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公开(公告)号：KR1020100051307A
公开(公告)日：2010-05-17
申请号：KR1020080110415
申请日：2008-11-07
Applicant: 한국표준과학연구원
IPC: H01L21/3065 , H01L21/205 , H01L21/66
CPC classification number: H01J37/32935 , G01N21/67
Abstract: PURPOSE: A method for evaluating plasma resistance using arc is provided to evaluate the durability of a component by applying arc to a chamber and measuring emitted particles from the coating layer of a component. CONSTITUTION: The specimen of a coating component and an optical emission spectroscopy(OES) are arranged in a chamber(P1). Plasma is generated in the chamber in order to apply arc to the specimen of the coating component(P2). Particles are emitted from the specimen by the arc. The OES analyzes the particles in order to quantify the peak size of aluminum or oxygen component(P3). Based on the analysis data, plasma resistance is evaluated(P4).
Abstract translation: 目的：提供一种使用电弧评估等离子体电阻的方法，以通过对室施加电弧并从组件的涂层测量发射的颗粒来评估组件的耐久性。 构成：将涂层组分和光学发射光谱（OES）的样品设置在室（P1）中。 在室中产生等离子体，以便向涂层组分（P2）的样品施加电弧。 颗粒通过电弧从试样中排出。 OES分析颗粒以量化铝或氧组分（P3）的峰值尺寸。 根据分析数据，评价血浆电阻（P4）。
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公开(公告)号：KR100956616B1
公开(公告)日：2010-05-11
申请号：KR1020080036396
申请日：2008-04-18
Applicant: 한국표준과학연구원
CPC classification number: G01L9/0072
Abstract: 본 발명은 다이아프램을 이용한 정전용량형 압력 측정 장치에 관한 것으로, 보다 상세하게는 내부에 다이아프램이 설치되는 센서 하우징에 압력 가변용기를 고정 설치함으로써 게터 펌프 없이 대기압 이하의 압력을 측정할 수 있을 뿐만 아니라, 대기압 이상의 압력도 측정할 수 있는 다이아프램을 이용한 압력 측정 장치에 관한 것이다.
다이아프램, 정전용량, 압력, 전극, 압력 가변용기-
公开(公告)号：KR100805926B1
公开(公告)日：2008-02-21
申请号：KR1020060079182
申请日：2006-08-22
Applicant: 한국표준과학연구원
Abstract: An integral calibration apparatus for a low vacuum gauge and a high vacuum gauge is provided to calibrate the gauges very precisely and stably by preventing a degassing phenomenon when calibrating the low vacuum gauge and preventing a pressure fluctuation phenomenon when calibrating the high vacuum gauge. An integral calibration apparatus for a low vacuum gauge and a high vacuum gauge includes a pressure vessel(100), a low vacuum reference gauge(110), a high vacuum reference gauge(120), a calibrated gauge(160), an ion gauge(170), a thermometer(130), a gate valve(140), a pump device, a heating device, and a gas injection device. The pressure vessel are partitioned into a calibration vessel(340) and a discharge vessel(350) by a separation plate(320) and has an orifice(330) on the separation plate. The low vacuum reference gauge, the high vacuum reference gauge, and the calibrated gauge are attached to the calibration vessel to measure a vacuum pressure inside. The ion gauge and the thermometer are attached to the discharge vessel to measure a pressure and a temperature inside. The gate valve is placed on a side of the discharge vessel to control discharge of a gas inside. The pump device is connected to the discharge side of the gate valve. The heating device is attached to the pressure vessel and heats the pressure vessel to a predetermined temperature. The gas injection device is installed in the calibration vessel and injects a gas inside the calibration vessel.
Abstract translation: 提供了一个用于低真空计和高真空计的积分校准装置，通过在校准低真空计时防止排气现象并在校准高真空计时防止压力波动现象，非常精确和稳定地校准仪表。 用于低真空计和高真空计的整体校准装置包括压力容器（100），低真空参考量规（110），高真空参考量规（120），校准量规（160），离子计 （170），温度计（130），闸阀（140），泵装置，加热装置和气体注入装置。 压力容器通过分隔板（320）分隔成校准容器（340）和放电容器（350），并在分离板上具有孔口（330）。 低真空参考表，高真空参考表和校准表附在校准容器上以测量内部的真空压力。 离子计和温度计连接到放电容器，以测量内部的压力和温度。 闸阀被放置在放电容器的一侧以控制内部气体的排放。 泵装置连接到闸阀的排放侧。 加热装置连接到压力容器并将压力容器加热至预定温度。 气体注入装置安装在校准容器中并在校准容器内注入气体。
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公开(公告)号：KR1020090025823A
公开(公告)日：2009-03-11
申请号：KR1020070090955
申请日：2007-09-07
Applicant: 한국표준과학연구원
CPC classification number: G01L27/005
Abstract: A calibration/test device and method of a vacuum gauge are provided to calibrate the vacuum gauge of a vacuum system being in operation with a gauge correction device connected to the vacuum gauge. A calibration/test device of a vacuum gauge includes a vacuum valve(16) opening and closing pipelines(14,18) connecting the vacuum gauge(12) to be corrected and a vacuum system(10), and a gauge correction device(100) connected to the vacuum gauge. The gauge correction device comprises a reference vacuum gauge(110), a vacuum connection valve(170), a vacuum chamber(120), a gate valve(132), and an air escape(134) which are successively equipped in the vacuum gauge to be corrected, a gas source(150) for generating pressure in the vacuum chamber, a leak valve(160) which controls the gas flow within the gas source and supplies it to the vacuum chamber, and a vacuum gauge(140) for vacuum chamber for measuring the vacuum pressure within the vacuum chamber.
