Abstract:
An apparatus for inspecting the surface of a sheet-like object has a movable stage with an object mounted thereon; a source for lighting the object on the stage, particularly by making a plurality of illumination lights respectively having different wavelengths incident on the surface of the object from respective predetermined directions; image pickup device for fetching the image of the object under illumination of the light as image data or the images of parts of the object as image data obtained on the respective different wavelengths; image data processing device for inspecting the image data for defects; and a device for synchronizing control either for flashing the light at a predetermined time interval just after the stage commences its movement, synchronously with fetching the image data or for flashing the light and simultaneously fetching the image data obtained on the respective different wavelengths, synchronously with the object on the stage reaching respective predetermined positions while moving the stage.
Abstract:
An automatic structure analyzing/processing apparatus for surface structure of material includes a structure observing device for observing structure of a surface of material to produce an electrical image signal thereof, a sample stage disposed opposite to the observing means an image processing device for converting the image signal from the structure observing device to digital signal and expanding or contracting a desired image reproduced from a memory means or combining a plurality of images reproduced from the memory means to produce an image signal, the memory device storing the digital signal processed by the image processing device, and a display device for displaying the image signal produced from the image processing device as an image, whereby the structure of the surface of material is stored in the memory as the image and examination of the structure can be made readily in a short time.
Abstract:
The disclosure is directed to systems and methods for precisely measuring birefringence properties of large- format samples of optical elements. A gantry-like configuration is employed for precise movement of birefringence measurement system components relative to the sample. There is also provided an effective large-format sample holder that adequately supports the sample to prevent induced birefringence therein while still presenting a large area of the sample to the unhindered passage of light.
Abstract:
다채널 형광 검출 모듈 및 이를 포함하는 핵산 분석 시스템이 개시된다. 일 실시예에 따른 핵산 분석 시스템은, 미세 유체 소자를 포함하는 다수의 카트리지들이 각각 배치될 수 있는 다수의 적재부; 직선 운동을 하는 가동자를 구비하는 리니어 액추에이터를 포함하는 이송 모듈; 및 상기 가동자에 고정되어 상기 가동자와 함께 이동하는 것으로, 상기 카트리지에 여기광을 조사하고 상기 카트리지 내의 샘플로부터 발생한 형광을 검출하는 형광 검출 모듈;을 포함하며, 상기 다수의 적재부들은 상기 가동자의 직선 운동 궤도를 따라 일렬로 배열될 수 있다.
Abstract:
PURPOSE: A substrate inspecting apparatus is provided to be capable of carrying out many kinds of inspecting processes. CONSTITUTION: A substrate inspecting apparatus(100) is provided with the first stage(160) for supporting a substrate, the first image capture part(110) for capturing the first image of the substrate edge portion, the second stage(170) for supporting the substrate transferred from the first stage, the second image capture part(120) for capturing the second image of the substrate, and a transfer part(180) for transferring the substrate from the first stage to the second stage. The substrate inspecting apparatus further includes a data processing part(144) connected with the first and second image capture part for inspecting the results of an EBR(Edge Bead Removal) process and an EEW(Edge Exposure of Wafer) process for the substrate by using the first image of the substrate and detecting the pattern defect generated on the substrate by using the second image of the substrate.
Abstract:
This invention concerns a transmission Raman spectroscopy apparatus comprising a light source (101) for generating a light profile (110) on a sample (102), a photodetector (103) having at least one photodetector element (103a), collection optics (104) arranged to collect Raman scattered light transmitted through the sample (102) and direct the Raman light onto the at least one photodetector element (103a) and a support (109) for supporting the sample (102). The support (102) and light source (101) are arranged such that the light profile (110) can be moved relative to the sample (102) in order that the at least one photodetector element (103 a) receives Raman scattered light generated for different locations of the light profile (110) on the sample (102).
Abstract:
An apparatus (110) (and associated method) for inspecting a steering column assembly (10) including at least one motorized roller support assembly (118) that is adapted to rotatably support the steering column assembly at least partially along its length, and at least one optical scanning device (158) adapted to optically scan a feature of Interest of the steering column assembly while the shaft of the steering column assembly is rotated for gathering data for identifying one or more deviations from one or more predetermined values for the feature of interest.