Apparatus for inspecting the surface of materials
    101.
    发明授权
    Apparatus for inspecting the surface of materials 失效
    用于检查材料表面的装置

    公开(公告)号:US5298963A

    公开(公告)日:1994-03-29

    申请号:US842073

    申请日:1992-02-26

    Abstract: An apparatus for inspecting the surface of a sheet-like object has a movable stage with an object mounted thereon; a source for lighting the object on the stage, particularly by making a plurality of illumination lights respectively having different wavelengths incident on the surface of the object from respective predetermined directions; image pickup device for fetching the image of the object under illumination of the light as image data or the images of parts of the object as image data obtained on the respective different wavelengths; image data processing device for inspecting the image data for defects; and a device for synchronizing control either for flashing the light at a predetermined time interval just after the stage commences its movement, synchronously with fetching the image data or for flashing the light and simultaneously fetching the image data obtained on the respective different wavelengths, synchronously with the object on the stage reaching respective predetermined positions while moving the stage.

    Abstract translation: 用于检查片状物体的表面的装置具有安装在其上的物体的可移动台; 特别是通过从各个预定方向制造分别具有入射到物体表面上的不同波长的多个照明光源,用于点亮舞台上的物体的源; 图像拾取装置,用于在照明光下取出对象的图像作为图像数据或对象的部分的图像作为在各个不同波长上获得的图像数据; 图像数据处理装置,用于检查图像数据的缺陷; 以及用于同步控制的装置,用于在阶段开始其移动之后的预定时间间隔闪光,同步获取图像数据或闪烁光,同时取出在各个不同波长上获得的图像数据,与 舞台上的物体在移动舞台时达到相应的预定位置。

    Automatic structure analyzing/processing apparatus
    102.
    发明授权
    Automatic structure analyzing/processing apparatus 失效
    自动结构分析/处理设备

    公开(公告)号:US5038035A

    公开(公告)日:1991-08-06

    申请号:US376664

    申请日:1989-07-06

    CPC classification number: G02B21/002 G01N15/1475 G01N2021/8887 G01N2201/103

    Abstract: An automatic structure analyzing/processing apparatus for surface structure of material includes a structure observing device for observing structure of a surface of material to produce an electrical image signal thereof, a sample stage disposed opposite to the observing means an image processing device for converting the image signal from the structure observing device to digital signal and expanding or contracting a desired image reproduced from a memory means or combining a plurality of images reproduced from the memory means to produce an image signal, the memory device storing the digital signal processed by the image processing device, and a display device for displaying the image signal produced from the image processing device as an image, whereby the structure of the surface of material is stored in the memory as the image and examination of the structure can be made readily in a short time.

    X선 분석 장치
    103.
    发明公开
    X선 분석 장치 审中-实审
    X射线分析装置

    公开(公告)号:KR1020150110287A

    公开(公告)日:2015-10-02

    申请号:KR1020140184608

    申请日:2014-12-19

    Abstract: (과제) 광대한시료스테이지중에있어서정밀한위치결정을행하기위한조작성을향상시킬수 있는 X선분석장치를제공하는것. (해결수단) 시료대와, 시료에대해 1차 X선을조사하는 X선원과, 시료로부터발생하는 2차 X선을검출하는검출기와, 시료대와 1차 X선의상대적인위치를조정하는위치조정기구와, 시료대위의시료관찰상을촬상하는관찰기구와, 시료관찰상을관찰용화면(9a)에표시하는디스플레이부와, 디스플레이부의화면위의위치를포인터(P)로입력가능하고드래그앤드드롭조작이가능한입력수단을가진컴퓨터를구비하고, 컴퓨터가, 입력수단에의해관찰용화면의중심영역(A1) 내에서드래그조작되어홀드상태에서중심영역밖의임의의위치까지포인터(P)가이동되면, 중심영역에대한임의의위치의방향및 거리에따른이동방향및 이동속도로시료대를이동시키는기능을갖고있다.

    Abstract translation: 本发明的目的在于提供一种X射线分析装置,其可以提高用于确定宽样品台内的精确位置的可操作性。 本发明的X射线分析装置包括:样品台; 用于向样品照射第一X射线的X射线源; 用于检测从样品产生的第二X射线的检测器; 位置控制单元,用于控制样品台和第一X射线的相对位置; 观察单元,用于对样品台上的样品的观察外观进行成像; 显示单元,用于在观察屏幕(9a)上显示所述样本的观察外观; 以及用于用指针(P)输入显示单元的屏幕上的位置并具有可以拖放的输入装置的计算机。 当通过在用于由输入装置观察的屏幕的中心区域(A1)内被拖动而将指针(P)移动到中心区域外的随机位置时,计算机沿着方向移动样本台,并且 根据随机位置到中心区域的方向和距离的运动速度。

    대형 샘플의 복굴절 측정 방법 및 장치
    104.
    发明公开
    대형 샘플의 복굴절 측정 방법 및 장치 无效
    大型样品的双向测量

    公开(公告)号:KR1020050075357A

    公开(公告)日:2005-07-20

    申请号:KR1020057006352

    申请日:2003-10-08

    CPC classification number: G01N21/23 G01N2021/9513 G01N2201/101 G01N2201/103

    Abstract: The disclosure is directed to systems and methods for precisely measuring birefringence properties of large- format samples of optical elements. A gantry-like configuration is employed for precise movement of birefringence measurement system components relative to the sample. There is also provided an effective large-format sample holder that adequately supports the sample to prevent induced birefringence therein while still presenting a large area of the sample to the unhindered passage of light.