Abstract translation: 提供真空计的校准/测试装置和方法来校准真空系统的真空计，其中真空系统正在与连接到真空计的量规校正装置一起工作。 真空计的校准/测试装置包括：真空阀（16）连接要校正的真空计（12）和真空系统（10）的开启和关闭管道（14,18）以及量规校正装置（100） ）连接到真空计。 仪表校正装置包括依次装在真空计中的参考真空计（110），真空连接阀（170），真空室（120），闸阀（132）和排气口（134） 要被校正的气体源（150），用于在所述真空室中产生压力;泄漏阀（160），其控制所述气体源内的气体流并将其供应到所述真空室;以及真空计（140），用于真空 用于测量真空室内的真空压力的室。
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公开(公告)号：KR1020100111375A
公开(公告)日：2010-10-15
申请号：KR1020090029762
申请日：2009-04-07
Applicant: 한국표준과학연구원
IPC: H01L21/205
CPC classification number: H01L21/28556 , H01L21/02046 , H01L21/324
Abstract: PURPOSE: The low-temperature vapor deposition of the metallic foil the pure metallic foil can be formed on the low temperature. The deposition specification can be improved through the adjustment of the hydrogen gas and Lewis base. CONSTITUTION: The low-temperature vapor deposition of the metallic foil. By using the metal organic precursor and the amine compound including the metal covalent-bonding in one or more ligand, the metallic foil is formed on the substrate of the low temperature. The selective metal thin film deposition process characterizes to more include the hydrogen process of input.
Abstract translation: 目的：金属箔的低温气相沉积可以在低温下形成纯金属箔。 通过调整氢气和路易斯碱可以提高沉积规格。 构成：金属箔的低温气相沉积。 通过在一个或多个配位体中使用金属有机前体和包含金属共价键的胺化合物，在低温基板上形成金属箔。 选择性金属薄膜沉积工艺的特征在于包括氢过程的输入。
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Patent Agency Ranking
公开(公告)号：KR1020090116041A
公开(公告)日：2009-11-11
申请号：KR1020080041717
申请日：2008-05-06
Applicant: 한국표준과학연구원
Abstract: PURPOSE: A pressure measuring device using a magnetostrictive acoustic oscillator is provided to minimize the leakage and to increase ultrasonic wave transfer efficiency. CONSTITUTION: A pressure measuring device using a magnetostrictive acoustic oscillator comprises a magnetostriction transceiver vibrator(100), a controller(20) and a pressure measurement part(60). The magnetostriction transceiver vibrator is comprised of a vibrator(150) equipped inside a side wall of a trough(10). The controller authorizes the current to an excitation coil part(120). The pressure measurement part measures the inner pressure of the trough based on the ultrasonic signal received by a receiving coil section(140) and an ultrasonic signal outputted from a vibrator.
Abstract translation: 目的：提供一种使用磁致伸缩声振荡器的压力测量装置，以使泄漏最小化并提高超声波传输效率。 构成：使用磁致伸缩声振荡器的压力测量装置包括磁致伸缩收发器振动器（100），控制器（20）和压力测量部件（60）。 磁致伸缩收发器振动器包括设置在槽（10）的侧壁内的振动器（150）。 控制器授权电流到励磁线圈部分（120）。 压力测量部分基于由接收线圈部分（140）接收的超声波信号和从振动器输出的超声波信号来测量槽的内部压力。
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公开(公告)号：KR1020090055058A
公开(公告)日：2009-06-02
申请号：KR1020070121776
申请日：2007-11-28
Applicant: 한국표준과학연구원
Abstract: A pressure measurement device of a component shut tightly and a measurement method thereof are provided to measure a sample pressure of a sealed container regardless of whether gas and liquid exist inside the seal sample. A measurement method of a component shut tightly comprises: a step(S200) which measures an initial pressure inside a chamber by loading a sealed sample in the chamber; a step(S300) which opens the sealed sample; and a step(S400) which extracts the sample pressure inside the sealed sample by measuring an opened pressure within the chamber after opening the sealed sample.
