：KR1020080000426
申请日：2008-01-02
Applicant: 한국표준과학연구원
Abstract: A method for measuring the size distribution of particle and a recording medium storing a program to implement the method are provided to accurately and successively measure the size distribution of the particle includes in aerosol. A method for measuring the size distribution of particle comprises: a step of passing purifier and aerosol through a DMA(differential mobility analyzer)(S30); a step of measuring the discharge voltage and inner pressure of the DMA(S40); a step of separating the particle included in the aerosol to a specific collection of particles of m(S50); a step of getting an electrical mobility centroid of a DMA transfer function belonging to a K particle collection(S70); a step of estimating the electrical mobility distribution of the particle charged at the charging step(S80); a step of estimating the total particle number concentration of the separated K particle collections(S90); a step of estimating the electrical mobility distribution of the particle before the charging step(S120); and a step of measuring the size distribution of the particle included in the aerosol(S130).
Abstract translation: 提供用于测量颗粒尺寸分布的方法和存储用于实施该方法的程序的记录介质，以精确地并连续地测量气溶胶中颗粒的尺寸分布。 用于测量颗粒尺寸分布的方法包括：通过DMA（差示迁移率分析仪）使净化器和气溶胶通过的步骤（S30）; 测量DMA的放电电压和内部压力的步骤（S40）; 将包含在气溶胶中的颗粒分离成m的特定颗粒集合的步骤（S50）; 获得属于K粒子收集的DMA传递函数的电移动质心的步骤（S70）; 估计在充电步骤中充电的颗粒的电迁移率分布的步骤（S80）; 估计分离的K颗粒收集物的总颗粒数浓度的步骤（S90）; 在充电步骤之前估计颗粒的电迁移率分布的步骤（S120）; 以及测量包含在气溶胶中的颗粒的尺寸分布的步骤（S130）。
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公开(公告)号：KR1020090036636A
公开(公告)日：2009-04-15
申请号：KR1020070101765
申请日：2007-10-10
Applicant: 한국표준과학연구원
IPC: H01L21/02
Abstract: A structure for diagnosis system of reaction process is provided to easily control the incident window of the analytical laboratory and temperature of the emergent window according to the temperature of by-product. The by-product is stored in the analytical laboratory(4130). The incident window(4131) and emergent window(4122) are installed at the analytical laboratory. The light ray is delivered to the analytical laboratory through the incident window and emergent window. The first gas receiver(4110) is formed in the outer side surface of the analytical laboratory. The first gas receiver is connected with the second gas receiver. The receiving part incident window(4111) is installed at the first gas receiver. The light ray is delivered to the first gas receiver through the receiving part incident window. The receiving part emergent window is installed at the second gas receiver.
Abstract translation: 提供反应过程诊断系统的结构，根据副产品的温度，轻松控制分析实验室的入口窗口和出风口的温度。 副产物储存在分析实验室（4130）。 事件窗口（4131）和紧急窗口（4122）安装在分析实验室。 光线通过事件窗口和紧急窗口传送到分析实验室。 第一气体接收器（4110）形成在分析实验室的外侧表面。 第一气体接收器与第二气体接收器连接。 接收部分入射窗口（4111）安装在第一气体接收器处。 光线通过接收部件入射窗口被传送到第一气体接收器。 接收部分紧急窗口安装在第二气体接收器处。
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公开(公告)号：KR1020080064661A
公开(公告)日：2008-07-09
申请号：KR1020070001757
申请日：2007-01-05
Applicant: 한국표준과학연구원
IPC: G01F23/296 , G01F23/26 , G01F23/00
CPC classification number: G01F23/296 , G08B3/10 , G08B21/182
Abstract: A liquid level measuring apparatus with a disturbance prevention device is provided to reduce a defect rate of products by surely measuring the level of liquid chemicals in real time while the chemicals are filled in a container. A liquid level measuring apparatus includes a container(200), a liquid level measuring unit, an A/D converter, a controller, an alarm, and a disturbance prevention device(1000). The container contains the liquid chemicals for use in a chemical deposition process. The liquid level measuring unit includes an ultrasonic sensor(510). The ultrasonic sensor is arranged on the bottom of the container for measuring the level of the liquid chemicals. The A/D converter is connected to the liquid level measuring unit and converts analog signals to digital signals. The controller is connected to the A/D converter and checks whether the level of the liquid chemicals is lower than the standard. The alarm is connected to the controller and operates when the level of the liquid chemicals is lower than the standard. The disturbance prevention device prevents disturbance of the liquid chemicals in the container while the liquid chemicals is compensated through a supply pipe(310).
Abstract translation: 提供一种具有防干扰装置的液面测量装置，用于通过在将化学品填充到容器中的同时实时测量液体化学品的水平来减少产品的缺陷率。 液位测量装置包括容器（200），液位测量单元，A / D转换器，控制器，报警器和防扰装置（1000）。 该容器包含用于化学沉积过程的液体化学品。 液位测量单元包括超声波传感器（510）。 超声波传感器布置在容器的底部，用于测量液体化学品的含量。 A / D转换器连接到液位测量单元，并将模拟信号转换为数字信号。 控制器连接到A / D转换器，检查液体化学品的液面是否低于标准。 报警器连接到控制器，当液体化学物质的含量低于标准值时，进行操作。 防扰装置通过供给管（310）补偿液体化学物质，防止容器内的液体化学物质的干扰。
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公开(公告)号：KR1020080064660A
公开(公告)日：2008-07-09
申请号：KR1020070001756
申请日：2007-01-05
Applicant: 한국표준과학연구원
IPC: G01F23/296 , G01F23/28 , G01F23/00
CPC classification number: G01F23/296 , G01F23/60 , G08B3/10 , G08B21/182 , H01L21/0228 , H03M1/001
Abstract: A liquid level measuring apparatus is provided to reduce a defect rate of products by surely measuring the level of liquid chemicals while the chemicals are filled in a container. A liquid level measuring apparatus includes a container(200), a liquid level measuring unit, an A/D converter, a controller, an alarm, and a sub liquid level measuring unit. The container contains the liquid chemicals for use in a chemical deposition process. The liquid level measuring unit includes an ultrasonic sensor(510). The ultrasonic sensor is arranged on the bottom of the container for measuring the level of the liquid chemicals. The A/D converter is connected with the liquid level measuring unit and converts analog signals to digital signals. The controller is connected to the A/D converter and checks whether the level of the liquid chemicals is lower than the standard or not. The alarm is connected to the controller and operates when the level of the liquid chemicals is lower than the standard. The sub liquid level measuring unit is installed to allow the liquid level measuring unit to accurately measure the level despite disturbance of the liquid chemicals.
Abstract translation: 提供了一种液位测量装置，用于通过在化学品被填充到容器中时可靠地测量液体化学品的水平来降低产品的缺陷率。 液位测量装置包括容器（200），液位测量单元，A / D转换器，控制器，报警器和副液位测量单元。 该容器包含用于化学沉积过程的液体化学品。 液位测量单元包括超声波传感器（510）。 超声波传感器布置在容器的底部，用于测量液体化学品的含量。 A / D转换器与液位测量单元连接，将模拟信号转换为数字信号。 控制器连接到A / D转换器，检查液体化学品的液位是否低于标准。 报警器连接到控制器，当液体化学物质的含量低于标准值时，进行操作。 副液位测量单元被安装以允许液位测量单元精确地测量水平，尽管液体化学物质的干扰。
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