    Abstract translation: 本公开涉及用于精确测量光学元件的大格式样本的双折射性质的系统和方法。 双折射测量系统部件相对于样品的精确运动采用了龙门式结构。 还提供了一种有效的大幅面样品保持器,其充分地支撑样品以防止其中引起的双折射,同时仍然将大面积的样品提供给无阻碍的光通过。

    베어링 케이지 검사장치
    106.
    发明授权
    베어링 케이지 검사장치 有权
    轴承检查装置

    公开(公告)号:KR101572570B1

    公开(公告)日:2015-11-27

    申请号:KR20150017511

    申请日:2015-02-04

    Abstract: 본발명은, 링형상의베어링케이지가공급되는베드부, 베드부에연결되어베어링케이지를이송시키는이송부, 베드부의상부에이격되게설치되어, 이송부에의하여베어링케이지가제1검사위치에위치하면베어링케이지의상면과하면을검사하는제1비전검사부, 베드부에연결되어제1비전검사부가베어링케이지의상면과하면을각각검사할수 있도록베어링케이지를수평방향축을중심으로회전시키는상하회전부및 베어링케이지가제1검사위치로이송되게이송부를구동제어하고, 베어링케이지가제1검사위치에위치하면베어링케이지의상면과하면을검사하도록제1비전검사부를작동시키고, 베어링케이지를회전시키도록상하회전부를구동제어하는제어부를포함하는베어링케이지검사장치를제공한다. 따라서숙련자가아닌베어링케이지검사장치를통하여품질기준을확립할수 있음은물론, 확립된품질기준으로베어링케이지의품질검사를실시하기때문에제품품질의형평성을유지할수 있으며, 베어링케이지검사장치를통하여정밀검사를실시하기때문에제품의신뢰성을향상시킬수 있다.

    Abstract translation: 根据本发明的轴承保持架检查装置包括:提供环形轴承保持架的床单元; 连接到床单元以运输轴承座的运输单元; 第一视觉检查单元,其设置在所述床单元上方并与所述床单元分离,以在所述轴承保持架通过所述运输单元运送到第一检查位置时检查所述轴承保持架的上表面和下表面; 垂直旋转单元,连接到床单元,以使轴承保持架围绕水平轴旋转,以允许第一视觉检查单元检查轴承座的上表面和下表面; 以及控制单元,其控制所述运送单元将所述轴承保持架运送到所述第一检查位置,当所述轴承保持架被输送到所述第一检查位置时,操作所述第一视觉检查单元检查所述轴承保持架的上表面和下表面 ,并控制垂直旋转单元旋转轴承座。 因此,可以通过轴承保持架检查装置而不是技术人员来建立质量标准。 由于轴承保持架的质量检验是按照既定的质量标准进行的,所以可以保持产品质量的公平性。 由于通过轴承保持架检查装置进行精密检查,因此可以提高产品的可靠性。

    다채널 형광 검출 모듈 및 이를 포함하는 핵산 분석 시스템
    107.
    发明公开
    다채널 형광 검출 모듈 및 이를 포함하는 핵산 분석 시스템 审中-实审
    多通道荧光检测模块和具有相同功能的核酸分析系统

    公开(公告)号:KR1020150015289A

    公开(公告)日:2015-02-10

    申请号:KR1020130091171

    申请日:2013-07-31

    Abstract: 다채널 형광 검출 모듈 및 이를 포함하는 핵산 분석 시스템이 개시된다. 일 실시예에 따른 핵산 분석 시스템은, 미세 유체 소자를 포함하는 다수의 카트리지들이 각각 배치될 수 있는 다수의 적재부; 직선 운동을 하는 가동자를 구비하는 리니어 액추에이터를 포함하는 이송 모듈; 및 상기 가동자에 고정되어 상기 가동자와 함께 이동하는 것으로, 상기 카트리지에 여기광을 조사하고 상기 카트리지 내의 샘플로부터 발생한 형광을 검출하는 형광 검출 모듈;을 포함하며, 상기 다수의 적재부들은 상기 가동자의 직선 운동 궤도를 따라 일렬로 배열될 수 있다.