Abstract translation: 提供关闭部件的压力测量装置及其测量方法来测量密封容器的样品压力，而不管密封样品内是否存在气体和液体。 闭合部件的测量方法包括：步骤（S200），其通过将密封样品装载在室中来测量室内的初始压力; 打开密封样品的步骤（S300）; 以及通过在打开密封样品之后测量室内的打开压力来提取密封样品内的样品压力的步骤（S400）。
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公开(公告)号：KR1020080017929A
公开(公告)日：2008-02-27
申请号：KR1020060079797
申请日：2006-08-23
Applicant: 한국표준과학연구원
CPC classification number: G01L21/34 , G01L21/32 , G01D21/02 , G01L9/0091
Abstract: An apparatus and a method for measuring the composition and pressure of gas discharged from an ion gauge by using residual gas analyzer are provided to prevent unexpected chemical reaction. An apparatus for measuring the composition and pressure of gas discharged from an ion gauge comprises a vacuum container(200), ion gauges(100a,100b), a residual gas analyzer(240), a pump unit, and a heating unit. The vacuum container includes a pressure container(210) and a discharge container(220) which are divided by a partition(235), wherein the partition is provided with an orifice(230). The ion gauge is attached to the pressure container of the vacuum container to discharge gas in vacuum. The residual gas analyzer is attached to the pressure container to measure composition and pressure of residual gas. The pump unit is located at one part of the discharge container to discharge inner gas. The heating unit is attached to the vacuum container to heat the vacuum container.
Abstract translation: 提供一种用于测量通过使用残留气体分析仪从离子计排出的气体的组成和压力的装置和方法，以防止意外的化学反应。 用于测量从离子计放出的气体的成分和压力的装置包括真空容器（200），离子计（100a，100b），残留气体分析器（240），泵单元和加热单元。 真空容器包括由隔板（235）分隔的压力容器（210）和排放容器（220），其中隔板设有孔口（230）。 离子计附着在真空容器的压力容器中以在真空中排出气体。 残留气体分析仪附着在压力容器上，以测量残留气体的组成和压力。 泵单元位于排出容器的一部分以排出内部气体。 加热单元附接到真空容器以加热真空容器。
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公开(公告)号：KR1020070045413A
公开(公告)日：2007-05-02
申请号：KR1020050101657
申请日：2005-10-27
Applicant: 한국표준과학연구원
CPC classification number: G01L27/005 , C21D11/00
Abstract: 본 발명은 부피가 서로 다른 진공체임버에 기체를 순차적으로 확장시켜 진공체임버의 압력을 계산하는 정적법 표준기에서 절대교정된 기준진공게이지를 이용하여 진공게이지의 이동이 없이 in-situ 상태에서 오리피스 기체흐름 제어 방법에 따라 진공게이지의 비교교정이 가능한 장치의 개발에 관한 사항이다. 관련 세부기술로는 정적법에 의한 기준진공게이지 절대교정과 오리피스 기체흐름 제어 방법에 의한 진공게이지 비교교정 결합기술, 저진공에서 고진공 영역까지의 기준압력 발생기술 및 교정기술, 오리피스 기체흐름 안정화 방법에 의한 진공게이지 비교교정에 관한 기법을 포함한다. 본 발명은 진공게이지의 절대 교정과 비교교정이 각각 다른 장치에서만 가능했던 것을 두 교정 장치를 결합한 새로운 장치의 개발로 교정시간 단축과 이동교정 등 교정효율 향상에 관한 것이다.
정적법, 기준진공게이지, 절대교정, 비교교정, 결합기술, 기준압력, 발생기술, 교정기술, 오리피스 기체흐름 안정화 방법, 진공게이지, 이동교정, 교정효율-
公开(公告)号：KR100670950B1
公开(公告)日：2007-01-17
申请号：KR1020050093263
申请日：2005-10-05
Applicant: 한국표준과학연구원
Abstract: A system for measuring ultra-high vacuum pressure of a vacuum container by photoelectron coefficient is provided to block the leakage of the vacuum and easily measure the vacuum pressure by minimizing the attachment of the sensors installed by penetrating the vacuum chamber or the vacuum container. A system for measuring ultra-high vacuum pressure of a vacuum container(10) by photoelectron coefficient is composed of the vacuum container formed with the predetermined vacuum; a laser irradiation unit irradiating a laser(72) through a transparent window(49); a fine channel plate(70) installed in the vacuum container to detect the photoelectron; an ion amplifier(42) connected with the fine channel plate to amplify the number of the photoelectron; a spectrum analyzer(44) connected with the ion amplifier to analyze the number of the amplified photoelectron; and a current-pressure converter(46) converting the output current of the spectrum analyzer into the corresponding pressure.
Abstract translation: 提供了一种用于通过光电子系数测量真空容器的超高真空压力的系统，以阻止真空泄漏并且通过最小化穿透真空室或真空容器安装的传感器的附着来容易地测量真空压力。 用于通过光电子系数测量真空容器（10）的超高真空压力的系统由形成有预定真空的真空容器组成; 激光照射单元，其通过透明窗口照射激光器; 安装在真空容器中以检测光电子的细通道板（70）; 离子放大器（42），与所述精细通道板连接以放大所述光电子的数量; 与离子放大器连接的频谱分析器（44），以分析放大光电子的数量; 以及将频谱分析仪的输出电流转换成相应的压力的电流压力转换器（46）。
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