    Abstract translation: 在本发明中,公开了多通道荧光检测模块和包含该多通道荧光检测模块的核酸分析系统,其包括多个装载部件,其中布置有多个具有微流体装置的盒; 转移模块,其具有包括可移动元件直线移动的线性致动器; 以及荧光检测模块,其固定在可移动元件上,因此一起移动,将激发光发射到暗盒,并且检测墨盒中的样品的荧光,其中多个加载部件与所述可移动元件的直线移动轨迹一起排列成行 活动元素

    기판 검사 장치
    108.
    发明公开
    기판 검사 장치 有权
    基板检查装置

    公开(公告)号:KR1020040038998A

    公开(公告)日:2004-05-10

    申请号:KR1020020066613

    申请日:2002-10-30

    Abstract: PURPOSE: A substrate inspecting apparatus is provided to be capable of carrying out many kinds of inspecting processes. CONSTITUTION: A substrate inspecting apparatus(100) is provided with the first stage(160) for supporting a substrate, the first image capture part(110) for capturing the first image of the substrate edge portion, the second stage(170) for supporting the substrate transferred from the first stage, the second image capture part(120) for capturing the second image of the substrate, and a transfer part(180) for transferring the substrate from the first stage to the second stage. The substrate inspecting apparatus further includes a data processing part(144) connected with the first and second image capture part for inspecting the results of an EBR(Edge Bead Removal) process and an EEW(Edge Exposure of Wafer) process for the substrate by using the first image of the substrate and detecting the pattern defect generated on the substrate by using the second image of the substrate.

    Abstract translation: 目的:提供一种能够进行多种检查过程的基板检查装置。 构成:衬底检查装置(100)具有用于支撑衬底的第一工作台(160),用于捕获衬底边缘部分的第一图像的第一图像捕获部分(110),用于支撑衬底边缘部分的第二工作台(170) 从第一阶段转移的基板,用于捕获基板的第二图像的第二图像捕获部分(120)和用于将基板从第一阶段转移到第二阶段的转移部分(180)。 基板检查装置还包括与第一和第二图像捕获部分连接的数据处理部分(144),用于通过使用用于检查基板的EBR(边缘珠去除)处理和EEW(晶片的边缘曝光)处理的结果来检查 衬底的第一图像,并且通过使用衬底的第二图像来检测在衬底上产生的图案缺陷。

    TRANSMISSION RAMAN SPECTROSCOPY
    109.
    发明申请
    TRANSMISSION RAMAN SPECTROSCOPY 审中-公开
    传输拉曼光谱

    公开(公告)号:WO2016142699A1

    公开(公告)日:2016-09-15

    申请号:PCT/GB2016/050630

    申请日:2016-03-08

    Applicant: RENISHAW PLC

    Abstract: This invention concerns a transmission Raman spectroscopy apparatus comprising a light source (101) for generating a light profile (110) on a sample (102), a photodetector (103) having at least one photodetector element (103a), collection optics (104) arranged to collect Raman scattered light transmitted through the sample (102) and direct the Raman light onto the at least one photodetector element (103a) and a support (109) for supporting the sample (102). The support (102) and light source (101) are arranged such that the light profile (110) can be moved relative to the sample (102) in order that the at least one photodetector element (103 a) receives Raman scattered light generated for different locations of the light profile (110) on the sample (102).

    Abstract translation: 本发明涉及一种透射拉曼光谱仪,包括用于在样品(102)上产生光谱(110)的光源(101),具有至少一个光电检测器元件(103a)的光电检测器(103a),收集光学器件(104) 布置成收集透射通过样品(102)的拉曼散射光并将拉曼光引导到至少一个光电检测器元件(103a)上,以及用于支撑样品(102)的支撑件(109)。 支撑件(102)和光源(101)被布置成使得光轮廓(110)能够相对于样品(102)移动,以使得至少一个光电检测器元件(103a)接收生成的拉曼散射光, 样品(102)上的光谱(110)的不同位置。

    APPARATUS AND METHOD FOR INSPECTION OF A MID-LENGTH SUPPORTED STEERING COLUMN ASSEMBLY
    110.
    发明申请
    APPARATUS AND METHOD FOR INSPECTION OF A MID-LENGTH SUPPORTED STEERING COLUMN ASSEMBLY 审中-公开
    用于检查中长度支撑转向柱组件的装置和方法

    公开(公告)号:WO2015120027A1

    公开(公告)日:2015-08-13

    申请号:PCT/US2015/014427

    申请日:2015-02-04

    Abstract: An apparatus (110) (and associated method) for inspecting a steering column assembly (10) including at least one motorized roller support assembly (118) that is adapted to rotatably support the steering column assembly at least partially along its length, and at least one optical scanning device (158) adapted to optically scan a feature of Interest of the steering column assembly while the shaft of the steering column assembly is rotated for gathering data for identifying one or more deviations from one or more predetermined values for the feature of interest.

    Abstract translation: 一种用于检查转向柱组件(10)的装置(110)(和相关联的方法),该转向柱组件包括至少一个电动辊支撑组件(118),其适于至少部分沿其长度可旋转地支撑转向柱组件,并且至少 一个光学扫描装置(158),其适于在转向柱组件的轴旋转时光学地扫描转向柱组件的特征,以收集用于识别关于感兴趣特征的一个或多个预定值的一个或多个偏差的数据 。

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